Vacuum Filter AFJ Series

-03-40-T/AFJ40-04-40-T 12 12 AFJ20-02-40-T AFJ30-03-40-T AFJ20-02-40-S AFJ30-03-40-S AFJ40-04-40-S 10 10 Pressure drop [kPa] Pressure drop [kPa] 8 8 AFJ40-04-40-T 6 6 4 4 2 2 Water drop removal type Nominal filtration rating: 40 m Large flow type Nominal filtration rating: 40 m 0 0 0 100 200 300 400 500 600 800 700 900 Flow rate [L/min (ANR)] 0 100 200 300 400 500 600 800 700 900 Flow rate

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

17 140 14.5 10 17 160 13 10 17 180 14 10 17 200 14.5 10 17 D-Z7/Z80 D-A3/A44/A5/A6 D-A59W D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL D-F5/J5/F5W/J59W D-F5BAL/F5NTL/F59F D-G39/K39 12 13 7 7.5 8 6 6 7 7 7 6 6 5 5.5 5 11 11 10 10 10 Since this is a guideline including hysteresis, not meant to be guaranteed.

Thermo-dryer

/ft3 (3.0 g/m3). 10.

AC Servo Motor Driver (CC-Link Type)

Approx. 5.6k Switch DICOM 24VDC 10% 150mA Approx. 5mA VCES 1.0V ICEO 100 A (2) Digital output interface DO-1 A maximum of 2.6V voltage drop occurs in the driver. If polarity of diode is reversed, servo amplifier will fail. Servo amplifier Driver driver ALM, etc. Load DOCOM (Note) 24VDC 10% 150mA Note.

Actuator Position Sensor

(16385) 3 R/W Hysteresis bit(0) 16 bit 10 Y 1 to 400 SetPoint1 bit(16) 16 bit 3 Y 3 1 R/W 0x4002 BDC4 2 R/W SetPoint2 bit(0) 16 bit 3 Y 3 (16386) Logic bit(24) 8 bit 0 Y 4 1 R/W 0x4003 2 R/W Mode bit(16) 8 bit 0 Y 5 BDC4 (16387) 3 R/W Hysteresis bit(0) 16 bit 10 Y 1 to 400 1: "R" means Read and "W" means Write. 2: Y: Included in DS (data storage), N: Not included in DS. 3: Refer to initial

IZ-OMK0015

to 500 3 300 to 2000 300 to 400 5 300 to 2000 300 to 400 10 200 to 2000 200 to 300 15 200 to 2000 200 to 300 20 150 to 2000 150 to 250 30 50 to 2000 50 to 200 60 50 to 2000 50 to 150 (Note) After installation, verify the effects of static neutralization.

Series CE1

pulse) REA Power supply voltage 100V AC ( 20%), 50/60Hz 24V DC ( 10%) (Power ripple 10% or less) Between case and AC line: 1500V AC for 1min.

MGC

MGCM Slide bearing 350, 400, 450, 500 350, 400, 450, 500, 600 75, 100, 125, 150, 350, 400, 450, 500, 600, 700, 800 200, 250, 300 MGCL Ball bushing baering 350, 400, 450, 500, 600, 700, 800, 900, 1000 *Short stroke or intermediate stroke(except above stroke): Manufactured upon receipt of order 3.20-2 Compact Guide Cylinder Series MGC Specifications MGCll20 MGCll25 MGCll32 MGCll40 MGCll50

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

350, 400, 450, 500, 600, 700, 800, 900, 1000 63 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100 80 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200 100 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200, 1300 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

Thermo-chiller Air-cooled 200 V/400 V Type Inverter Type HRSH090 Series (400 V type only) (Option S only) (UL Standards) (Option S only)

Note 1) 200 V type only. 400 V type is provided with an earth leakage breaker as standard. Note 2) 200 V type only. 400 V type is CE-compliant as standard. Additionally, combination with option B is not necessary. An earth leakage breaker is equipped as standard.

XL-OMY0002

6 9 6 9 10 9 5 SUS304 4 5 10 4 10 S O S O XLD-25 XLD-40,XLD-50,XLD-160 XLD-63,XLD-80,XLD-100 S 1 SUS304+ 4 1) S S O 2) S O FKM 5 O 6 S O 2 FKM 9 S SUS304 10 11 XL-OMY0002 6. 6-1.

High Vacuum L Type Valve

H 5 Initial power/ Power 100 VAC 800/180 1200/300 1600/400 200 VAC 3200/180 4800/300 6400/400 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for the size 16 models.

VZ5000

-02-08/AN200-2 Speed controller/Silencer 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ514--02 (Piping: 10 x 1 m) Speed controller/Silencer AS3301F-02-10/AN200-2 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ514--02 (Piping: 12 x 1 m) Speed controller/Silencer AS4001F-02-12/AN200-2 It is when the cylinder is

0.01

See Specific Product Precautions. 0.2 GD 0 0 10 20 30 40 50 Operating temperature (C) Port size Model Rated flow (L/min (ANR)) Note 1) Weight 60 80 100 100 100 100 300 400 500 500 35 g 35 g 35 g 35 g 60 g 150 g 190 g 190 g 190 g 260 g 4 (One-touch fittings) 6 (One-touch fittings) 8 (One-touch fittings) Rc, NPT, G 1/4 Rc, NPT, G 1/4 Rc, NPT, G 1/4 8 (One-touch fittings) 10 (One-touch fittings

IZT40/41/42

2 y One-touch fitting q Model o Power supply cable length Symbol Model 40 Standard type Symbol Metric size 4H 4 Straight 6H 6 Straight 8H 8 Straight AH 10 Straight 4L 4 Elbow 6L 6 Elbow 8L 8 Elbow AL 10 Elbow Symbol Length [m] 3 3 5 5 10 10 15 15 N None w Model Symbol Model 41 AC type 42 Dual AC type To use AC adapter, specify N, and select AC adapter sold separately. e Bar length !

XLF Series

Specifications Model XLF-16 XLF-25 XLF-40 XLF-50 XLF-63 XLF-80 XLF-100 XLF-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the

Electric Actuator ／ Slider Type High performance Battery-less absolute encoder

Model LEFS25G LEFS32G LEFS40G LEFS16G Stroke [mm] Note1) 50800 501000 1501200 50500 Horizontal 14 15 12 25 30 20 45 50 25 55 65 Work load [kg] Note2) Vertical 2 4 0.5 7.5 15 4 10 20 2 2 23 400 10800 5400 201500 12900 6500 241300 161000 8500 301200 201000 10500 401450 10700 5360 201100 12750 6400 241300 16950 8500 301200 201000 10500 451500 10600 5300 201100 12750 6400 241300 16950 8500 301200

Hydraulic Filters

0 100 90 80 100 90 80 70 60 50 40 30 20 10 0 100 200 300 400 500 100 200 300 400 500 100 200 300 400 500 Elimination ratio (%) Elimination ratio (%) Elimination ratio (%) 75 70 60 50 40 30 20 10 0 1 5 10 50 100 1 5 10 50 30 100 1 5 10 50 100 Flow-back count Flow-back count Flow-back count Explanation of graph Explanation of graph Example: Elimination ratio and concentration after using the

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

D Bus voltage (Note 4) 10[V] 8[V] 100M[pulse] 0 100M[pulse] 400[V] 0 -10[V] CW direction Note 1.

Dual Speed Controller with One-touch Fitting Series ASD

Metric size Inch size With One-touch fitting 04 06 08 10 12 01 03 05 07 09 11 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 1.5