Compact Cylinder with Lock Series CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

18 ( ) ( + ) Gray None 5 stations 10 23 11 SOL.A 6 ( ) ( + ) Pink None 24 12 SOL.B 19 ( ) ( + ) Orange Black 6 stations 25 Stations are counted starting from the first station on the D side. 13 SOL.A 7 ( ) ( + ) Blue None SOL.B 20 ( ) ( + ) Red White 7 stations SOL.A 8 ( ) ( + ) Purple White SOL.B 21 ( ) ( + ) Brown White 8 stations SOL.A 9 ( ) ( + ) Gray Black Connector terminal

Step Motor Controller

(N.C.) 21 Series LECP6 Series LECA6 Step Data Setting 1. Step data setting for positioning 2. Step data setting for pushing In this setting, the actuator moves toward and stops at the target position. The following diagram shows the setting items and operation. The setting items and set values for this operation are stated below.

Environment

Applied portion Order no. 21 25 LE-D-2-2 32 LE-D-2-3 Piston rod GR-S-010 (10 g) GR-S-020 (20 g) * Apply grease on the piston rod periodically.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

50 48.4 43.5 41.9 16.6 VCHC ASR ASQ 13.3 40 AS33l1FG-G03-08A 8 13.2 38.0 23.5 52.2 14.2 41 AS33l1FG-G03-10A 10 15.9 17.4 23 42.2 26.1 50.3 15.6 44 AS33l1FG-G03-12A 12 18.5 43.5 28.3 52.2 17 46 AS43l1FG-G04-10A 10 1/2 27 15.9 17.4 18.8 25.6 47.9 26.1 61.2 50.8 49.2 41.8 40.2 15.6 75 AS43l1FG-G04-12A 12 18.5 21 26.2 49.8 28.3 63.4 17 79 10.4 12.9 20.2 36.6 21.4 50.1 3/8 21 16.6 42.3 40.7 34.8

SMC

Applicable model Clean rodless cylinder, Clean regulator, Clean one-touch fitting, Clean tubing, Clean gas filter Series 21-/22Copper, Fluorine, and Silicon free + Low particle generation For the environment in which the use of copper, fluorine and silicon are restricted. The same structure as clean series. (Grease and package style are different.)

CP95

40 5 5.5 35 11 6.6 13 16 40 4.3 4 25 12 20 55 10 38 50 5 6.5 40 15 9 18 21 45 4.3 4 27 16 22 65 10 46.5 63 5 6.5 45 15 9 18 21 51 4.3 4 32 16 25 75 12 56.5 80 5 10 45 18 11 22 25 65 4.3 4 36 20 30 95 16 72 100 5 10 55 18 11 22 41 20 32 115 25 75 6.3 16 89 4 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 38 51 21 18 31 14 32 10 15 6.6 8.5 10.5 40 11 12

RHC

51 6 7 16 14.5 10 32 18 8 20 Up to 700 19.5 6 49.5 56.5 70 44 27 53 9 7 16 18 12 36 22 8 25 Up to 700 19.5 6 51.5 55 72 50 33 55 9 7 19 18 12 44 22 9 32 Up to 1000 21 8 51.5 56 84 60 36 66 9 9 21 20.5 16 53 24 11 40 Up to 1000 WH ZZ P 1/4 S NN ND NF NE K NC JD NB JC NA I N H MM Bore size (mm) 252 192 M22 x 1.5 15.0 13 33.5 5 5.5 30.5 30 43 26 26 22 44 M8 x 1.25 20 1/4 5.8 to 8.8 257 193

CP95

18 11 22 41 20 32 115 25 75 6.3 16 89 4 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 38 51 21 18 31 14 32 10 15 10.5 8.5 6.6 40 11 12 41 54 24 22 35 16 36 10 18 12 8.5 6.6 50 15 16 50 65 33 30 45 21 45 12 20 15 10.5 9 63 15 16 52 67 37 35 50 21 50 12 23 15 10.5 9 80 18 20 66 86 47 40 60 25 63 14 27 18 11 11.5 100 18 20 18 71 15 30 12.5 55 50 70 25

MB

27 27.5 28.5 37 37 47 51 58 58 72 72 33.5 38.5 45 50 62 71.5 45 52.5 59 64 76.5 86 M6 x 1.0 M6 x 1.0 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 6 6 7 7 10 10 15 21 21 21 30 30 16 16 16 16 16 16 4 4 5 5 5 5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 -W Stroke range (mm) Bore size (mm) MO N NB P RF S V W WL ZZ S ZZ 32 40 50 63 80 100 to 500 to 500 to 600 to 600 to 800 to 800

