HRX-OM-M005

Item Descriptions 1 SERIAL Used to display the Serial communication setting screen 1 on page 5-28. 2 CH1 DIO Used to display the CH1(2)DIO communication setting screen 1 on page 5-32. 3 CH2 DIO Used to display the CH1(2)DIO communication setting screen 1 on page 5-32. 4 [Return] key Used to display the Detail setting screen 1 on page 5-22.

SI unit ( device)

Specifications 32 Dimensions 34 -1No.EX-OMW0016-A Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

SI unit for PROFIBUS DP

common) / source 4 M12 connector, 16 outputs, NPN (positive common) / sink 5 D-sub connector, 32 outputs, PNP (negative common) / source 6 D-sub connector, 32 outputs, NPN (positive common) / sink 7 D-sub connector, 16 outputs, PNP (negative common) / source 8 D-sub connector, 16 outputs, NPN (positive common) / sink Fieldbus PR PROFIBUS DP -8No.EX-OMN0009-G Summary of Product elements <

Fieldbus system (CC-Link compliant)

, Output: 32) I/O memory map (in case of station No. 1) Ex.)

Electric Actuator / Low profile slider type

LEM-OM00203 PRODUCT NAME Electric Actuator / Low profile slider type MODEL / Series / Product Number LEM Series Applicable models: LEMB, LEMC, LEMH, LEMHT L LE EM MB B 2 25 5/ /3 32 2 L LE EM MC C 2 25 5/ /3 32 2 ( (C Ca am m f fo ol ll lo ow we er r g gu ui id de e t ty yp pe e) ) ( (B Ba as si ic c t ty yp pe e) ) L LE EM MH H 2 25 5/ /3 32 2 L LE EM MH HT T 2 25 5/ /3 32 2

11-cq2-e

Besides, be certain that a retaining ring is placed firmly into the groove of rod cover before supplying air at the time of installment. 75 Compact Cylinder/Anti-lateral Load Series CQ2 Replacement Procedure is 32, 40, 50 63, 80, 100 P.290 Construction Standard !3 !2 !1 !2 !1 !

11-cuk-e

Free Mount Cylinder/Non-rotating Rod Type: Double Acting, Single Rod Series CUK 10, 16, 20, 25, 32 Construction With auto switch Actuators Modular F.R.L. Pressure Control Equipment Air Preparation Equipment Industrial Filters Replacement Procedure Actuators Modular F.R.L. Pressure Control Equipment Industrial Filters 10 @1 @0 !9 @1 @0 !9 16 to 32 @1 @0 !9 @1 @0 !

CS1

25 to 1000 Lube Non-lube Air-hydro 1/2 M30 X 1.5 50 47 75 15 31 161 128 M14 X .5 36 90 43 14 16 32 17 59 35 36 28 to 1000 3/4 M36 X 1.5 56 53 80 36 18.5 17 182 144 M16 X 1.5 20 40 90 59 43 14 39 36 40 32 to 1200 3/4 M40 X 1.5 60 63 41 90 115 18.5 204 162 M18 X 1.5 20 17 23 45 70 48 39 44 50 40 to 1200 3/4 1 Lube Non-lube M45 X 1.5 60 63 90 115 18.5 46 20 226 182 M20 X 1.5 17 50 48 44 25

Speed Controller with One-touch Fittings Series AS In-line Type 1

Applicable cylinder bore size (mm) Model Metric size Inch size 1 8" 3.2 4 6 8 10 12 5 32 " 3 16 " 1 4" 5 16 " 3 8" 1 2" AS1001F 6,10, 16, 20 AS2001F 20, 25, 32 Application to inch size tubing Metric size (Release bushing: White color) 3.2, 4, 6, 8, 10, 12 Inch size (Release bushing: Orange color) 1/8", 5/32", 3/16", 1/4", 5/16", 3/8", 1/2" AS2051F 20, 25, 32, 40 AS3001F 40, 50, 63 AS4001F

MHL2

6@6#0 <32, 40> ei!4!

