VQ7-6/7-8

L approx. 500) Prewired connector (M12) (L approx. 500) PA R2 P R1 PA R2 R1 2-7.5 Mounting hole Indicator light 49 (64) 49 (64) 2-7.5 Mounting hole Indicator light 49 (64) 49 (64) 108.5 (121.5) 108.5 (121.5) 50 (63) 32 (42) 50 (63) 32 (42) 5 3 5 3 38 (53) 38 (53) 1 23 (30) 1 23 (30) 2-Rc3/8, 1/2, 3/4 Ports R1, R2 Rc3/8, 1/2, 3/4 Port P 2-Rc3/8, 1/2, 3/4 Ports R1, R2 Rc3/8, 1/2, 3/4 Port P

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

2 !3 !

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

+20 mA 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 0..2 (Ch0 in) Analogue input range 3 Reserved 3 0: -10..+10 V, 1: -5..+5 V, 2: -20..+20 mA 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 4..6 (Ch1 in) Analogue input range 7 Reserved 0..1 (Ch0 in) Analogue average filter 0: None, 1: 2 value average, 2: 4 value average, 3: 8 value average 2..3 Reserved 4 4..5 (Ch1

ZP

Dimensions: Pad Unit ZP2-B02MU ZP2-B035MU ZP2-B04MU ZP2-B05MU 4 4 4 4 3 3 3 3 2 2 2 2 1 1.5 1.5 1 1.5 1 1.5 1 4 4 4 4 0.5 0.5 0.8 0.8 1.4 1.4 1 1 5 4 2 3.5 5.8 4.8 2.4 3.8 ZP2-B06MU ZP2-B08MU Adapter Mounting Dimensions 8 7.5 If an adapter will be made by the customer, design the adapter with the dimensions shown below. 6 6 4 4 Applicable pad B02MU/B035MU/B04MU/B05MU 1.2 2 2 0.8 2 2 6.5 7

Auto Switch Guide

PC Connector model M83 pin M84 pin M124 pin 1 2 1 4 Pin arrangement 1 2 Solid state switch Standard part no. 3 4 4 3 3 For the applicable auto switch model, refer to the table below.

KJ

16 5 32 16 3 1 4 3 16 1 4 16.5 3.5 5 16 1 4 17 4.6 3 8 3 8 5 16 18.5 6 1 2 1 2 3 8 21 7 Applicable tubing Note) D: Max. diameter Plug-in Y: KQ2U Applicable tubing O.D.

HRX-OM-M090

-3 2.4 Operation display panel . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using casters . 3-2 3.2 Installation . 3-3 3.2.1 Environment . 3-4 3.2.2 Location (Required ventilation rate and facility water source) . 3-6 3.2.3 Installation and Maintenance Space . 3-7 3.3 Installation . 3-8 3.3.1 Mounting . 3-8 3.3.2 Electrical wiring . 3-9 3.3.3 Preparation

One-touch Fittings Series KQ2

2 2 8 / 3 S 3 0 7 0 Y 2 Q K 7 1 5 . 9 2 5 . 9 2 5 3 8 / 1 S 1 0 9 0 Y 2 Q K 2 1 2 . 5 1 2 1 5 . 3 2 5 . 4 2 8 2 5 . 8 1 6 6 1 6 1 / 5 4 / 1 S 2 0 9 0 Y 2 Q K 4 1 5 . 8 2 0 3 4 2 8 / 3 S 3 0 9 0 Y 2 Q K 7 1 5 . 0 3 5 . 1 3 6 3 4 / 1 S 2 0 1 1 Y 2 Q K 7 1 9 . 7 1 7 1 5 . 5 2 5 . 9 2 5 . 2 3 1 2 7 9 2 8 / 3 8 / 3 S 3 0 1 1 Y 2 Q K 5 . 1 3 4 3 8 3 2 / 1 S 4 0 1 1 Y 2 Q K 2 2 5 . 5 3 5 . 6 3

VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

HRX-OM-W038

-3 2.4 Operation display panel . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using casters . 3-2 3.2 Installation . 3-3 3.2.1 Environment . 3-4 3.2.2 Location (Required ventilation rate and facility water source) . 3-6 3.2.3 Installation and Maintenance Space . 3-7 3.3 Installation . 3-8 3.3.1 Mounting . 3-8 3.3.2 Electrical wiring . 3-9 3.3.3 Preparation

