This is a legacy product, and replaced byVT307-5G1-02
This is a legacy product, and replaced byVQZ3221-5YZ1-02
This is a legacy product, and replaced byVQZ332-5L1-02
This is a legacy product, and replaced byVQZ3120-5Y1-02
This is a legacy product, and replaced byVQZ3121-3L1-02
This is a legacy product, and replaced byVQZ3121-3Y1-02
This is a legacy product, and replaced byVQZ3121-4Y1-02
This is a legacy product, and replaced byVQZ3121-5YZ1-02
This is a legacy product, and replaced byVT307-BG1-02
Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40 1000 Manufacturable stroke range [mm] 11-LEFS16 V V V V V V V V V V 50 to 500 11-LEFS25 V V V V V V V V V V V V 50 to 600 11-LEFS32 V V V V V V V V V V V V V V V V 50 to 800 11-LEFS40 V V V V V V V V V V V V V V V V V V 150 to 1000 *Please consult with SMC for non-standard strokes as they are produced as special orders.
Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa); Sub-atmospheric : 100mm Hg absolute to 30 psig (-88kPa to 0.2MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: 316L SS), Surface Finish: V [7 μin. (0.18 μm)], Range Options: Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal, Male
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: 110/120 V AC, Specification: Standard / Lubrication Free, Valve Type: 5-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Pressure Differential Return), Valve Positions: 2-Position Exhaust, Applicable Cylinder Diameter(Ø): 125 to 300, Pipe Port Type: [Rc (R)] Rc, Port Size: 3/
Type: Solenoid Valves, Application: Unit for Manifold Mounting, Mounting Orientation: Manifold Base, Voltage: 110/120 V AC, Specification: Standard / Lubrication Free, Valve Type: 5-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Pressure Differential Return), Valve Positions: 2-Position Exhaust, Applicable Cylinder Diameter(Ø): -, Pipe Port Type: -, Port Size:
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: 110/120 V AC, Specification: Standard / Lubrication Free, Valve Type: 5-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Pressure Differential Return), Valve Positions: 2-Position Exhaust, Applicable Cylinder Diameter(Ø): -, Pipe Port Type: [Rc (R)] Rc, Port Size: 1/2, Pressure
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: 110/120 V AC, Specification: Standard / Lubrication Free, Valve Type: 5-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Pressure Differential Return), Valve Positions: 2-Position Exhaust, Applicable Cylinder Diameter(Ø): -, Pipe Port Type: NPTF, Port Size: 1/2, Pressure Rating
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: 110/120 V AC, Specification: Standard / Lubrication Free, Valve Type: 5-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Pressure Differential Return), Valve Positions: 2-Position Exhaust, Applicable Cylinder Diameter(Ø): 125 to 300, Pipe Port Type: NPTF, Port Size: 3/4, Pressure
Type: Solenoid Valves, Application: Unit for Manifold Mounting, Mounting Orientation: Manifold Base, Voltage: 110/120 V AC, Specification: Standard / Lubrication Free, Valve Type: 5-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Pressure Differential Return), Valve Positions: 2-Position Exhaust, Applicable Cylinder Diameter(Ø): -, Pipe Port Type: -, Port Size:
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: 110/120 V AC, Specification: Standard / Lubrication Free, Valve Type: 5-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Pressure Differential Return), Valve Positions: 2-Position Exhaust, Applicable Cylinder Diameter(Ø): 125 to 300, Pipe Port Type: NPTF, Port Size: 3/4, Pressure
Type: Solenoid Valves, Application: Unit for Manifold Mounting, Mounting Orientation: Manifold Base, Voltage: 110/120 V AC, Specification: Standard / Lubrication Free, Valve Type: 5-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Pressure Differential Return), Valve Positions: 2-Position Exhaust, Applicable Cylinder Diameter(Ø): -, Pipe Port Type: -, Port Size:
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: 110/120 V AC, Specification: Standard / Lubrication Free, Valve Type: 5-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Pressure Differential Return), Valve Positions: 2-Position Exhaust, Applicable Cylinder Diameter(Ø): 125 to 300, Pipe Port Type: [Rc (R)] Rc, Port Size: 3/