E-P HYREG

Port 1 (P), 2 (A), 3 (R) 3 x M5 Silencer (Option) VY1A0 0 1 Applicable cable O.D. 4 to 6.5 Connection mark All types are the same in terms of connection. (VY1A01 only) M5 external pilot port Foot (Option) Port 1 (P), 2 (A), 3 (R) 3 x M5 VEXA-18-3A Hexagon socket head cap screw M3 L = 8 (2 pcs.)

CL

+ Stroke 2-Rc P With rod boot EB EA D e 4-LD Width across flats B1 l ZZ + l + Stroke h + l LS + Stroke ZZ + Stroke Width across flats KA Long Stroke When stroke exceeds 1001 mm, mount tie-rod support ring.

Electric Actuator/Slider Type

Tap (4 locations) Body xed/Top mounting Model Bolt Length: L (mm) LEYG25M L M5 x 0.8 2.2 [3.0] 40.5 LEYG32M L M5 x 0.8 2.2 [3.0] 50.5 Max. tightening torque lbfft(Nm) L Body xed/Bottom mounting Model Bolt Max. screw-in depth (mm) LEYG25M L M6 x 1.0 3.8 [5.2] 12 LEYG32M L M6 x 1.0 3.8 [5.2] 12 Max. tightening torque lbfft(Nm) Workpiece xed/Rod end female thread Model Bolt Max.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

'MsTM3",os A port _ l M3 x O.5,10j32 Nom. (M5) M5T103rN"'(M5 .03) 10-32Nom. {M5) P Port 1O-32Nom.(M5) @ NVJ100 Dimensions inch (mm) L Type Plug Connec,tor : tWJl14O-OLOO.M3 : tWJ114O-OLOO-M3 M Type Plug Connector: NvJl14O-OMOO-M3 : NVJ114O-O OO-M3 .E 0.10(2.6) Dia 1.03i26.2) [d, [ 8 ; I F l j { i 1L l o t : ffi0r 9 A l ; l { .?

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'MsTM3",os A port _ l M3 x O.5,10j32 Nom. (M5) M5T103rN"'(M5 .03) 10-32Nom. {M5) P Port 1O-32Nom.(M5) @ NVJ100 Dimensions inch (mm) L Type Plug Connec,tor : tWJl14O-OLOO.M3 : tWJ114O-OLOO-M3 M Type Plug Connector: NvJl14O-OMOO-M3 : NVJ114O-O OO-M3 .E 0.10(2.6) Dia 1.03i26.2) [d, [ 8 ; I F l j { i 1L l o t : ffi0r 9 A l ; l { .?

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'MsTM3",os A port _ l M3 x O.5,10j32 Nom. (M5) M5T103rN"'(M5 .03) 10-32Nom. {M5) P Port 1O-32Nom.(M5) @ NVJ100 Dimensions inch (mm) L Type Plug Connec,tor : tWJl14O-OLOO.M3 : tWJ114O-OLOO-M3 M Type Plug Connector: NvJl14O-OMOO-M3 : NVJ114O-O OO-M3 .E 0.10(2.6) Dia 1.03i26.2) [d, [ 8 ; I F l j { i 1L l o t : ffi0r 9 A l ; l { .?

SZ3000

13.3 24 SV 36.7 16.2 17 34 SZ 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 SY A 4 A 4 A 4 A 4 A 4 P 1 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n2One-touch fitting [4(A), 2(B) port] 2One-touch fitting (X, PE ports) Applicable tubing O.D.: 6 2n1-M5 x 0.8 [4(A), 2(B) port] SYJ Applicable tubing O.D.: 4 6 SX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA

LX

Front mount type l l l Model Bolt Max. tightening torque Nm Max. screw-in depth (l mm) Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M6 x 1 7.4 10 LXP M6 x 1 7.4 12 2. Through holes Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M5 x 0.8 4.4 37.5 3.