HRX-OM-R005

-2 2.3 Function of Parts . 2-3 2.4 Operation display panel . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using casters . 3-2 3.2 Installation . 3-3 3.2.1 Environment . 3-4 3.2.2 Location (Required ventilation rate and facility water source) . 3-6 3.2.3 Installation and Maintenance Space . 3-7 3.3 Installation . 3-8 3.3.1 Mounting . 3-8 3.3.2 Electrical

Table of Contents

Ported VQ140 0.73 0.84 Series VQ1000 Single/ 3 position only VQ141 1.0 0.84 P. 2-4-36 P. 2-4-30 VQ240 2.3 Series VQ2000 Single only VQ241 2.7 P. 2-4-36 P. 2-4-30 VQ170 0.60 0.58 Series VQ1000 Single/ 3 position only VQ171 0.80 0.70 P. 2-4-74 P. 2-4-72 2-4-2 3 Manifold Option Option Individual SUP/EXH Built-in silencer DIN rail mounting style Elbow fitting for cylinder port D-sub connector

HRX-OM-R016

-3 2.4 Operation display panel . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using casters . 3-2 3.2 Installation . 3-3 3.2.1 Environment . 3-4 3.2.2 Location (Required ventilation rate and facility water source) . 3-6 3.2.3 Installation and Maintenance Space . 3-7 3.3 Installation . 3-8 3.3.1 Mounting . 3-8 3.3.2 Electrical wiring . 3-9 3.3.3 Preparation

Vacuum System Peripherals:

Flow capacity (l/min (ANR)) Oil mist concentration at outlet side 300 750 1500 2200 3500 Filtration (m) Port size Rc Model AM150 AM250 AM350 AM450 AM550 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) , , , , , , , , , 1 1 0.3 1 2 3 4 3 4 1, 1 2 1 , 2 AM650 6000 AM850 12000 1 2 Can produce with auto drain type, drain piping type.

HRX-OM-O021

-2 2.3 Function of Parts . 2-3 2.4 Operation display panel . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using casters . 3-2 3.2 Installation . 3-3 3.2.1 Environment . 3-4 3.2.2 Location (Required ventilation rate and facility water source) . 3-6 3.2.3 Installation and Maintenance Space . 3-7 3.3 Installation . 3-8 3.3.1 Mounting . 3-8 3.3.2 Electrical

VQ5000

(A) 4 (B) 2 (A) 4 (B) 2 VQZ 3 1 VQD Manual override 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 2 position double 3 position exhaust center Nil: Non-locking push type (Tool required) B: Slotted locking type (Tool required) (A) 4 (B) 2 (A) 4 (B) 2 Metal Rubber 4 Bore 6.1 Bore 6.1 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) PUSH TURN LOCK 2 2 position double 3 position pressure center (A) 4 (B) 2

ISO Cylinder

2 3 3 A B A B A B A B A B 8 5 5 4 4 3.5 3.5 10 6.5 (7) 6.5 (7) 2 (2.5) 2 (2.5) 3 (3.5) 3 (3.5) 10 5 (5.5) 5 (5.5) 4 (4.5) 4 (4.5) 3.5 (4) 3.5 (4) 12 7.5 (8.5) 7.5 (8.5) 3 (4) 3 (4) 4 (5) 4 (5) 12 6 (7) 6 (7) 5 (6) 5 (6) 4.5 (5.5) 4.5 (5.5) 13.5 (10.5) [7.5] 12 (9) [6] 9.5 (6.5) [3.5] 11 (8) [5] 10.5 (7.5) [4.5] 8 (5) [2] 9.5 (6.5) [3.5] 9 (6) [3] 10 (7) [4] 16 7.5 (8.5) 16

Auto Switch Guide

PC Connector model M83 pin M84 pin M124 pin 1 2 1 4 Pin arrangement 1 2 Solid state switch Standard part no. 3 4 4 3 3 For the applicable auto switch model, refer to the table below.

REA/REB

3 !2 y r @4 !4 !5 @9 #2 !8 @8 t u !0 e w #1 #3 !1 @0 i !7 @3 @1 @7 @2 @6 @5 #0 REAL10 Parts list Parts list Note No. Description No.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

symbol 2 position double with back pressure check valve 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 4 (A) JIS symbol 3 position closed center (A) 4 (B) 2 2 (B) 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 3 position exhaust center with back pressure check valve 3 position exhaust center (A) 4 (B) 2 (A) 4 (B) 2 3 position closed center/exhaust