Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output
Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output
Valve mounting direction ( ) 02 2 stations Single solenoid coil is located on the opposite side of the A, B port. -: : Single solenoid coil is located on same side as the A, B port.
sensor PV PD PV PD Port open to atmosphere Port open to atmosphere Port open to atmosphere Vacuum break flow adjustment needle Supply valve Supply valve EXH EXH Release valve Release valve Release valve Manual override V V Exhaust A Vacuum pump system/Manifold 1.1 1.28 ZZB-SM5 ZB0030-K1L(O)-P D side U side 1 3 Stations 1 2 3 4 D side U side n 1 Stations n 1.535 (Fully open: 1.67) Pressure
HS Auto switch Auto switch 12 8.5 24.5 16 A B A B 33 38.2 Auto switch mounting position Auto switch mounting height (mm) (mm) Auto switch model D-C7, C8 D-H7 D-H7W D-H7F D-H7BA D-H7 D-H7C D-H7W D-H7BA D-C7, C8 D-C73C D-C80C D-B5, B6 D-C73C D-C80C D-B5, B6 D-B59W D-G5NT D-H7C D-G5NT D-B59W D-H7F Bore size (mm) A A B A B A A HS HS HS B B B B A 20.5 (28.5) 14.5 (22.5) 17.5 (25.5) 19.5 (27.5)
BA-01 BA-02 BA-32 BA-04 BA-05 BA-06 BA-08 BA-10 D-A3/A44 D-G39/K39 BD1-01M BD1-02M BD1-02 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M Note 1) Two kinds of auto switch mounting brackets are used as a set.
Parenlneses CPA1 BN do Boot with Boot' BORE D E G'GB J K M MM N P H z.
Element replacement is easy with the V-band type.
Option Stations required for mounting None Exhaust cleaner for Rc1: D side mounting Exhaust cleaner for Rc1 1/2: D side mounting Exhaust cleaner for Rc1: U side mounting Exhaust cleaner for Rc1 1/2: U side mounting Nil CD1 CD2 CU1 CU2 K Note 2) 02 2 stations Note 1) D side entry U side entry Kit, Cable length Stations D sub connector kit (25P) without cable D sub connector kit (25P) with
Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2301F-02-06-X214 10-AS2201F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 Although speed adjustment is possible with
type 0.1 5 to 40 V V V HRS090 Standard type 0.5 5 to 35 V Indoor use (400 V as standard) Outdoor installation IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 V V HRSH090 Inverter type 0.1 5 to 40 V Indoor use (400 V as standard, 200 V as an option) (Only 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (400 V as standard, 200 V as an option
(Maximum 10 stations) Example) IITV00-05-07 02 03 2 stations 3 stations Indicate part numbers in order starting from the first station on the D side. 10 10 stations Note) Combination with having different pressure ranges is not available due to common supply/exhaust features. Note) A DIN rail with the length specified by the number of stations is attached to the manifold.
VH*-OMX0068-C PRODUCT NAME Pressure Relief 3 Port Valve with Locking Holes MODEL / Series / Product Number VHS20-(F,N)01~(F,N)02(-B,S)(-K,M,R,Z)-D VHS30-(F,N)02~(F,N)03(-B,S)(-K,M,R,Z)-D VHS40-(F,N)02~(F,N)04(-B,S)(-K,M,R,Z)-D VHS40-(F,N)06(-B,S)(-K,M,R,Z)-D VHS50-(F,N)06~(F,N)10(-B,S)(-K,M,R,Z)-D VHS20W-(F,N)01~(F,N)02(-B,S)(-K,M,R,Z)-D VHS30W-(F,N)02~(F,N)03(-B,S)(-K,M,R,Z)-D VHS40W-(F,
VS3135 A01-01 A01-02 A07-52 q Description Electrical entry VS3145 Solenoid cover Body 100 VAC 200 VAC Grommet A12-01 A12-02 A08-52 w e Spool/Sleeve 24 VDC 100 VAC 200 VAC Conduit terminal 24 VDC A01-01-63 A01-02-63 A07-52-63 A12-01-63 A12-02-63 A08-52-63 Replacement Parts Material Part no. VS3135 XT019-6 XT013-13-2 XT010-15 Description VS3145 No.
ML1C 25 Bore size (mm) Auto switch model D20 20 25 32 40 32 20 D-B5/B64 D-G5/K5 BA-01 BA-02 BA-32 BA-04 25 20 -X 10 D-C7/C80 D-H7 BMA2-020 BMA2-025 BMA2-032 BMA2-040 20Mounting screws set made of stainless steel The following set of mounting screws made of stainless steel is also available. Use it in accordance with the operating environment.
Dimensions LLHAStations 4 x Mounting hole for W Y K A D E L2 L1 N Non-locking type Locking type L3 G 60 (H1) (H2) C SMC SMC SMC SMC V 1/4 1/4 1/4 U 3/8 Pitch = B 2 x P port n x A port (mm) Dimensions (mm) A G D E C U Y W V N K H2 H1 B Model LLH2A LLH3A LLH4A Station 5 4 3 2 Model 10 67 19 65 19 5.5 M4 34 27 18 87 85.5 31 46.5 Symbol L1 L2 L3 L1 L2 L3 L1 L2 L3 19 76 27.5 94.5 27.5 6.5 M5 47
PFMB7--CNPN (1 output) + Analogue output type (4 to 20 mA) PFMB7--DMaximum applied voltage: 28 V Maximum load current: 80 mA Internal voltage drop: 1 V or less C: Analogue output: 1 to 5 V Output impedance: 1 k D: Analogue output: 4 to 20 mA Maximum load impedance: 600 NPN (1 output) + External input type PFMB7--GMaximum applied voltage: 28 V Maximum load current: 80 mA Internal voltage
5 AS-FG AS-FP AS-FM AS321F-02 Meter-out type AS3201F-02 Meter-in type AS3211F-02 AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ Component Parts No.
P V < 2 3 . 0 o C # 1 S V 3 0 . 0 o C M O D E R e m : 0 5.10.4 Circulating fluid set temperature The circulating fluid set temperature can be set by specifying the circulating fluid target temperature during Serial Remote mode.