Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Plate Cylinder, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, Operating Pressure(MPa): 0.06～0.7, Cushion: Rubber cushion, Specification: Built-in magnet, Port

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 15, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Plate Cylinder, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, Operating Pressure(MPa): 0.06～0.7, Cushion: Rubber cushion, Specification: Built-in magnet, Port

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 5, Cylinder Operation Method: Single Acting, Spring Return, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber cushion, Port thread

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 5, Cylinder Operation Method: [Single Action Retraction] Single Acting, Spring Extend, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 10, Cylinder Operation Method: Single Acting, Spring Return, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber cushion, Port thread

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 10, Cylinder Operation Method: [Single Action Retraction] Single Acting, Spring Extend, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 15, Cylinder Operation Method: Single Acting, Spring Return, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber cushion, Port thread

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 15, Cylinder Operation Method: [Single Action Retraction] Single Acting, Spring Extend, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion

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M 33 33 36 36 L 72.5 80.5 92.5 99 M 51.5 51.5 54 54 L 73.5 81.5 93.5 100 M 68.5 68.5 71 71 N 56.5 56.5 59 59 L 72.5 80.5 92.5 99 M 103.5 103.5 106 106 N 72.5 72.5 75 75 1/4, 3/8 1/2 3/4 1/1 28 35 43 45 7.5 8.5 9 9 5.5 6.5 6.5 6.5 26 33 40 45.5 1.6 2.3 2.6 2.6 14 17 22 22 67 75 87 92 52 60 68 73 77.5 85.5 97.5 104 VXEZ2230 VXEZ2240 VXEZ2350 VXEZ2360 42 Series VXE21/22/23 For Air/Water/Oil

CG5-S

Bore size (mm) W P S WA WB WH ZZ 20 30 M5 x 0.8 83 22 16 23 118 25 30 M5 x 0.8 83 22 16 25 123 32 25 1/8 85 22 16 28.5 125 40 20 1/8 93 22 16 33 143 50 20 1/4 109 25 18 40.5 167 63 20 1/4 109 25 18 47.5 167 80 20 3/8 130 30 22 60.5 201 100 20 1/2 131 31 22 71 202 10 Series CG5-S Dimensions R V Axial foot type (L)/CG5LNS X165US inch rod option dimensional changes S + Stroke H GA GB Width across

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

30 55 43 10 31 19 15 36.5 24.5 A B A B A B A B A B A B 11-/22-MXP10 11-/22-MXP10 3 5 11-/22-MXP12 11-/22-MXP12 11-/22-MXP16 11-/22-MXP16 99 Air slide table MXP/MXPJ6 11221122Dimensions / MXPJ6 5 C 11-/22-MXPJ6-5 Depth 2.5 2.5 7 H 5 10.05 3 3.5 4M3 x 0.5 depth 3 +0.030 0 D B 16.5 3.5 18 14 13 20 6 +0.030 0 Depth 2.5 2.5 6 E 5 2-M4 x 0.7 Piping port F QL 6 13.5 Prepared hole diameter 3.3

TABLE OF CONTENTS

DIN STYLE COIL Model 22, 32, 72 AN CONNECTOR Model 22, 32 1/2 NPT All Models BODY OPTIONSsee page 80 MISCELLANEOUS OPTIONSsee page 76 SPLICE BOX HOUSING 3.52 METERING TO ORIFICE All Models 3.22 (81.8) .34 SILVER SHADING RING 2.50 (63.5) (89.4) Model 22, 32, 52 (8.6) JIC HOUSING All Models METERING TO ORIFICE Model 22 ALUMINUM SHADING RING Model 22, 72 YOKE All Models METERED BYPASS All

LEC-OM069xx

An alarm code is assigned to both byte 21 and byte 22 in the response. 20 21 22 23 24 ALM_DATA 25 26 27 28 29 8.17.5 Write Non-volatile Parameter (PPRM_WR: 1CH) PPRM_WR Byte Description Command Response 17 1CH 1CH Writes the parameters.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

