Manifold Specifications

Round head combination screw VQ7 ( ) M3 x 8 With spring washer EVS Blanking plate VZ5000-68-1A VZ5000-68-1A VFN Manifold gasket Applicable Plug Assembly (D-sub connector cable assembly) Cable length 1.5 m 3 m 5 m 8 m Assembly part no.

7.4

Center Grommet (G): S07 6R-mG-m-m 2 3 (Lead wire length) (Lead wire length) 300 300 79.3 <86.7> 56.4 39.7 39.7 9.2 22 9.2 22 28.5 28.5 22.8 22.8 20.4 20.4 25 16.7 16.7 25 5.3 6.9 5.3 6.9 < >: 3-position closed center 21 21 8.2 8.2 8.2 8.2 M3 x 0.5 External pilot port M3 x 0.5 <1(P), 5(EA), 3(EB) port> M3 x 0.5 <1(P), 5(EA), 3(EB) port> M3 x 0.5 External pilot port Other dimensions

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

L3 L1 T L2 ASG32F-01 ASG42F-02 ASG52F-03 ASG62F-04 H (Width across flats) L4 Applicable tubing O.D. d L6 A D L5 M T L1 L3 L2 Max.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Load factor: ( (Load weight x 9.8) /Theoretical force) x 100% Conditions Series CJ2 Series CM2 6 x 1 m AS3301F-06 8 x 1 m AS3301F-08 AN110-01 Series MB/CA2 Series CJ2 Series CM2 4 x 1 m Series MB/CA2 Body ported Tubing bore x Length Speed controller Silencer Base mounted Tubing bore x Length Speed controller Silencer AS2301F-04 6 x 1 m 4 x 1 m AS1301F-04 AN120-M5 SYJ5120-M5 SYJ5140-01 AN101

REC

Example) If P=0.6MPa, a max. stroke =the respective 0.6 stroke in the graph X 0.5 Figure q 49 45 39 30 0.7 Front flange: F Rear flange: G 259 237 211 168 0.3 Foot: L L 199 183 162 129 0.5 W W W F 168 154 136 109 0.7 Load factor h 119 110 97 76 0.3 m 90 83 73 56 0.5 G 74 68 60 46 0.7 1) h=0.7 or less m 2) h=0.5 or less m 3) h=0.9 or less 1) In the case where cylinder is used for static action

OMU0023

109 6D m 14 0E SO 46 2E . 78 4E N 110 6E n 15 0F SI 47 2F / 79 4F O 111 6F o 16 10 DLE 48 30 0 80 50 P 112 70 p 17 11 DC1 49 31 1 81 51 Q 113 71 q 18 12 DC2 50 32 2 82 52 R 114 72 r 19 13 DC3 51 33 3 83 53 S 115 73 s 20 14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X 120 78 x

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

ZFB100 ZFB101 ZFB200 ZFB201 ZFB300 ZFB301 ZFB401 16 x 14 x L60 I-34S-A 10 x 6 x L33 10 pcs. 10 pcs. I-35S-A 10 pcs. 10 pcs. 12 x 8 x L42 O-ring, Seal Wiping with alcohol, etc., may cause damage. I-36S-A 10 pcs. 10 pcs. 14 x 10 x L45 I-39S-A 10 pcs. 10 pcs.

10

P Port size 2 x P Port size U W M U W M X 2 x 5.3 Mounting hole X 2 x 5.3 Mounting hole DIN terminal Conduit terminal D G1/2 S Q F Cable 6 to 12 34 D Q2 F (44) 31.5 32 25 R T E C R Y E C 1.5 1.5 S2 B B1 A A Y B B1 2 x P Port size 2 x P Port size U W M U W M X 2 x 5.3 Mounting hole X 2 x 5.3 Mounting hole (mm) Mounting bracket dimensions Port size P 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/2 A B B1 C

Soft Start-up Valve

With built-in silencer Model K L M N P Q R S T U V W X Y AV2000-m02-1 to 6D/Y(Z)m-A 30 50 51.5 44 5.5 10 66 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 14 AV3000-m03-1 to 6D/Y(Z)m-A 41 50 53.5 46 5.5 15 70 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 19 AV4000-m04-1 to 6D/Y(Z)m-A 50 60 64 54 8.5 18 90 3.2 39 74 M5 x 0.8 Depth 6.5 4 Width across flats 22 AV5000-m06, 10-1 to

Soft Start-up Valve

With built-in silencer Model K L M N P Q R S T U V W X Y AV2000-m02-1 to 6D/Y(Z)m-A 30 50 51.5 44 5.5 10 66 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 14 AV3000-m03-1 to 6D/Y(Z)m-A 41 50 53.5 46 5.5 15 70 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 19 AV4000-m04-1 to 6D/Y(Z)m-A 50 60 64 54 8.5 18 90 3.2 39 74 M5 x 0.8 Depth 6.5 4 Width across flats 22 AV5000-m06, 10-1 to

0.4

Load factor: ((Load mass x 9.8)/Theoretical force) x 100% Conditions Series Conditions CJ2 series CM2 series MB, CA2 series T0604 (O.D. 6/I.D. 4) x 1 m Tube x Length VQC1101 Speed controller AS3002F-06 AN15-C08 Silencer T0806 (O.D. 8/I.D. 6) x 1 m Tube x Length VQC2101 Speed controller AS3002F-08 AN20-C10 Silencer 542 I N D E X P.538 P.540 P.542 P.544 P.550 P.556 Features Variations Cylinder

