N X X Y S+Stroke Y LX Z LS+Stroke LZ ZZ+Stroke (mm) A AL B B1 B2 C D F G H H1 H2 I K LD LH LS LX LZ MM N NA Bore size Stroke range 20 M8 X 1.25 18 15.5 40 13 26 40 8 13 10 41 5 8 33.5 5 6.8 25 186 40 55 20 30 150 to 700 M10 X 1.25 25 22 19.5 47 17 32 45.5 10 13 10 45 6 8 37.5 5.5 6.8 28 186 40 55 20 34.5 150 to 700 M10 X 1.25 32 22 19.5 47 17 32 49.5 12 13 11 45 6 8 46.5 5.5 6.8 28 199 40
Number of auto switches [mm] Number of auto switches 1 2 n Auto switch model Different surfaces Same surface Different surfaces Same surface D-M9m 25 25 40 20 + 35 (n 2) 2 (n = 2, 4, 6)*1 55 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mW 25 25 40 20 + 35 (n 2) 2 (n = 2, 4, 6)*1 55 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mA 25 25 40 25 + 35 (n 2) 2 (n = 2, 4, 6)*1 60 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mV
Model r e b m u N A f o t r o P l e d o M g n i t r o P e z i s t r o P B e z i s t r o P A c i r t e M " 2 3 / 5 " 4 " 4 / 1 " 6 " 6 1 / 5 " 8 t r o P A t r o P B h c n I 1 1 M K h c u o t e n O g n i t t i f g n i t t i f h c u o t e n O 0 1 , 6 6 1 / 5 8 8 / 3 0 1 2 / 1 2 1 2 1 M K h c u o t e n O g n i t t i f d a e r h t T P N 0 1 , 6 4 / 1 T P N ) T P ( c R 4 / 1 d a e r h
Flow rate conversion NO OFF n-2 n-1 High flow rate Basic state: 0C, 101.3kPa Standard state: 20C, 101.3kPa, 65%RH (ANR) Switchable between these states.
Flow rate conversion NO OFF n-2 n-1 High flow rate Basic state: 0C, 101.3kPa Standard state: 20C, 101.3kPa, 65%RH (ANR) Switchable between these states.
Flow rate conversion PF2 NO OFF n-2 n-1 High flow rate Basic state: 0C, 101.3 kPa Standard state: 20C, 101.3 kPa, 65%RH (ANR) Switchable between these states.
R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.
Thus, F= 5 x 0.05 x 9.8 = 2.5 (N) 1. Calculation of applied lateral load F F = N m g (N) = 0.2 x 10 x 0.1 x 9.8 = 2.1 (N) CC 70 Lateral load F (N) RB 60 0.4 MPa 50 J 40 2. Confirmation of allowable lateral load From the graph, the allowable lateral load at L = 50 mm and P = 0.4 MPa is 18 N. Because 2.1 N < 18 N, it is applicable. 30 20 D2.
Thus, F= 5 x 0.05 x 9.8 = 2.5 (N) 1. Calculation of applied lateral load F F = N m g (N) = 0.2 x 10 x 0.1 x 9.8 = 2.1 (N) CC 70 Lateral load F (N) RB 60 0.4 MPa 50 J 40 2. Confirmation of allowable lateral load From the graph, the allowable lateral load at L = 50 mm and P = 0.4 MPa is 18 N. Because 2.1 N < 18 N, it is applicable. 30 20 D2.
Without auto switch 2 pcs. 1 pc. n pcs.
XL +0.2 0 I D 2 x 4J E MB MC KA MA N K N C S + Stroke H B ZZ + Stroke Allowable angle displacement of E to B is 1.5.
Operation . 53 11.1 Return to origin position . 53 11.2 Positioning operation . 55 11.3.
YES OFF n-1 n-2 For Water/High Temperature Fluid Type (For Water) Instantaneous flow rate Display Instantaneous flow rate Accumulated flow Window comparator mode H : Hysteresis L/min L "n" H H ON GPM gal (US) Note 2) Output mode is set to inverted output at the factory before shipment.
Parenlneses CPA1 BN do Boot with Boot' BORE D E G'GB J K M MM N P H z.
' K3 type 50.5 ~Hs 38 43.5 1.5 1.5 A 0 DA3 type 24.5 24.5 23 B 35+3O (n2) 5O+5O(n 2) 35 55 D-A4 type D-G3K3 type !
Heater: Indicator: 5 Aluminum High Vacuum Angle Valve XLA/XLAV Series Dimensions XLA: Air operated (b) E C E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) [mm] Model A B C D E*1 Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95
E Bore size (mm) Stroke range (mm) F A H B C D E OA I J K L M N OB Q RA W Y RB 10 10 to 40 69.5 M3 x 0.5 61.5 6 6 29 9 M4 x 0.7 38 5 8 20 3.5 6.5 39.5 7 5 4 16 10 to 60 80.5 M4 x 0.7 70.5 8 8 36 11.5 M6 x 1.0 47 7 10 25.5 5.4 9 48.5 10 5 7 20 10 to 60 89 M5 x 0.8 79 10 10 40 12 M6 x 1.0 52 8 10 28 5.4 9 55 10 6 7 25 10 to 50, 75, 100 96.5 M6 x 1.0 84.5 12 12 45 13.5 M6 x 1.0 60 4.5
Selection Series MQQ Caution Operating Speed Allowable Kinetic Energy Anti-lateral Load Type: MQQ Load Weight and Maximum Speed: MQQT/MQQL Bore size (mm) Allowable kinetic energy (J) 10 16 20 25 28 1000 Example) Driving a load of 15 (N) using MQQ20 with a muximum speed of 167 (mm/s) 0.006 500 0.010 0.022 0.044 100 0.080 50 Load weight W (N) Cover range of MQQL (15) 10 MQQ28 5 MQQ25 MQQ20