ASD

AS Weight (g) d T H D1 D2 D3 L1 L2 L3 Model 1/8" ASN ASD230F-U10/32-01 8.4 12 10-32 UNF 12.9 8 25.5 28.6 22.2 25.8 29.4 9.6 10 11.7 7.8 28.3 17.5 25 5/32" ASD230F-U10/32-03 9.3 13 3/16" AQ ASD330F-N01-05S 16.5 11.6 34.6 39.5 14 39.6 23.9 30 1/4" NPT1/8 ASD330F-N01-07S 17 13.2 42.2 25.6 12.7 36.1 27 31.1 14.2 11.8 10.6 32 33.9 38.9 15.8 31 5/16" ASV ASD330F-N01-09S 18.5 15.2 44.8 28.2 1/4"

CC

Turbine oil of ISO VG32 Figure 6 (Example) Idemitsu: Turbine oil P32 Nisseki: Turbine oil 32 Maruzen: Turbine oil 32 Mitsubishi: Mitsubishi turbine 32 Idemitsu: Dufny turbine oil Nisseki: FBK turbine 32 Maruzen: Turbine super 32 Mitsubishi: Diamond turbine oil 32 Piping UBefore connecting the pipes, remove any foreign matter.

VQ7-6/7-8

(V type) 3-10-31 32 Series VQ7-8 Manifold Option Parts Double check spacer VV72-FPG Silencer box VV72---SB By combining a 3 position exhaust center valve with a double check spacer, an intermediate stopping position of a cylinder can be held for an extended period.

Compact Guide Cylinder JMGP Series ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Compact Guide Cylinder JMGP Series 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 How to Order JMGPM 25 M9BW 30 Number of auto switches Bearing type M Slide bearing Nil 2 S 1 n n Bore size 12 10 mm x 2 16 12 mm x 2 20 16 mm x 2 25 20 mm x 2 32 25 mm x 2 40 32 mm x 2 50 40 mm x 2 63 45 mm x 2 80 56 mm x 2 100 71 mm x 2 Auto switch Nil Without auto switch (Built-in magnet) For applicable auto switches

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Metric size ZFC7 ZFC5 Symbol Applicable tubing O.D. 4 6 8 10 12 3 4 5 6 7 Option Nil B None With bracket Inch size B D E F 5/32" 1/4" 5/16" 3/8" Max.

ITV

Note) Breathing hole (M3 x 0.5) 3.7 3.7 13.7 1 SUPz VACz OUT port (4, 5/32") SUP, VAC port (4, 5/32") OUTx 3 EXHc ATMc 2 5 EXH, ATM port (4, 5/32") 38 2-M3 x 0.5 thread depth 3.5 Bracket mounting hole L-bracket (Option) Flat bracket (Option) 6-3.5 19 74 2-3.5 19 27 19 64 Minimium bending radius 80 28 Body +50 0 3000 15 35 (30.9) 4 8.7 9.9 Cable connector (4-wire) Straight type (Option) 7

P

(mm) ZX Pad diameter (mm) Lock ring 1 2 10 to 16 20 to 32 02 04 2 4 -X19 With lock ring Without lock ring (10 or larger) ZR 3 40, 50 06 6 08 8 ZM Material 10 10 N S NBR Silicon rubber 13 13 ZH 16 16 U Urethane rubber Pad style 20 20 ZU F Fluorine rubber 25 25 U C Flat Flat with ribs GN Conductive NBR (2 to 16) 32 32 GSConductive silicon rubber (2 to 16) 40 40 D Deep ZL 50 50 B Bellows 20

VQ7-6/7-8

AXT512-13 O-ring NBR 2 AS568-022 O-ring NBR 1 AS568-020 O-ring NBR 2 AXT512-5 Gasket NBR 1 AXT512-4 Plate SPCC 1 M4X10 Oval countersunk head screw SWRH3 2 AXT512-6-1 Connection fitting A 2 AXT512-6-4 Connection fitting B 2 AXT512-6-3 Hexagon socket head screw 2 32 Manifold Specification Sheet Series VQ7-6 1.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

Guide Cylinder Series MGG 20, 25, 32, 40, 50, 63, 80, 100 How to Order L M9BW B 32 MGG 100 Guide Cylinder Bearing type Made to Order Refer to page 358 for details. M L Slide bearing Ball bushing bearing Mounting style Number of auto switches B F Basic style 2 pcs. 1 pc. n pcs.

3

Reference: 1 [L/min] 0.2642 [gal/min] 1 [gal/min] 3.785 [L/min] oF = 9/5oC + 32 Note) Analog output of 4 to 20 mA with temperature sensor is made to order. (Refer to page 10.)