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Without auto switch With auto switch C H OA Bore (mm) Standard stroke (mm) A 29 29 35 39 I K L D N M OB Q RA RB T E Inch Inch 5.4 5.4 7 10 Inch #8-32UNC #8-32UNC 1/4-20UNC 1/4-20UNC A 34 34 45 49 B 22 22 26 29 B 27 27 36 39 Metric 6 8 7 12 Metric M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 Metric M4 x 0.7 M4 x 0.7 M6 x 1 M6 x 1 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 #8-32UNC #8-32UNC #10-32UNF

33

Q = m x C x (T0 Tt) it = r x V x C x iT it = 1 x 20 x 4.2 x 103 x 12 900 = 1120 [J/s] 1120 [W] Q = m x C x (T0 Tt) it x 860 = c x V x 60 x C x iT it x 860 Cooling capacity = Considering a safety factor of 20%, 1120 [W] x 1.2 = 1344 [W] = 1 x 20 x 60 x 1.0 x 103 x 12 Thermo-chiller Q x t: Heat capacity [kJ] 15 x 860 1120 [W] 20C Water bath Cooling capacity = Considering a safety factor

Refrigerated Air Dryers Series IDF/IDU

J L K N M H P Auto drain Power cable holder 4 x 13 (Electric wire diameter 9 to 11) [opposite side] IDF55E, IDF75E R Air inlet Port size Air outlet Port size A Q G B E D Illuminated switch Ventilation air outlet Evaporation thermometer Ball valve Terminal block Auto drain F C Ventilation direction Ventilation direction J P L K Drain tube H M N (O.D. 10, length approx. 1 m) 4 x 13 Power cable

VCW

bases are composed by connecting 2 station and 3 station bases. 2stns. x 1 3stns. x 2 2stns. x 2 + 3stns. x 2 2stns. x 2 + 3stns. 2stns. + 3stns. x 2 Dimensions (mm) Electrical entry A B C D E G H J Z Model Grommet Conduit DIN connector Conduit terminal Q R S T U V W N X Y VV2CW2 49 20 24.5 28 4.5 38 17.3 34.5 65.5 22 45.5 44 43.5 46 58 41.5 66 99 77 VV2CW3 57 25.5 28.5 30 5.5 42 19.3 38.5

VCW

bases are composed by connecting 2 station and 3 station bases. 2stns. x 1 3stns. x 2 2stns. x 2 + 3stns. x 2 2stns. x 2 + 3stns. 2stns. + 3stns. x 2 Dimensions (mm) Electrical entry A B C D E G H J Z Model Grommet Conduit DIN connector Conduit terminal Q R S T U V W N X Y VV2CW2 49 20 24.5 28 4.5 38 17.3 34.5 65.5 22 45.5 44 43.5 46 58 41.5 66 99 77 VV2CW3 57 25.5 28.5 30 5.5 42 19.3 38.5

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

bases are composed by connecting 2 station and 3 station bases. 2stns. x 1 3stns. x 2 2stns. x 2 + 3stns. x 2 2stns. x 2 + 3stns. 2stns. + 3stns. x 2 Dimensions (mm) Electrical entry A B C D E G H J Z Model Grommet Conduit DIN connector Conduit terminal Q R S T U V W N X Y VV2CW2 49 20 24.5 28 4.5 38 17.3 34.5 65.5 22 45.5 44 43.5 46 58 41.5 66 99 77 VV2CW3 57 25.5 28.5 30 5.5 42 19.3 38.5

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

B Part no. d H B C D Applicable bore size (mm) Part no. d H B C D Applicable bore size (mm) SO-02 SO-03 SO-04 SO-05 NT-02 NT-03 NT-04 AC-NI-50 8 8 9 11 30 36.9 43.9 47.3 26 32 38 41 5 6 8 10 12.5 16.5 21.0 23 M8 x 1.25 M10 x 1.25 M14 x 1.5 M16 x 1.5 20 25 32 40 15.0 19.6 25.4 27.7 20 25 32 40 M22 x 1.5 M24 x 1.5 M30 x 1.5 M33 x 2.0 26 32 38 41 13 17 22 24 10 Series CHN Accessory Brackets

HRX-OM-Z002

HRLE090-W-Approx. 20 Installation environment specifications Sound noise HRLE050-A-2062/64 dB(A) HRLE050-W-2062/64 dB(A) HRLE090-A-2065 dB(A) HRLE090-A-4067 dB(A) HRLE090-W-20/4065 dB(A) * 1 m from the front surface, 1 m high from the floor, rated condition. 3.2 Installation HRLE Series 3-6 HRX-OM-Z002 Chapter 3 Transport and Set Up 3.2.3 Installation and maintenance space It is recommended

Check Valve Series AK 1

Description POM Valve 19033 19014 19024 e Stainless steel Spring 19037 19015 19025 r NBR O-ring 20 x 17 x 1.5 t NBR Ring 19016 19026 y Brass, NBR Seat ring 19013 19023 u Dimensions Model Port size L1 H B AK2000-01/02 22 25 1/8, 1/4 50 AK4000-02/03/04 36 36 1/4, 3/8, 1/2 67 AK6000-06/10 50 50 3/4, 1 95 Caution Be sure to read before handling.