ZX

Pitch = 21 Individual vacuum supply port Individual vacuum supply port PV Adapter D Adapter D M5 x 0.8 (or M6) Vacuum pad connection port (V port) M5 x 0.8 (or M6) Pitch = 21 M5 x 0.8 (or M6) Vacuum pad connection port (V port) Adsorption nozzle piping port 13-2-57 57 Series ZX Vacuum pad connection V port Vacuum pad connection V port Vacuum Pump System Manifold: Type K1 Common EXH Common

CV/MVGQ

A34 A44 B59W G59 G5P K59 G39 K39 G59W G5PW K59W G59F 100 V Relay, PLC PLC Yes Yes Relay, PLC 100 V, 200 V 12 V Terminal conduit PLC 24 V 2-wire 100 V 200 V DIN terminal Grommet Relay, PLC Diagnostic indication (2-color indication) 3-wire (NPN) 24 V 5 V,12 V IC circuit 3-wire (PNP) Grommet 100 V, 200 V 12 V 5 V, 12 V 12 V 5 V 12 V 12 V 5 V, 12 V 2-wire IC circuit Terminal conduit

CV/MVGQ

A34 A44 B59W G59 G5P K59 G39 K39 G59W G5PW K59W G59F 100 V Relay, PLC PLC Yes Yes Relay, PLC 100 V, 200 V 12 V Terminal conduit PLC 24 V 2-wire 100 V 200 V DIN terminal Grommet Relay, PLC Diagnostic indication (2-color indication) 3-wire (NPN) 24 V 5 V,12 V IC circuit 3-wire (PNP) Grommet 100 V, 200 V 12 V 5 V, 12 V 12 V 5 V 12 V 12 V 5 V, 12 V 2-wire IC circuit Terminal conduit

Compact Hydraulic Cylinder

5 V 200 V 100 V 3-wire (NPN equiv.)

5

V V V V V V V MB 20 V V V V V V Tie-rod V CA2 25 V V V V V V V CS2 32 V V V V V V V Compact V V V CQS 40 V V V V V V V V V V CQ2 Free mount V V CU 50 V V V V V 63 V V V V V v: Standard 80 V V V V V 100 V V V V V 125 V 140 V D160 V P. 141 P. 155 P. 172 P. 198 P. 212 P. 183 P. 225 P. 233 P. 251 P. 265 P. 285 P. 294 P. 309 -X 137 Smooth/Low Speed Cylinders CQlY/CQlX Series Added compact foot

SYJ300/500/700

x 0.8 1/8 1/8 1/8 1/8 1/8 Type SS3YJ5-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 Type SS3YJ5-41-01 1/8 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

12 V 100 V 200 V 110 V 220 V Part no.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

port S99 Heavy-duty cord 3-wire (NPN) Yes Yes Yes Yes No No Change threaded hole to through-hole S99V 5 V, 12 V For 10 and 15 Change the screw position S9P Relay, PLC 3-wire (PNP) IC circuit 24 V Grommet Change rotation range S9PV Change rotation range between 0 and 200 90 5 V, 12 V 5 V, 12 V, 24 V Parallel cord Change rotation range between 0 and 110 5 V, 12 V, 100 V 5 V, 12 V, 24 V, 100

Table of Contents

(mm) <M5> <M5> Note) Weight (g) Model D1 P A M D2 L 2-applicable tubing M5 x 0.8 KJU23-M5 KJU23-01S KJU04-M5 KJU04-01S KJU06-M5 KJU06-01S 5.9 8.3 6.4 8.8 7.4 9.9 Reference dimensions after R thread installation.

NCG/CG1

2-wire Diagnostic indication (2-color indication) Grommet B59W G59 G5P K59 G59W G5PW K59W G5BA G59F M9N M9P M9B M9NW M9PW M9BW M9BA 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V 12 V Grommet 24 V Relay, PLC IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 12 V 2-wire Water resistant (2-color indication) Diagnostic output (2-color indication

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

(Inch) 1 /4 3/8 1/8 5/32 1/4 5/16 M5 Pressure Specifications VP4 V V V VQZ1000 V VQZ2000, 3000 Series A, B port 2 position single 2 position double 3 position V V V VQZ2000 Metal seal only VQZ3000, 3 position 0.15 to 0.7MPa 0.1 to 0.7MPa V V V V VQZ3000 External pilot pressure range VQ Note) Millimeter sizes of One-touch fittings (Cl) are also available.

