HRX-OM-M005

CH2 TEMP SP 4 3 6 3 2 1 Figure 5-11 Ten-key Screen Table 5-8 Ten-key Screen No.

33

*Power supply 100 V type: 35C Power supply 200/230 V type: 40C 2.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Model Auto switch mounting Cushion Bore size (mm) 20 25 32 40 20 25 32 40 Action Standard stroke (mm) Port size Lubrication Model Rubber Air 10-/21-CM2R20 10-/21-CM2R25 10-/21-CM2R32 10-/21-CM2R40 11-/22-CM2R20 11-/22-CM2R25 11-/22-CM2R32 11-/22-CM2R40 25, 50, 75, 100, 125, 150 1/8 Relief type Vacuum suction type 25, 50, 75,100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 1/4 Non-lube

Digital Flow Switches

11 10 20 10 20 200 200 214 214 21 54 21 54 500 500 535 535 50 50 8 Series PF2A Dimensions: Remote Type Display Unit for Air (4-channel Flow Monitor) PF2A200, 201 40.1 (7.5) 40 6 2.5 L L/min 36.8 OUT1 CH FLOW SMC SET Sensor connector (option) Front protective cover + Panel mounting 53 9.4 (2) 47 42.4 46.4 Panel mounting adapter Front protective cover Waterproof seal Panel 55 or more 37.5

MK

MK-F020 MK-F025 MK-F032 MK-F040 MK-F050 MK-F063 Bore size (mm) 20 25 32 40 50 63 Accessory With boss in head side 2 3 5 7 13 25 With arm 100 100 200 200 350 350 13 32 Centering location ring Set pin Bolt for cylinder body Rear flange type (including mounting bolt) 133 153 166 198 345 531 Calculation: (Example) MKG20-10RFN Standard calculation: MKB20-10R 250 g 6 g 133 g 2 g 100 g 491

HRX-OM-M090

Rated Rated Sensitivity voltage x size voltage current of leak [V] [A] current [mA] HRS012--10 HRS018--10 1-phase 100V AC(50Hz) 100 200 15 15 or 30 HRS01--10-T 1-phase 3 cores x Sharing 100V to 115V 14AWG (High pump head AC(60Hz) [Optional]) (3 cores x 2.0mm2) HRS012--20 HRS018--20 HRS024--20 1-phase 10 30 (including ground) 200, 200-230V AC 230 HRS0--20-T (50/60Hz) 15 30 (High pump head

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Maximum speed (mm/s) Up to 800 Up to 600 Up to 500 Up to 300 Stroke (mm) Up to 10 Up to 20 Up to 30 Up to 10 Up to 20 Up to 30 Up to 50 Up to 100 Up to 150 Up to 200 Up to 50 Up to 100 Up to 150 Up to 200 (13) (12) (11) (10) (9) (8) 8 Selection graph (15) (14) (16) (17) (18) (21) (19) (20) 12 to 40 L: Overhang The distance between the cylinders central axis and the load center of gravity

20

KN-R02-100 KN-R02-150 KN-R02-200 KN-R02-250 VMG1-R02-300 VMG1-R02-350 VMG1-R02-400 KNH-R02-100 KNH-R02-150 KNH-R02-200 KNS-R02-075-4 KNS-R02-090-8 KNS-R02-100-4 KNS-R02-110-8 VMG1-06-150-300 VMG1-06-200-300 VMG1-06-150-600 VMG1-06-200-600 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 Nozzle size 1 1.5 2 2.5 3 3.5 4 1 1.5 2 0.75 x 4 0.9 x 8 1 x 4 1.1 x 8 1.5 2 1.5 2 1.5 2

MTS

160 180 200 0.1 0 40 60 80 100 120 140 160 180 200 20 20 Overhang L (mm) Overhang L (mm) Graph (21) Stroke: Up to 200 stroke Graph (17) Stroke: Up to 200 stroke 10 20 10 20 2 3 4 5 2 3 4 5 Weight W (kg) Weight W (kg) 40 40 32 32 1 1 0.5 0.4 0.3 0.2 0.5 0.4 0.3 0.2 25 20 25 20 0.1 0.1 100 120 140 160 180 200 0 40 60 80 100 120 140 160 180 200 0 40 60 80 20 20 Overhang L (mm) Overhang L (mm

HRX-OM-S004

Blue(DC COM) 11 Terminal No. Black (Output1) 3 Terminal No. Black(Output1) Fig. 3-12 Wiring of the external switch (NPN open collector output) (example) Flow switch Blue(DC COM) Brown (DC 24V) Brown(DC 24V) 14 Terminal No. Blue(DC COM) 6 Terminal No. Flow switch 13 Terminal No. 3 Terminal No. Black(Output1) Black (Output1) 11 Terminal No.

