Rotary Actuator/Vane Style Series CRB2

Applicable shaft type: W CRQ2 MSQ (mm) MSZ Q2 Y L2 max Size (mm) Q1=M Q2=M CRQ2X MSQX 10 X Q1 L1 max Size M 4 7 to 8 Y-3 Y= 10 15 9 to 14 M4 X-5 M 5 8.5 to 9 Y-3.5 L2= L1= MRQ 15 20 M5 11 to 18 X-6 M 6 10 Y-4 X= 20 30 M6 13 to 20 X-7 M 8 13 Y-5 30 40 M8 16 to 22 X-8 M10 15 Y-6 Symbol: A5 Symbol: A6 The long shaft can be further shortened by machining it into a stepped round shaft.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

12.7 11 3 28.1 [35.1] P R1 15 R2 M5 x 0.8 (P, R1, R2 port) 21 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors L plug connector (L): 10-SYJ5 23-L-M5 3 4 5 M plug connector (M): 10-SYJ5 23-M-M5 3 4 5 DIN terminal (D, Y): 10-SYJ5 23-M5 M8 connector (WO): 10-SYJ5 23-WO-M5 3 4 5 3 4 5 D Y Approx. 300 (Lead wire length) Applicable

5 Port Solenoid Valve

SS5Y5 12S NA 05 N M U Refer to page 23 for Type 12/ Top ported dimensions. q w e r y t u Mixed Mounting Type It is possible to mount SY3000 size valves on all stations.

CQ2

21 25 30 30 40 50 55 M5 X 0.8 M6 X 1 6.3 8.1 7 10 14.6 0.4 0.2 0.2 0 0.4 0.2 0.4 0.2 0.5 0.3 0.5 0.3 0.5 0.3 0.5 0.3 IY-G012 5 5 8 10 10 14 18 22 5 5 8 10 10 14 18 22 12 16 20 25 32, 40 50, 63 80 100 I-G012 I-Z015A I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 Y-G012 Y-Z015A Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 10 12 16 20 22 28 38 44 +0.048 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070

Rotary Actuator

$Applicable shaft type: W $Applicable shaft type: W (mm) Y L2 max Q2 Size (mm) Q1 = M Q2 = M 10 X L1 max Q1 7 to 8 Size Y-3 M4 Y = 10 15 8.5 to 9 9 to 14 X-5 M4 Y-3.5 M5 L2 = L1 = 15 20 10 11 to 18 X-6 M5 Y-4 M6 20 30 X = 13 13 to 20 X-7 M6 Y-5 M8 30 40 15 16 to 22 X-8 M8 Y-6 M10 Symbol: A5 The long shaft can be further shortened by machining it into a stepped round shaft.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A 10 12 16 20 22 28 38 44 10 6 8 8.5 10.5 14 18 21 21 16 25 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 8.1 10.3 12.8 12 16 21 24 7 14 11.5 14 14 20 27 31 21.5 6 16 21 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 7 14.6 21.5 32 34 41 42 56 71 79 10 I-G012 I-Z015A I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 Y-G012 Y-Z015A Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 5 5 8 10 10 14 18 22 +0.048 0 5 6.4

KQ2

(inch) Model H Connection thread Min. port size KQ2H01-M5 KQ2H07-M5 KQ2H01-M5 KQ2H07-M5 Note) Mass (g) (Width across flats) L A M D Applicable tubing R M KQ2H01-M5 2 9 16 6 11 12 3.3 10 15 M5 x 0.8 7 16.7 21.1 13.6 18 12.7 KQ2H01-01S 1 8 1 8 10 15.5 2.5 1 4 KQ2H01-02S 19 13.5 14 2.5 M5 x 0.8 KQ2H05-M5 10.7 10.3 24 21.1 20.5 18.4 21.6 22.5 20.5 18 15 15.3 18.5 17 8 11 14 11 16.5 1 8

Electric Actuators

10 0 Transfer load m (kg) 1000 a = 1000 to 3000 L2 500 Mer m 5 10 0 Transfer load m (kg) a 1000 Mey a = 1000 to 3000 500 m L3 5 10 0 Transfer load m (kg) Refer to page 304 for deflection data. 254 2 Phase Stepper Motor/Without Motor Brake Series LXS Dimensions/LXSH2SA Scale: 25% F G x I +0.030 0 depth 5 +0.030 0 depth 5 D-5.1 through 5H9 10 7.5 E-M5 thread depth 10 Refer to Cross section

KJ

360 around the stud axis For reducing R 1/8 female to M5. 1 8 For nylon tubing 1 8 R x M5 female M-5B 6/4 x R 6/4 x M5 M-01AN-6 P. 56 M-5HL-6 P. 58 P. 59 1 8 Plug Use to plug unused M5 port.