22 29.5 32.5 LS 10 10 17.5 17.5 13.5 13.5 14.5 15 21.5 21.5 22.5 24.5 5, 10 Bore (mm) LD LG LH LT LX LY LZ X Y 12 16 20 25 4.5 4.5 6.6 6.6 2.8 2.8 4 4 17 19 24 26 2 2 3.2 3.2 34 38 48 52 29.5 33.5 42 46 44 48 62 66 8 8 9.2 10.7 4.5 5 5.8 5.8 Front Flange L1 With auto switch Without auto switch Stroke range (mm) Bore (mm) FD FT FV FX FZ L Inch Metric 24 25.5 28.5 32.5 B 22 22 29.5 32.5 A

15

3 14 17.7 NY M4 x 0.7 8 70 50 3.5 22.5 78 M3 x 12 3.6 M5 x 22 3 14 17.7 NX M5 x 0.8 10 63 40 3.5 27.5 78 M4 x 12 3.6 M5 x 22 3 9 6.7 NW M5 x 0.8 10 70 50 3.5 22.5 78 M4 x 12 3.6 M5 x 22 3 9 11.7 NV M4 x 0.7 8 63 40 3.5 27.5 78 M4 x 12 3.6 M5 x 22 3 9 6.7 NU M5 x 0.8 10 70 50 3.5 22.5 78 M4 x 12 3.6 M5 x 22 3 11 11.7 NT M5 x 0.8 10 70 50 3.5 22.5 78 M3 x 12 1.5 M5 x 22 3 12 17.7 LEC Y 63

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

operating range 15 40.5 20.5 Model Model 25 50.5 30.5 30 59 39 10 35 15 25 46.5 34.5 30 55 43 10 31 19 15 36.5 24.5 A B A B A B A B A B A B 11-/22-MXP10 11-/22-MXP10 11-/22-MXP12 11-/22-MXP12 3 5 11-/22-MXP16 11-/22-MXP16 832 Air Slide Table MXP/MXPJ6 11221122Dimensions: MXPJ6 5 C 11-/22-MXPJ6-5 depth 2.5 2.5 7 H 5 3 3.5 4 x M3 x 0.5 depth 3 10.05 +0.030 0 D B 16.5 3.5 18

Cylinder with Lock

116 41 160 1/4 1/4 92 30 52 14 144 21 93.5 22 25 20 19 72 16 M12 x 1.75 10 26 M26 x 1.5 With Bellows (mm) (mm) Bore size (mm) Stroke range (mm) 40 50 63 80 100 Bore size (mm) 40 50 63 80 100 l Z TX P S T TDe8 TT TY TZ V Z ZZ e f h ZZ N 0.032 0.059 1/4 153 37.5 22 85 62 117 9 162 209 25 to 500 43 11.2 59 1/4 stroke 170 217 27 15 0.032 0.059 3/8 168 44 22 95 74 127 11 181 232 25 to 600 52

Air Cylinder

Order Symbol Specifications For model with auto switch, also refer to Minimum Strokes for Auto Switch Mounting on pages 21 and 22.

Precautions 1

B1 AL A NN NA N Stroke range Bore size (mm) 20 25 32 40 0 0.033 M8 x 1.25 5 28 65.3 5 41 13 19.8 8 26 13 15.5 18 Up to 300 M20 x 1.5 20 24 15 0 0.033 5.5 33.5 70.5 6 45 13 22 10 32 17 19.5 22 Up to 300 M26 x 1.5 26 30 15 M10 x 1.25 0 0.033 5.5 37.5 76.5 6 45 13 25.8 12 32 17 19.5 22 Up to 300 M26 x 1.5 26 34.5 15 M10 x 1.25 0 0.039 7 46.5 84.5 8 50 16 29.8 14 41 22 21 24 Up to 300 M32 x

Air Slide Table

D A [mm] Rubber Stopper A Model A B C D E MXQ6(A) 41.5 27 22 25 20 MXQ8(A, C) MXQ6B 41.5 27 21 25 19 MXQ12(A, C) MXQ8B 46.5 28 21 27 20 MXQ16(A) MXQ12B 51.5 30 21 28 20 MXQ20(A) MXQ16B 58.5 32 22 31 21 MXQ25(A) MXQ20B 65.5 34 22 33 21 Cap bracket RJ-X2300 A cap bracket is mounted to lengthen the A dimension.