OMU0023

Acquires the information repeatedly until the received 6 Repeat steps 5-6 information shows that the INP is "1". 7 01 10 9103 0002 04 0 1388 01 10 9103 0002 Direct Operation Step Data No. 20 parameters are configured for: Target position 5 mm, Positioning time 0.1 s. 8 01 06 9105 000A 01 06 9105 000A Instruction to hold current position sent. 9 01 10 9100 0001 02 0 01 10 9100 0 (Preparation

Flow Control Equipment

10 6 4 500 2 100 5 2 0 0 0 5 10 0 10 10 5 5 0 0 Needle rotation (Turns) Needle rotation (Turns) Needle rotation (Turns) 4.1-2 Speed Controller with One-touch Fittings Series AS Metal Body Elbow Style Speed controller with built-in One-touch fitting for metal body specifications Uses flame resistant resin as standard.

High Vacuum Angle Valve, XL Series

Fluid 5 to 40C (41 to 104F) Operating temperature C 0.2M to 1 x 10 -6 {1.5k to 7.5 x 10 -9} Operating pressure Pa {Torr} 5 8 5 8 Conductance l/s 1.3 x 10 -8 {1 x 10 -7} at ordinary temperatures, excluding gas permeation 1.3 x 10 -11 {1 x 10 -10} at ordinary temperatures, excluding gas permeation Internal External Leakage Pa m3/s {Torr l/s} KF16 KF25 KF16 KF25 Flange type/size Principle materials

ZP

tube, 6/4) 14.5 16.5 5 7 1.8 2.5 13.5 15.5 5 7 1.8 2.5 ZCU 14.5 16.5 5 7 1.8 2.5 AMJ Size 10, 13, 16 Size 40, 50 Misc.

Intrinsically Safe Valve

pressure center 2 (B) (A) 4 Symbol 3 6 10 15 20 30 100 Lead wire length Note 5 Note 1) 300 mm (EA) 5 1 (P) 3 (EB) 600 mm Maximum length for L-type 1000 mm 4-position dual 3 port valves (N.C.

MHZ2/MHZJ2

M4 x 0.7 M5 x 0.8 M5 x 0.8 3.6 3.6 6 6 8 8 10 10 5 5 8 8 10 10 12 12 3 2 4 2.5 5 3.3 6.5 3.5 MHZ2-10-X51 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.5 0 +2.5 0 MHZ2-16-X51 MHZ2-20-X51 MHZ2-25-X51 Refer to pages 4 through 7 for the standard type dimensions, which are the same except for those shown above. 32 Series MHZ2/MHZJ2 Model Selection Method Model Selection Selection procedure Confirm gripping

EXxx-OMY0006CN

IoT 5. 6. 8 7. PC 8. OS 9. /IDS/IPS 10.

/

For VXE21: VX021N-10 1 1 G E N VXE02 For VXE22: VX022N-10 Series Valve VXE21 VXE22 VXE23 1 2 3 For VXE23: VX023N-10 Symbol Model VXED2130 Others Z Nil Clip Rated voltage Note) 24 VDC 12 VDC 5 6 Name plate Note) Refer to Table (1) for available combinations.

Prevents Micro-Bubbles

Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Plug Tubing size Plug Body class Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 2 to 5 LVC 6 1/4" 6 1/4" LVA 2 2 8 8 10 3/8" 10 3/8" Base type LVH A Stacking type 10 3/8" 10 3/8" Manifold stations LVD 3 3 12 1/2" 12 1/2" 02 2 stations LVQ 12 1/2" 12 1/2" 05 5 stations 4 4 LQ 19, 3/4" 19, 3/4" 12 1/2" 12 1/2" LVN 5

VM

0.03 10 10 15 10 5 0.05 0.03 JIS Symbol How to Order 01 VR320 0 01 Port size Precautions Rc 1 8 NPT N01 1 8 Be sure to read before handling.