MU

For details, refer to page 7-9-36. 7-8-21

EXxx-OMN0035CN

15 22 24 V() 23 24 V() 24 0 V() 25 FE EX600-DXPE EX600-DXNE 102223 24 V 102223 24 V 1~814~21 1~814~21 DC24 V 4.7 k 4.7 k DC24 V 111224 0 V 111224 0 V FE 1325 FE FE -22No.EX-OMN0035CN-A (4)EX600-DXF 1 24 V() X0 2 0 0 3 1 4 0 V() X0 1 24 V() X1 2 2 1 3 3 4 0 V() X1 1 24 V() X2 2 4 2 3 5 4 0 V() X2 1 24 V() X3 2 6 3 3 7 4 0 V() X3 1 24 V() X4 2 8 4 3 9 4 0 V() X4 1 24 V(X5 2 10 5

HRX-OM-R016

Poloneza 89, PL-02-826 Warszawa Portugal SMC Sucursal Portugal, S.A. (351) 22 616 6570 Rua De Eng Ferrerira Dias 452 4100-246,Porto Romania SMC Romania S.r.l. (40)21-3205111 Str.

HRX-OM-W038

Poloneza 89, PL-02-826 Warszawa Portugal SMC Sucursal Portugal, S.A. (351) 22 616 6570 Rua De Eng Ferrerira Dias 452 4100-246,Porto Romania SMC Romania S.r.l. (40)21-3205111 Str.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

up to 750 21 25 78 14 13 32 65.8 M22 X 1.5 204 102 52 116 18.5 80.5 M12 X 1.75 21 17 37 40 11 23 0 37 40 22 72 21 up to 750 30 21 92 14 16 41 72.8 M26 X 1.5 215 116 52 87.5 M12 X 1.75 126 20 21 17 40 40 11 23 0 37 40 26 With rod boot Non-locking CBAI40SCBA11, #1 CBAI50SCBA12, #1 CBAI63SCBA13, #1 CBAI80SCBA14, #1 CBAI100SCBA15, #1 Locking CBAIB40SCBA11, #2 CBAIB50SCBA12, #2 CBAIB63SCBA13,

Modular F.R.L. Unit

Spacer with Bracket: (Z) G F.R.L. body center C BB (Y100T, Y200T only) E 1 X-X EE (Y100T, Y200T only) RELEASE X B 2 E X A G Seal Y200T Y400T F J H K D Applicable models F 6.8 12 14 18 18 20 G 4.5 5.5 7 9 9 11 H 14 19 21 26 27 31 J 2.8 3.2 4 4 4.6 6.4 K 25 30 41 50 50 70 A 6 3 4 5 5 6 B 82 96 96 120 BB 56 67 C 24.5 29 41 48 48 60 D 40.5 53 68 81.5 86 112 E 20 24 35 40 40 50 EE 27 33 G 4.5

Guide Cylinder/Compact Type Series MGC

Bore size (mm) P Note 2) I J K L M N O Q R S T U V W X Y Z WH 20 25 32 40 50 60 80 86 80 25 44 38 25 M6 x 1 M5 x 0.8 21 12 26 12 40 36 30 140 23 30 52 70 95 46 32 M6 x 1 M5 x 0.8 21 12 31 13 98 47 44 37 80 153 25 35 60 80 105 50 32 M6 x 1 1/8 21 12 38 16 112 53 50 37 82 161 28.5 40 70 95 125 60 38 M8 x 1.25 1/8 25 12 47 20 132 63 60 44 92 188 33 45 82.5 115 150 75 50 M8 x 1.25 1/4 26 14

Free Mount Cylinder for Vacuum Series ZCUK

(mm) DQ HQ HP Model Applicable pad model ZX 10 13 16 20 25 32 40 50 10 16 25 40 10 13 16 20 25 32 40 50 4 6 8 6 8 2. 6 4. 8 7 9 7 9 ZPT-B4 ZC(D)UKC10 ZC(D)UKQ10 19. 5 19. 5 19. 5 19. 5 20. 5 20. 5 ZR 36. 5 36. 5 36. 5 36. 5 37. 5 37. 5 DQ HQ HP 2. 6 4. 8 7 9 12 21 44 15 21 42 18 12 24 45 18 25 46 7 9 12 25 46 15 18 29 50 ZM ZPT-B5 ZC(D)UKC16 ZC(D)UKQ16 19. 5 19. 5 19. 5 19. 5 21. 5 20. 5

Compact Cylinder with Lock Series CLQ

27 80 I-G08 18 28 71 21 38 50 M22 x 1.5 21 27 18 100 Y-G10 79 24 44 55 M26 x 1.5 24 31 100 I-G10 22 32 79 21 44 55 M26 x 1.5 24 31 22 Applicable bore size (mm) Applicable pin part no.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

MGG MGC (mm) MGF Stroke range Bore size (mm) D1 J K M B D C E KA GA GB H MGZ 11 12 22 25 25 25 25 51 57 66 78 92 110 144 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 8 8 10 10 14 14 20 39 43 49 59 71 82 106 29 33 38 46 55 66 86 25 30 36 45 55 68 87 11 12 16 21 26 32 36 21 24 30 36 46 53 65 16 26 28.5 34.5 40 46.5 54 20 21 35 40 45 50 50 20 25 32 40 50 63 80 12.5 18 19.5