MGC

D-G79/K79/K79C 10 8 10 9 10 D-H7/H7W, D-H7BAL, D-H7NF 6 4 4 4.5 5 MTS D-H7C 9.5 7 8.5 9 10 D-G5/K59 MY D-G5W/K59W 6 4 4 4.5 5 CY D-G5NTL/G5BAL D-G59F 7 5 5 5.5 6 MG D-G5NBL 45 35 40 40 45 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Since this is a guideline including

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

1 q t i 48 Series PF2D Dimensions: Remote Type Sensor Unit PF2D504-11/520-13 60 70 176 40 15 A Model PF2D504 PF2D520 9.52 12.7 62 52 42 A Internal circuits and wiring examples z to , are the terminal numbers. 4-4.5 Display unit (PF2D30/31) Sensor unit 52 1 Brown 6 2 Analog output Switch output or Pulse output Main circuit Main circuit 8 4 Load + 12 to 24 VDC White 7 3 Black 5 1 Blue 18

Compact and Lightweight

Supply valve (3 port valve) + Variable throttle + Suction filter Ex. 2 Supply/Release valve (5 port valve with 3-position) + Variable throttle Ex. 5 3 port valve 5 port valve with 3-position closed center Silencer 3 port valve is used to generate and release the vacuum.

Air Cylinder Series MB

65 75 95 114 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 13 14 15.5 16.5 19 19 47 51 58 58 72 72 16 16 16 16 16 16 4 4 5 5 5 5 M6 X 1 M6 X 1 M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 6 6 7 7 10 10 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 27 27 31.5 31.5 38 38 1/8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 4 4 5 9 11.5 17 6.5 9 10.5 12 14 15

MGQ

5 !6 !7 !8 !

CL

5 !6 !7 No.

Shuttle Valve/AND Valve, with One-Touch Fittings, SeriesVR12

F

Inch size 3/8" 5/16" 1/4" 5/16" 1/4" 5/32" 1/8" Flow rate l/min (ANR) 1000 680 440 480 420 210 150 INOUT Effective area mm 15.2 10.4 6.7 7.3 6.4 3.2 2.3 Note 1) Flow rate values are at a pressure of 0.5MPa and temperature of 20C.

Shuttle Valve/AND Valve with One-Touch Fittings

Weight g Model d D1 D2 L3 L2 D3 L1 L4 L5 M1 M2 VR1211F-01 1/8" 11.4 8.4 52 6.2 25.7 36.1 17.5 12.7 12.9 26.4 14.8 VR1211F-03 6.8 5/32" 12.8 10.4 56 26.6 38.5 21.9 15.7 15.8 30.4 VR1211F-07 1/4" 13.2 13.2 54.4 7.1 28.8 42.5 25.6 16.8 16.8 27.0 SMC Pneumatics, Inc. 5 Related Products / Holder Series TMH Specifications This holder is used to secure the AND valve and shuttle valve with One-touch

ITVH

Self-diagnosis: 5% F.S. or less Switch output PNP open collector output: Max. 80 mA Hysteresis: 3% F.S.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

VS3135 A01-01 A01-02 A07-52 q Description Electrical entry VS3145 Solenoid cover Body 100 VAC 200 VAC Grommet A12-01 A12-02 A08-52 w e Spool/Sleeve 24 VDC A01-01-63 A01-02-63 A07-52-63 100 VAC 200 VAC Conduit terminal 24 VDC A12-01-63 A12-02-63 A08-52-63 Replacement Parts Material Part no. VS3135 XT019-6 XT013-13-2 XT010-15 Description VS3145 No.

39

5 !6 !3 !4 o i Without switch !2 @1 @2 w r Description Replaceable kits list Component parts No.

Air Cylinder

Load voltage Auto switch model Lead wire length [m] Pre-wired connector Applicable load DC AC Perpendicular In-line 0.5 (Nil) 1 (M) 3 (L) 5 (Z) Indicator light Type Special function Electrical entry Wiring (Output) M9NV M9N V V V v v IC circuit 3-wire (NPN) 5 V, 12 V Solid state auto switch 3-wire (PNP) M9PV M9P V V V v v 2-wire 12 V M9BV M9B V V V v v 3-wire (NPN) 5 V, 12 V M9NWV M9NW