CG1

11 13.5 10 10 10 10 20 20 26 32 11 13 15 18 20 22 18 22 14 16 20 22 25 30 35 43 29 33 40 49 60 74 56 64 28 32 38 45.5 54 63.5 79 96 99.5 120 8 10 12 14 16 18 18 22 Up to 200 Up to 300 Up to 300 Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 With rod boot ZZ Bore (mm) Applicable pin part no.

ITV

(For details, refer to page 14-8-11 in Specific Product Precautions.)

CRB2/CRBU2/CRB1

Note) These items (No. 11, 13, and 14) consist of auto switch unit and angle adjuster. Refer to pages 84 and 85 for detailed specifications.

Precautions 1

Solenoid Valve for 200/220 VAC Specifications Socket Connector Warning 1. Grommet-type and L/M plug connector-type solenoid valves for AC specifications have built-in rectifier circuits in the pilot valves and drive the DC coil. The rectifier circuit in the pilot valve for 200/220 VAC specifications generates heat when the valve is energized.

IZx-OMT0049

to 300 200 to 1400 200 to 2000 200 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 15 200 to 300 200 to 1400 150 to 2000 100 to 2000 50 to 125 50 to 1100 50 to 2000 50 to 2000 20 150 to 250 150 to 1300 100 to 2000 50 to 2000 50 to 125 50 to 1100 50 to 2000 50 to 2000 30 50 to 200 50 to 1300 50 to 2000 50 to 2000 50 to 125 50 to 1100 50 to 2000 50 to 2000 effect before installing. 3-1-

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

210.5 15 167 180 200 210.5 16 177.5 190.5 212.5 223 17 188 201 225 235.5 10 114.5 127.5 150 160.5 11 125 138 162.5 173 12 135.5 148.5 175 185.5 5 62 75 100 110.5 6 72.5 85.5 112.5 123 7 83 96 125 135.5 8 93.5 106.5 137.5 148 9 104 117 137.5 148 3 41 54 75 85.5 4 51.5 64.5 87.5 98 L1 L2 L3 L4 2.10-34 VQZ100/200/300 Base Mounted Dimensions: VQZ200 VV3QZ25C Port size Station (35) 38 (11) Grommet

AC Servo Motor Driver (Pulse input type/Positioning type)

Servo amp lifier Driver (Note 7) (Note 7) CN1 CN1 (Note 2) 24VDC RA1 (Note 4, 9) 2 OPC 9 ALM Trouble (Note 6) 1 DICOM Travel completion 10 MEND RA2 13 DOCOM (Note 9, 11) (Note 13) Ready EM1 SON MD0 8 4 3 (Note 3, 5) Forced stop 11 RD RA3 Servo-on Electromagnetic brake interlock 12 MBR RA4 Automatic/manual selection DOG (Note 9, 10, 12) 25 Proximity dog 10m max. Point table No.

Membrane Air Dryer

(For the part number of the dew point indicator, refer to pages 10 and 11.) 3.

LJ1H

T-slot 2 dimensions Compatible Motors Switch Internal Circuit D-Y7GL Motor output (W) Motor model Brake Manufacturer Power supply voltage (VAC) Motor specification symbol Controller driver model + Brown lead wire 100/110 200/220 100 200 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 LC1-1B1H1Without brake (Horizontal specification) Main circuit

CG5-S

M8 x 1.25 7 18 5.5 M18 x 1.5 55 1/4 176 63 to 600 109 35 32 27 90 38 20 70 11 9 21 14 58 11 72 M10 x 1.5 7 18 7 M18 x 1.5 69 1/4 176 80 to 750 130 40 37 32 100 50 25 82 11 9 28 20 71 13 89 M10 x 1.5 10 22 7 M22 x 1.5 80 3/8 210 100 to 750 131 110 10 40 37 41 125 60 30 100 14 10 29 20 71 16 M12 x 1.75 26 8 M26 x 1.5 100 1/2 212 Flange brackets and plug bolts are installed before shipment