IDG

IDG 10 M 03 X016 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Option Size Symbol Contents Size 3 3 10 20 30 50 5 5 Nil Standard R Flow direction (Right Left) 10 20 S With dew point indicator Standard equipment 30 50 Drain discharge symbol Standard dew point

Compact Cylinder

Minimum Auto Switch Mounting Stroke (mm) Auto switch model D-M9W D-M9A Bore size (mm) D-A9 D-A9V D-M9 D-M9V D-M9WV D-M9AV D-P3DW No. of auto switch mounted 2 pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 1 pc. 10 10 10 10 10 10 10 5 10 10 10 5 10 5 10 5 10 5 10 5 15 15 10 10 10 10 10 5 15 15 15 15 15 15 15 15 15 15 15 15 5 5 5 5 5 5 5 5 5 5 10 5 10 5 10 5 10 5 10 5 10 10 10 10

Digital Flow Switches

PF2W504--1 PF2W520--1 PF2W540--1 PF2W511--1 PF2W504--2 PF2W520--2 PF2W540--2 PF2W511--2 4 0.5 4 0.5 16 2 16 2 40 5 40 5 100 10 100 10 19 Series PF2W For Water Digital Flow Switch to are terminal numbers.

Low Friction Cylinders Series MQ

CX L FT FX B + Stroke (mm) FZ FX A + Stroke Bore size (mm) Stroke range (mm) FZ MQ A B CL CD CT CU 10 10 to 40 61.5 90.5 84.5 5 4 10 Double clevis type: MQQLD RHC 16 10 to 60 70.5 107.5 98.5 8 5 12 20 10 to 60 79 119 109 10 5 14 RZQ CU CD hole H10 Shaft d9 Cap bolt 25 10 to 50,75,100 84.5 126.5 116.5 10 5 14 30 10 to 50,75,100 104 148 138 10 6 14 40 10 to 50,75,100 104 158 144 14 7 20 DBore

5 Port Solenoid Valve, Series VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

Manual override (Non-locking) 41.5 [48] 29.1 22.5 13 [ ] for AC L plug connector (L) M plug connector (M) 33.5 5 33.5 2.5 5 2.5 10 5 10 5 48.9 [50.2] 58.5 44.9 4-M5 X 0.8 (Lead wire length) (P/R port) 4-M5 X 0.8 (P/R port) 300 41.5 [48] 52.6 [59.1] 300 29.1 (Lead wire length) 41.5 [48] [ ] for AC Other dimensions are the same as the grommet.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

10 ISO Class 8 10 10 0 L/min (ANR) ISO Class 7 ISO Class 7 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] ISO Class 6 ISO Class 6 10 10 0 L/min (ANR) 50 L/min (ANR) ISO Class 5 ISO Class 5 10 10 1000 1000 20 L/min (ANR) ISO Class 4 ISO Class 4 100 100 70 L/min (ANR) 30 L/min (ANR) 10 10 1 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0.1 0.2 0.3 0.4 0.5 0.6 Particle diameter

CG1

75.5 95 95 10 10 10 10 118 123.5 125.5 144 169.5 169.5 202.5 206 38.5 45 22 3.5 6.6 25 3.5 4 5 5 5 7 54.5 16.5 22 22 8.5 11 13 14 16 6.6 9 11 11 14 30 4.5 17.5 70.5 40 CJ1 106 4.5 17.5 20 20 82.5 45 125 101 100 28.5 30 4.5 6 55 CJP 150 121 120 65 CJ2 Flange Front flange/CG1FQ (mm) CM2 Stroke range Rear flange ZZ Rear Bore (mm) B E F FX FD FT C85 Front Up to 350 Up to 400 Up to 450 Up to

Membrane Air Dryer

02 Size With element service indicator 3 5 Option 10 20 Symbol Contents Size 3 10 20 5 $ $ $ $ $ $ $ $ $ $ Nil None (Standard) M V R S Flow direction (Right m Left) Standard dew point temperature and air flow rate With dew point indicator Standard equipment Flow rate by size Outlet air flow rate (L/min [ANR]) Standard dew point Symbol 3 5 10 20 (oC) 20 15 Drain discharge method Nil 25 25

Secondary Batteries

, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50,7 5, 100, 125, 150 *90and 91-series MXQ6 products do not have shock absorbers.