Clean Room Regulator/Fluoro Resin Type Series SRF30

Dimensions Tubing/SRF30-T11 2-30 IN OUT 67.7 32.3 52 Pilot port identification symbols and port types (marking) Symbol R N Port type Rc 1/8 NPT 1/8 12 R 75 52 64 1 2 SMC 4-5.5 41.7 Integral fittings/SRF30-S IN OUT 67.7 32.3 52 (112) Pilot port identification symbols and port types (marking) Symbol R N Port type Rc 1/8 NPT 1/8 12 R 75 52 64 1 2 SMC 4-5.5 41.7

NCA1

4 7/8 2 5/8 5 4 1 3/8 1-14 1 5/8 2 3/8 1 2 5/8 4 7/8 2 5/8 5 1/4 5 1 3/4-16 1 1/8 1.5 1/4 3/4 2 5/16 5 1/8 2 7/8 5 1/4 5 1 3/8 1-14 1 5/8 2 3/8 1 2 9/16 5 1/8 2 7/8 5 1/2 5 1 3/4 1 1/4-12 2 2.375 1/2 1 1/4 2 13/16 5 1/8 2 7/8 5 3/4 6 1 3/8 1-14 1 5/8 2 1/4 7/8 2 13/16 5 3/4 3 1/8 5 7/8 6 1 3/4 1 1/4-12 2 2.375 3/8 1 1/8 3 1/16 5 3/4 3 1/8 6 1/8 6 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 3/16 5

Air Cylinder NCA1 Series

1/2 1 2 5/16 5 2 3/8 4 4 1/2 1/2 5/8 2 1/4 1 1/4 3/8 2 5/8 7/16-20 3/4 1.125 1/4 5/8 1 15/16 5 2 3/8 5 5 1/2 1/2 5/8 2 1/4 1 1/2 7/16 6 6 1/2 3/4 3/4 2 3/4 1 5/8 7/16 2 1 3/4-16 1 1/8 1.5 1/2 1 2 5/16 5 2 3/8 2 1 3/8 1-14 1 5/8 2 5/8 1 1/4 2 9/16 5 2 3/8 2 1/2 5/8 7/16-20 3/4 1.125 1/4 5/8 1 15/16 5 2 3/8 2 1/2 1 3/4-16 1 1/8 1.5 1/2 1 2 5/16 5 2 3/8 2 1/2 1 3/8 1-14 1 5/8 2 5/8 1 1/4 2

Compact 5-Port Solenoid Valve

(A)4 2(B) (A)4 2(B) 4(A) 2(B) (EA)5 1 3(EB) (EA)5 1 3(EB) (P) (P) 3-position pressure center 5(EA) 3(EB) 1(P) (A)4 2(B) N.O. valve x 2 pcs. 2(B) 4(A) (EA)5 1 3(EB) (P) 3(EB) 5(EA) 1(P) N.C. valve, N.O. valve x 1 pc. of each 2(B) 4(A) 3(EB) 5(EA) 1(P) Component Parts No.

SV

Core wire colors 7 1 8 1 7 3 2 8 7 1 8 3 2 8 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 2 3 1 7 2 3 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 6 5 4 4 5 6 4 5 6 6 5 4 Socket connector pin arrangement Plug connector pin arrangement Socket connector pin arrangement Plug connector pin arrangement Connections Connections

HRX-OM-R005

Display and setting of various functions . 5-1 5.1 List of function . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.2.2 List of parameters . 5-4 5.3 Main screen . 5-7 5.3.1 Main screen . 5-7 5.3.2 Display on the main screen . 5-7 5.4 Alarm display menu . 5-8 5.4.1 Alarm display menu . 5-8 5.4.2 Content of display of alarm display menu . 5-8 5.5 Inspection monitor menu . 5-9 5.5.1 Inspection

HRX-OM-R016

Display and setting of various functions . 5-1 5.1 List of function . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.2.2 List of parameters . 5-4 5.3 Main screen . 5-7 5.3.1 Main screen . 5-7 5.3.2 Display on the main screen . 5-7 5.4 Alarm display menu . 5-8 5.4.1 Alarm display menu . 5-8 5.4.2 Content of display of alarm display menu . 5-8 5.5 Inspection monitor menu . 5-9 5.5.1 Inspection

HRX-OM-W038

Display and setting of various functions . 5-1 5.1 List of function . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.2.2 List of parameters . 5-4 5.3 Main screen . 5-7 5.3.1 Main screen . 5-7 5.3.2 Display on the main screen . 5-7 5.4 Alarm display menu . 5-8 5.4.1 Alarm display menu . 5-8 5.4.2 Content of display of alarm display menu . 5-8 5.5 Inspection monitor menu . 5-9 5.5.1 Inspection