XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.

Flat Type Pad/Bellows Type Pad with Groove

Symbol/Form Flat Type Pad/Bellows Type Pad with Groove UM: Flat type with groove BM: Bellows type with groove 32, 40, 50, 63, 80, 100, 125 Pad diameter How to Order ZP3E 32 UM P N Pad unit Plate () Pad diameter Nil None P With plate Symbol Pad diameter 32 32 40 40 50 50 63 63 80 80 100 100 125 125 Pad material Symbol Material N NBR S Silicone rubber U Urethane rubber F FKM CL Mark-free NBR

Step Motor Controller (Servo / 24 VDC)

(Example) Step data force is 100% INP (ON) force Step data Trigger LV is 80%, The energy saving setting of the electric actuator is 40% *1) 100 time time 80 40 80 100 (2) If controller version is below SV1.00. 40 forc e B6 During pushing operation in energy saving mode, if the energy saving setting is less than the Trigger LV value, the INP output signal will turn OFF.

AWM20 to AWM40

(+) 55 mA or less (at no load) Current consumption NPN or PNP open collector 1 output Switch output Main circuit Main circuit Load Max. load current 80 mA + 12 to 24 VDC Black OUT 30 V (with NPN output) Max. applied voltage 1 V or less (with load current of 80 mA) