Vacuum Module Series ZX

SMC SMC 6 20 10 Pitch = 21 10 10 10 L2 L1 L3 Body (Air operated type) (ZX1A) Pressure setting trimmer 9.3 13 Vacuum switch ZSE2 14.5 M5 x 0.8 (Pilot port) Filter A: Release flow rate adjusting needle with lock nut Adapter B 6 44 M5 x 0.8 (External release port) Silencer + Ejector 30 22 47 37.4 8 Adapter D 57.4 (Needle fully open) Individual spacer ZX1-R1 70.3 Release valve (VJ314) (Normally

CRBB-OM00004

P811040-3 30 P211080-10 30 P611080-1M P611080-1 40 P811050-3 40 P211010-10 40 P611010-1M P611010-1 3 2.

Compact Cylinder with Air Cushion Series RQ

A A1 E1 L1 MM U1 L M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 16 Y-G02 Y-G03 Y-G04 Y-G05 34 41 42 56 8.5 10.5 14 18 16 20 22 28 25 30 30 40 10.3 12.8 12 16 11.5 14 14 20 34 41 42 56 8.5 16 25 30 30 40 M8 x 1.25 10.3 11.5 21 I-G02 I-G03 I-G04 I-G05 8 10 18 22 8 10 10 14 8 10 18 22 8 10 10 14 IY-G02 IY-G03 IY-G04 IY-G05 +0.058 0 +0.4 +0.2 0.2 0.4 +0.058 0 20 10.5 12.8 14 25.6 20 M10 x 1.25 +0.058

SMC Pneumatic Clean Series

M5 x 0.8 GA 6 4-FD 4-J GB Width across flats KA 2-RcP Width across flats B1 FV FY D B E MM H1 AL A N C 18 K N 7 B H S + Stroke FT FX ZZ + Stroke FZ (mm) AL Bore size Stroke range Symbol B B B1 C D E FV FD FT J FX FY MM M FZ P S ZZ A GAGB H H1 K KA N 12 80 42 33 11 40 15 M8 x 1.25 27 Up to 1000 51 30 8 27 6 71 14 60 1/4 22 44 16 32 60 9 100 102 165 M14 x 1.5 12 90 50 35 11 50 17 M8 x 1.25

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

1) Based on JIS B 8375 (once per 30 days) for the minimum operating frequency.

2–4

With auto switch HA OA Without auto switch A 31.5 Stroke range (mm) Bore size (mm) EB F HB IA IB NN NN EA A 26.5 B 17 B 22 12 16 20 25 8-32UNC M3 x 0.5 4-40UNC M4 x 0.7 25 24 5 3 32 31.5 5 to 30 8-32UNC M4 x 0.7 M3 x 0.5 4-40UNC 5 to 30 26.5 17 31.5 22 29 28 5 3 38 37 M6 x 1.0 1/4-20UNC 6-32UNC M4 x 0.7 5 to 50 32 19.5 42 29.5 36 34 5.5 4 47 45.5 5 to 50 10-32UNF M6 x 1.0 1/4-20UNC M5 x

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 b C H B d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 8 8 10 B 14 26 32 41 C 16.2 30 37 47.3 Part no.

Electric Actuator

is required. 7.5 40 Work load [kg] Work load [kg] 30 5 LEJS40;A LEJS40;A 20 AC Servo Motor Specific Product 2.5 10 0 0 0 200 400 600 800 1000 1200 0 200 400 600 800 1000 1200 Speed [mm/s] Speed [mm/s] LEJS63/Ball Screw Drive Horizontal Vertical 90 20 LEJS63;B LEJS63;B 80 70 Precautions LECS; 15 60 Work load [kg] Work load [kg] 50 10 40 LEJS63;A LEJS63;A 30 5 20 10 0 0 0 1200 200 400 600

LJ1H

Nil B contact 2pcs. None Series H NPN, A contact 1pc.,B contact 2pcs. With IO connector Motor type 10 20 30 PNP, A contact 1pc. AC servo motor S2 PNP, B contact 2pcs. (Incremental encoder) 100 W PNP, A contact 1pc.,B contact 2pcs.

1.1

HRG001--B HRG002--B HRG005--B HRG010--B HRG015--B Applicable model 3 Pole number 30 Rated current sensitivity (mA) Ground fault circuit interrupter 10 5 20 40 60 Rated shutdown current (A) Short circuit display method Mechanical button Breaker mounting location Remove the front panel.

Valve Single Unit

Refer to external dimensions in pages 1-6-44 to 1-6-46, and then mount it. 1-6-43 SX7000: SS5X7-20Stations Grommet (G) 2n2-One-touch fittings (A, B port) 2n1-Rc 1/4 (A, B port) 6-Rc 1/4 L1 L2 Applicable tubing O.D.: 8 (Mounting hole) 4-4.5 10 (P, EA, EB port) 10 16.5 11.5 22.4 76.8 19.5 19 20.5 B A B A B A B A B A B A B A 20 20 EA EB P EB EA P 21 21 62.5 67.7 21 60 128.6 115.6 30 99.5 28.2

MK

30.5 B 6 6.5 10.5 13.5 16.5 19.5 B 12.5 15.5 18.5 21.5 A 29 29.5 33 24 28.5 29 B 6.5 7 11 14 17 20 A 26 26.5 30 21 25.5 26 B 3.5 4 8 11 14 17 A 19.5 24 24.5 B 9.5 12.5 15.5 A 31.5 22.5 27 27.5 B 9.5 12.5 15.5 18.5 A 35.5 26.5 31 31.5 B 13.5 16.5 19.5 22.5 MK220 MK225 MK232 MK240 MK250 MK263 Auto Switch Mounting Bracket Part No.

HRX-OM-O021

This produuct Your system Circulating fluid temperature 30 Serial communication Discharge temperature 30 Heat radiation Circulating fluid display 1 temperature 30 Circulating fluid set temperature 29 30 MODE Explanation Control the temperature so that the discharge temperature of the circulating fluid is circulating fluid set temperature + offset temperature.

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

Bore size 6 to 20 Type M5 x 0.8 Rc NPT G Symbol 21 22 Relief type Vacuum suction type CXSL CXSL Nil TN TF 25, 32 Cylinder stroke (mm) Model Lubrication Action Cushion Rubber Air Bore size (mm) Standard stroke (mm) Auto switch mounting Port size Model 11-/22-CXS6 6 11-/22-CXS10 11-/22-CXS15 11-/22-CXS20 11-/22-CXS25 11-/22-CXS32 10 15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief

AZ1000

40 V15 V3 L 1 H V2 2 4 10 30 40 -30 in.Hg to 15 psig -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig -30 in.Hg to 200 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 3000 psig 0 to 4000 psig -0.1 to 0.1 MPa -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa -0.1 to 1.4 MPa 0 to 1.5 MPa 0 to 3 MPa 0 to 7 MPa 0 to 21 MPa 0 to 28 MPa 00

Direct Operated

: JIS B 8471, 8472, 8473 Cv 2.

HRX-OM-X071

MT.01 MT.01 to MT.05 D.OUT2 MANT CODE No.20 screen Contact output signal 3 function ALM 1 D.OUT3 SEL No.21 screen Contact output signal 3 operation B A/B D.OUT3 TYPE No.22 screen Contact output signal 3 alarm AL.01 AL.01 to AL.32 D.OUT3 ALARM CODE No.23 screen Contact output signal 3 maintenance MT.01 MT.01 to MT.05 D.OUT3 MANT CODE 5.3 List of parameters HRR Series 5-10 HRX-OM-X071

HRX-OM-M090

This produuct Your system Circulating fluid temperature 30 Serial communication Discharge temperature 30 Heat radiation Circulating fluid display 1 temperature 30 Circulating fluid set temperature 29 30 MODE Explanation Control the temperature so that the discharge temperature of the circulating fluid is circulating fluid set temperature + offset temperature.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

(42) 30 (42) VS4 VQ7 VV72-(M connector type) EVS 2n-3/8, 1/2 142 118 34 VFN 142 118 (4-1/8) 1, 3, 5 port Only for 3/4 67 20 9 9 Indicator light U-side 14 U-side PE port 42 14 23 R 4.5 60 (73) P = 56 60 (73) R 4.5 Manual override 18 13 13 B A B 14 12 P = 56 A PA B 18 A B 14 12 A PA B L1 L2 A B L1 L2 14 12 A PA B A B 14 SMC A PA B A B A PA 40 (53) L-side R-side L-side R-side (2n-1/8) D-side

CV/MVGQ

CV3L), Non-lube type (CV3LN) With rod boot Throttle valve H1 Manual button Width across flats KA l l ZZ + l + Stroke + S + Stroke LS + Stroke ZZ + Stroke Bore size (mm) Stroke range (mm) A AL B B1 C D E F H1 K LD LH LL LS LT LX LY J 40 50 63 80 100 Up to 500 501 to 800 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14