Table of Contents

3 w e q !1 r y o e t !2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4 Built-in magnet Without magnet Single acting u i r y o e w i e u !

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

MGZ Floating Joint MGT Center of sphere M M U U D H G B F P C E R A (mm) DMax. operating tension and compression N Center of sphere R Model Max. screw-in depth P Allowable eccentricity U M A Applicable bore size Mass (kg) B C D E F G H Nominal size Pitch Compression Tension -X JB40-8-125 JB63-10-150 JB80-16-200 JB100-20-250 JB140-22-250 20, 25 32 40 50, 63 80 8 10 16 20 22 1.25 1.5 2 2.5

Air Slide Table Series MXW

Lead wire length symbols: 0.5 m Nil 1 m M 3 m L 5 m Z (Example) M9NW (Example) M9NWM (Example) M9NWL (Example) M9NWZ Since there are other applicable auto switches than listed, refer to page 167 for details. For details about auto switches with pre-wired connector, refer to pages 1784 and 1785.

Compact Cylinder

(D-M9A(V)L can be used with a lead wire of 0.5 m and 3 m.) Note 3) 1 m (M): D-M9(V), M9W(V), M9A(V)L only.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Floating Joint Center of sphere M M U U D H G B F P C E R A (mm) Max. operating tension and compression N Center of sphere R Model Max. screw-in depth P Allowable eccentricity U M A Applicable bore size Weight (kg) B C D E F G H Nominal size Pitch Compression Tension JB40-8-125 JB63-10-150 JB80-16-200 JB100-20-250 JB140-22-250 20, 25 32 40 50, 63 80 8 10 16 20 22 29 35.5 47.5 59 71.5 1.25

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Parallel input (NPN) Parallel input (PNP) 3 I/O cable (3 m) 5 I/O cable (5 m) 7 Screw mounting 8*3 DIN rail E EtherCAT 9 EtherNet/IP P PROFINET D DeviceNet L IO-Link M CC-Link Ver. 1.10 5 Parallel input (NPN) 6 Parallel input (PNP) For single axis *4 Select Nil for anything other than DeviceNet, CC-Link, or parallel input.

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

Start up procedure for battery-less absolute encoder . 51 10.1 Procedure for start up . 51 10.2 When supplying power for the first time . 52 10.3 Supply of power . 53 10.4 Alarm (group E) is cleared by a cut to the power supply . 54 11.

CJ2

Lead wire length symbols: 0.5 m Nil (Example) C73C 3 m L (Example) C73CL 5 m Z (Example) C73CZ None N (Example) C73CN Since there are other applicable auto switches than listed, refer to page 6-3-13 for details.

Mini Free Mount Cylinder

(Example) L D-M9BW Nil Lead wire length 0.5 m 1 m M 3 m 5 m L Z Note) Switch operation position (ON) Note) 1 m (M): D-M9W only 1 mm or less Hysteresis Switch operation position (OFF) Solid state switch Oilproof flexible heavy-duty cable indication To designate solid state switches with flexible specifications, add -61 after the lead wire length.

21

Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ None N (Example) H7CN Solid state auto switches marked with are produced upon receipt of order.

Direct Operated

E B1 A A B2 B2 B1 Conduit terminal: T DIN terminal: D F J D Cable 6 to 12 F M J 34 G1/2 D 25 Width across flats H Width across flats H N 44 K K C C M Port size 3 x P Port size 3 x P E E A A B2 B2 B1 B1 G1/2 With bracket T 4 Q (mm) Grommet Conduit DIN terminal Electrical entry (AC/Class B) Model Orifice diameter Port size P Conduit terminal J K J K J K M J K M N N.C., N.O., COM.

Electromagnetic Digital Flow Switch

S Without bracket (Bottom view) Model Port size A B C D E F G H I J K L M N O P Q R S T U LFE1l3l 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 LFE1l4l 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 LFE2l 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 62 53 4.6 9.5 14 56 38 2.5 depth 8.5 2.6 LFE3l 1 120 90 55 32 73 100 106

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

0 e 1 New PFA Body 2 New PFA Sensor 3 Super PFA Tube 4 PPS Housing A 5 PPS Housing B 6 PPS Housing C 7 POM Bushing 8 PPS Cap 9 FKM Gasket 10 FKM O-ring 11 Stainless steel 304 Thread 12 PVC Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

CJ2

Component Parts No. q w e r t y No. u i o !0 !

High performance type Step Motor Controller (Servo/24 VDC)

Product Outline 5 2.1 Product features 6 2.2 Product configuration 7 2.3 How to Order 8 2.4 Option 9 (1) Actuator cable [5 m or less] 9 (2) Actuator cable [8 to 20 m] 9 (3) Actuator cable for actuator with lock (for sensor and lock) [5 m or less] 10 (4) Actuator cable for actuator with lock (for sensor and lock) [8 to 20 m] 11 (5) I/O Cable 11 (6) Communication cable for controller setting

SMC Pneumatic Clean Series

filter Flow control equipment Filter, Pressure control equipment Air preparation equipment Relief port 2-cushion valve M5 x 0.8 GA GB Width across flats KA 2-RcP 4-J 4-FD 6 Width across flats B1 E FV FY D B MM H1 AL A N B C 18 K N FT H S + Stroke M FX ZZ + Stroke FZ (mm) AL Bore size Stroke range Symbol B B B1 C D E FV FD FT J FX FY MM M FZ A GAGB H P S ZZ H1 K KA N 60 12 80 42 11 22 M8

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

Assembly 1) Terminal block e connected with housing r should be reinstated.

VCA

size (S) PB Port size G1/2 Compatible heavy-duty cord Cable O.D. 6 to 12 L L K 2-M Thread depth 6 K 2-M Thread depth 6 (mm) Electrical entry P Port size B Model A C D E F K L M Grommet: G Conduit: C DIN terminal: D Conduit terminal: T S 68 71 74 74 U 81 91.5 101 103.5 S 51 54 57 57 Q 98 101 104 104 R 36 44 53 55.5 R 40 48 56 58.5 Q 46 50 52 52 R 36 44 53 55.5 Q 63 66 69 69 R 35 42 51 53.5

mb1

5 u q y e t !2 w i A CJ1 CJP CJ2 A Cylinder tube sectional view A-A !0 o CM2 CG1 Component Parts MB No. q w e r t y u i o !0 !1 No.

70astamb1

The kinetic energy of load can be found using the following formula. 20 10 5 V M M 2 V 2 100 300 1000 2000 500 Ek = Ek: Kinetic energy (J) M: Weight of load (kg) V: Piston speed (m/s) Maximum drive speed (mm/s) Example) Load limit at rod end when air cylinder 63 is actuated with max. actuating speed 500 mm/s. at a maximum drive speed of 500 mm/s.