Rotary Actuator

(Example) For M4: L2 = 8 Applicable shaft types: X, Z L1 + (3 x P) Q1 = M C1 = C L2 = L1 = L2 = D1 = Q2 = M Q2 = M C1 Z axis X axis X = L1 = [mm] [mm] [mm] Size Q1 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Size Q2 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Size X L1max D1 30

Compact Hydraulic Cylinder

1.25 M14 x 1.5 M16 x 1.5 M4 12 12 12 16 10 10 12 12 10 10 13 13 7 7 7 9 6.5 5.5 5.5 CH2m M4 6.5 5.5 5.5 M5 10 9 7 CHA M5 10 9 10 Related Y-type double knuckle joint Bracket pin Equipment 20: Y-020B 25: Y-032B 32: Y-04D 40: Y-04B D-m 2 x D drill through RR1 RR1 C1 Chamfer NDH10 NDH10 MM C E1 E1 C1 Chamfer NX NZ NZ NX A1 A1 U1 L1 A B U1 L1 Material: Carbon steel Material: Cast iron Material

ZP

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

ZP3

One-touch fitting 2, 4 2, 4 2, 4, 6 Vacuum inlet Barb fitting1 2, 4 2, 4 2, 4, 6 1 2 polyurethane tubing, 4, 6 soft tubing Vacuum Inlet Direction Lateral Y Type/ZP3-Y Connection Female thread Pad diameter 1.5 to 3.5 4 to 8 10 to 16 Connection thread M3 x 0.5 M5 x 0.8 M5 x 0.8 Female thread M3 x 0.5 M5 x 0.8 M5 x 0.8 Vacuum inlet One-touch fitting 2, 4 2, 4 2, 4, 6 Barb fitting1 2, 4 2, 4

0.55

plug connector (M) DIN terminal (D) (Y) 52.1 Max. 10 55.5 Applicable cable O.D.

4/5 Port Solenoid Valve

M5 x 0.8 (A, B port) 10 5 10 2-3.2 (For mounting) 22 2.5 Manual override B A 11 A B 34.4 G: Approx. 300 H: Approx. 600 (Lead wire length) 78.8 [83.2] (Light/surge voltage suppressor) 41.5 [48.5] + 35.6 26.1 R1 P R2 13 5 10 10 10 M5 x 0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): SYJ3240-L-M5 M8 connector (WO): SYJ3240-WO-M5 M plug connector (M): SYJ3240-M-M5 Approx. 300 (Lead wire

VQZ1000/2000/3000

Rc 1/8 1(P) port 3 4 5 3 4 5 L plug connector (L): VQZ2 20 1(R)-L-C4/C6/M5 DIN terminal(Y): VQZ2 20 1(R)-Y-C4/C6/M5 Indicator light 300 149.5 (Lead wire length) 68 Pg.7 31 <36> 155.5 MAX. 10 71.5 Applicable cable O.D. 3.5 to 7 Indicator light Cover diameter 1.5 Cross section 0.23 mm2 < >: AC 61.5 54 0 1 3 4 5 36 M plug connector (M): VQZ2 2 (R)-M-C4/C6/M5 300 (Lead wire length) Cover diameter

AC

Model Description For AC1020 For AC2020 For AC2520 For AC3020 For AC4020 For AC4020-06 For AC5020 For AC5520 For AC6020 02 03 04 06 01 02 03 02 03 04 02 03 04 E30E20E30E6006 10 E6006 10 E10-M5 E6006 10 E50-06 E40Piping adapter 4 4 4 4 Y Pressure switch with piping adapter 02 03 04 06 2 2 2 Y 01 02 03 3 3 3 Y IS1000E02 03 04 02 03 04 3 3 3 Y IS1000EIS1000EIS1000EAttachment Accessory IS1000M

Table of Contents

: Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) m a = 2000 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 L2 (mm) Mer Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 L3 (mm) 2000 L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for

Rotary Actuator/Vane Style Series CRB1

(Example) For M3: L1 = 6 Applicable shaft types: S, Y L2 + (3 x P) L1 + ( 3 x P) Q1 = M Y axis S axis (mm) (mm) Q1 Q2 L1 = Shaft type Shaft type S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 M3, M4, M5 L2= 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6, M8 M4, M5, M6 Q2 = M M4, M5, M6 100 100 M5, M6, M8, M10 M5, M6, M8 M5, M6, M8 Symbol: A33 Machine

Vacuum Pad

Suffix of how to order () U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 Pad diameter: 4 to 8 Model Pad unit part no. Adapter part no. ZP3-Y(04/06/08)UM;-B5-@ ZP3-Y(04/06/08)B;-B5-@ ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.