Made to Order

state auto switch Reed auto switch Terminal conduit 24 V Relay, PLC IC circuit Yes 5 V, 12 V Diagnostic indication (2-color) 12 V Grommet Water resistant (2-color indicator) 5 V, 12 V 12 V 3-wire (NPN equivalent) IC circuit A96 5 V Yes Grommet A93 A90 A33 A34 A44 100 V 100 V or less Relay, PLC No 2-wire IC circuit PLC 12 V 24 V Terminal conduit Yes Relay, PLC 100 V, 200 V Din terminal

Slide Unit Series CX2/CXWM/CXWL

A73H A80H E76A E73A E80A 3-wire (NPN equivalent) A72 A73 A80 A73C A80C 5 V 12 V 200 V 100 V IC circuit 10 16 20 25 32 16 20 25 32 Grommet CXS Relay, PLC 5 V, 12 V 12 V 100 V or less IC circuit 2-wire 24 V Connector 5 V, 12 V 5 V 12 V 24 V or less 100 V IC circuit 10 3-wire (NPN equivalent) DGrommet Relay, PLC 24 V 2-wire 5 V, 12 V 100 V or less IC circuit -X Solid state auto switches

Slide Unit Series CX2/CXWM/CXWL

A73H A80H E76A E73A E80A 3-wire (NPN equivalent) A72 A73 A80 A73C A80C 5 V 12 V 200 V 100 V IC circuit 10 16 20 25 32 16 20 25 32 Grommet CXS Relay, PLC 5 V, 12 V 12 V 100 V or less IC circuit 2-wire 24 V Connector 5 V, 12 V 5 V 12 V 24 V or less 100 V IC circuit 10 3-wire (NPN equivalent) DGrommet Relay, PLC 24 V 2-wire 5 V, 12 V 100 V or less IC circuit -X Solid state auto switches

Table of Contents

01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 AW + [S] + AFM AC20D to 40D AC10: M5 x 0.8 AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AC50: 3/8 AC55: 1/2 AC60: 1/2 AC10 to 60 AF + [T] + AR + AL T T-interface AC10B to 60B AF + [T] + AR AC20C to 40C AF + AFM + [T] + AR AC20 to 50 AF + AR + AL + [V] AC20A to 40A AW + AL + [V] Residual pressure relief 3 port valve V AC20B to 50B AF + AR + [V] Accessory

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

200 V, 12 V, 24 V, 48 V, 110 V, 220 V 240 V With surge voltage suppressor (S) (Grommet type) With light/surge voltage suppressor (Z) (Grommet terminal) (Conduit terminal) (DIN terminal) L plug connector M plug connector Electrical Entry DC/ 24 V, 6 V, 12 V 48 V, 100 V 110 V ( Option) Grommet (G) Grommet terminal (E) Conduit terminal (T) DIN terminal (D), (Y) L plug connector (L) M plug connector

Basic type / Direct mount type Series CY3B/CY3R

A80C 200 V 100 V 100 V or less 12 V Relay, PLC 2-wire IC circuit 5 V, 12 V 12 V 24 V Connector 5 V, 12 V IC circuit Solid state auto switches marked with are produced upon receipt of order.

SX

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

Parallel Style Air Gripper Series MHZ

12 V 3-wire (PNP) Solid state switch 12 V 2-wire Relay, PLC 24 V Grommet Yes 3-wire (NPN) IC circuit Diagnosis (2-color indicator) 5 V, 12 V 3-wire (PNP) 2-wire 12 V 3-wire (NPN) IC circuit Water resistant (2-color indicator) 5 V, 12 V 3-wire (PNP) 2-wire 12 V Solid state auto switches marked with are produced upon receipt of order.

Rotary Actuator

12 V CRB2F<30 P211080-2 Relay, $ $ $ Grommet 24 V 5 V,12 V 5 V,12 V,24 V IC Vinyl parallel cord PLC circuit Reed auto switch Oilproof heavy5 V,12 V, 5 V,12 V, $ $ $ 2-wire 100 V 24 V,100 V duty vinyl cord $ $ $ Vinyl parallel cord Made to Order (For details, refer to pages 19 to 23 ,29, 30.) Made to Oilproof heavy$ $ $ 100 V Order duty vinyl cord ? $ $ ?