Body Size: 3/8 Standard, Indicator Direction: 0°, Applicable Tube O.D.: ø5/16"

Body Size: 1/8 Basis, Applicable Tube OD: Ø5/16 Inch Size

Body Size: 1/4 Basis, Applicable Tube OD: Ø5/16 Inch Size

Base Type: Plug Lead Unit U Type, Stations: 9 Stations, Port Size: -

Base Type: Plug Lead Unit, Stations: 9 Stations, Port Size: -

Body Material: [Resin] PP, Format: [Related Parts] Holder, Environment, Applications: Standard, Applicable Tube O.D. inch size(inch): 5/16", Applicable Series: AS2052F / AS3002F

Main Body Shape: Unit, Additional Function: Silencers / Filter / Valves for Vacuum Generation / Reverse Check Valve/Vacuum Retention / Vacuum Destructive Valve, Ultimate Vacuum(kPa): -91, Air Consumption Flow Rate(l/min): 90, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: 5/16 (Ø7.94), Air Supply Port Connecting Shape: One-Touch Couplings, Air

Main Body Shape: Unit, Additional Function: Filter / Valves for Vacuum Generation / Reverse Check Valve/Vacuum Retention / LED Display Pressure Switch for Vacuum / Central Exhaust Specification, Ultimate Vacuum(kPa): -91, Air Consumption Flow Rate(l/min): 58, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: 5/16 (Ø7.94), Air Supply Port Connecting

Type: Speed Controller, Body Material: [Resin] PBT, Format: [Straight] Straight, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: One-touch coupling one both sides, Applicable Tube O.D. mm(mm): -, Applicable Tube O.D. inch size(inch): 5/16, Body Size: 1/4 Standard

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter Out / In, Format: [Straight] Straight, Environment, Applications: Standard, Thread Portion Material: [303/304 Stainless Steel] Stainless steel 303, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: One-touch coupling one both sides, Applicable Tube O.D. mm(mm): -, Applicable Tube O.D. inch size(

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter Out / In, Format: [Straight] Straight, Environment, Applications: Standard, Thread Portion Material: [303/304 Stainless Steel] Stainless steel 303, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: One-touch coupling one both sides, Applicable Tube O.D. mm(mm): -, Applicable Tube O.D. inch size(

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter Out / In, Format: [Straight] Inline, Environment, Applications: Standard, Knob Type: Push Lock Calibrated, Lock Nut Option: [Slide Locking Lever] Push Lock Type, Joint Type: One-touch coupling one both sides, Applicable Tube O.D. mm(mm): -, Applicable Tube O.D. inch size(inch): 5/16, Body Size: 1/4 Standard, Handle

Type: [Fitting] Pipe/Plug, Fitting Type: Other shapes, Body Material: [PBT Resin] PBT, Application: Standard/Mini, Shape: [Others] Sputtering Cover, Applicable Fitting Size (mm): -, Applicable tube fitting size (inches): 5/16

Air Cylinder Series MB

50 40 CLG1 32 CL1 MLGC CNG MNB V V CNA Graph (6) Graph (3) P P CNS 100 80 CLS 63 100 50 40 CLQ 80 63 50 m m RLQ 32 40 MLU 32 !"

10

7 CJ1 Width across flats CJP Rod view CJ2 32 32 (2:1) JCM CM2 Component Parts CM3 No.

MB

MB MBW MBK MBQ MH + Stroke + Adjustable range CA2 ZZ + 2 x Stroke + Adjustable range (A: 25, B: 50) Piston rod and rod end nut made of stainless steel CS1 Bore size (mm) ZZ 175 183 205 205 258 261 MA 21 27 32 32 36 46 MK 10 12 15 15 20 20 MI 24 32 38 38 45 55 MH 44 48 53 53 72 75 ML 18 20 21 21 32 32 MM 10 14 18 18 22 26 32 40 50 63 80 100 Specifications C76 Double acting, Single/Double rod

Booster Regulator/Air Tank

Rc 3/8 EXH: Rc 1/4 60 OUT (328) Tank OUT port Rc 1/2 278 180 170 4 x 11 32 32 Drain port Rc 1/4 120 180 312 460 Connected to VBA20A Connected to VBA22A Tank IN port Rc 3/8 Booster regulator IN port Rc 3/8 Booster regulator IN port Rc 3/8 EXH: Rc 3/8 EXH: Rc 3/8 (454) 442 (417) Tank OUT port Rc 1/2 (367) (367) OUT OUT 278 180 180 170 4 x 11 4 x 11 32 32 120 180 180 120 Drain port Rc 1/4 312

Guide Cylinder Series MGG

37 55 182 M14 x 2 depth 25 For long strokes Bracket mounting strokes Bore size (mm) Stroke range (mm) Bore size (mm) Bracket mounting stroke Bore size (mm) O P Y Z Y X W V U T S R Q R 20 25 32 40 50 20 25 32 40 50 20 25 32 40 50 100mm or more Rc 1/8 M6 x 1 depth 9 88 157 80 30 40 48 82 12 26 12 250 to 400 14 21 Rc 1/8 M6 x 1 depth 13 88 125mm or more 175 80 37 46 57 100 13 31 12 350 to 500

MRQ

15 17.5 20 4 25 30 30 12.5 15 3 (mm) L Max. 32 Max. 31.5 20 Size 32 40 15 40 17.5 20 4 Possible to change the specification from standard to"-X5" 25 Specify the part number for hexagon socket head cap screw for angle adjustment referring to the list below. 30 30 Size 32 Part no.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

CL MLG Stroke (mm) Pulling force Bore size (mm) 20, 25, 32 40, 50, 63 80, 100 Thread size CNA 2 4.9N M2.5 X 25l 3 10N M3 X 3l CNG 3 24.5N M5 X 40l Bolt should be detached under normal operation, otherwise it may cause malfunction of the locking feature. MNB wThe lock piston is pushed further upward.