Vacuum System Peripherals:

Port size Rc Controlled flow (l /min (ANR)) Model Applicable tubing O.D. (mm) Elbow type AS1301F-M5-X214 AS2301F-01S-X214 AS2301F-02S-X214 AS3301F-03S-X214 AS4301F-04S-X214 Misc.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

L plug connector (L) (Made to order) 100V AC 200V AC 110V AC 220V AC 0.6 0.7 M plug connector (M) (A) 2 1 (P) 3 (R) M plug connector (M) N.O.

SMC Electronic Switch Series Variations

0 to 100kPa R(PT) 1/8, M5 X 0.8 L NPTF 1/8, M5 X 0.8 Note) M5 X 0.8 (female) thread.

Electric Actuator with Integrated Guide

Dedicated Controller/LC1 P.73 Controller setup software P.80 Dedicated teaching box P.82 Options P.85 Dedicated Regenerative Absorption Unit/LC7R P.86 Non-standard Motor Compatible Drivers P.89 73 77 Series LC1 Controller Single Axis Type Built-in AC Servo Driver Series LTF: Standard Motor Compatible How to Order 2V LC1 F 1 H 1 L 3 Number of axes Mounting bracket 1 3 5 1 axis M3

One-touch Fittings

tubing P Effective area [mm2] Min. port size Release button dimensions L A2 M P Q O N Applicable tubing O.D.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

(A) 4 (B) 2 2 M5: M5 x 0.5 5 (EA) 1 (P) 3 (EB) 3 position closed center (A) 4 (B) 2 A 4 3 2 B 5 (EA) 1 (P) 3 (EB) D: Slotted locking type Screw driver operated J: With switch 3 position exhaust center Elbow fitting assembly (upward) L4: 4 elbow fitting assembly L6: 6 elbow fitting assembly (A) 4 (B) 2 4 5 (EA) 1 (P) 3 (EB) A 4 ON 3 position pressure center OFF B 2 SMC (A) 4 (B) 2 5 Refer

VFS

ARBF2000-00-P JIS Symbol Inlet pressure 0.7 MPa Outlet pressure (MPa) P port regulation A port regulation B port regulation Flow rate (l/min (ANR)) ARBF3050-00-A ARBF3050-00-P Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa Outlet pressure (MPa) Outlet pressure (MPa) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) ARBF4050-00-A ARBF4050-00-P Pilot Valve Assembly: SF4-Inlet pressure 0.7 MPa

Environment

LEY LES Table Displacement (Reference Value) LEPY LEPS 0.08 LER W L LEF32 (L = 30 mm) LEH 0.06 Displacement [mm] LEY -X5 LEF25 (L = 25 mm) 11LEFS 0.04 LEF16 (L = 20 mm) LEF40 (L = 37 mm) 11LEJS 0.02 25ALEC 0 0 100 200 300 400 500 LEC S Load W [N] LEC SS-T Note 1) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table.

Modular Design with Uniform Body Style

Series Body size Details 20 30 40 50 60 AF p. 61 AFM AFD p. 71 AR(K) p. 79 AW(K) p. 98 AL p. 89 2 A Modular F.R.L.

MG

MGPM, MGPL Common Dimensions Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW Q CV 16 20 25 25, 50, 75, 100, 125, 150, 175, 200, 250 71 58 8 8 5 30 11 8 64 M4 15 15 22 M5 x 0.8 12 M5 x 0.8 4.3 8 4.5 M5 x 0.8 40 10 19 16 78 1.5 62 10 10 6 36 10.5 8.5 83 M5 18 18 24 M5 x 0.8 13 M5 x 0.8 5.6 9.5 5.5 1/8 37.5 10.5 25 18 25, 50, 75, 100, 125, 150

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

150 + l 20 151 150 130 129 170 + l 149 + l 180 + l 159 + l 25 158 157 137 136 179 + l 158 + l 187 + l 163 + l 32 165 165 141 141 187 + l 163 + l 212 + l 184 + l 40 187(196) 164 159(168) 207(216) + l 179(188) + l 192 242 + l 210 + l 50 217(229) 190 185(197) 237(249) + l 205(217) + l 222 252 + l 215 + l 63 227(239) 195 190(202) 247(259) + l 210(222) + l 232 303.5 + l 245 + l 80 288.5(302.5)

Series KP/KPQ/KPG

M5 size standardized P Resin parts are P.P.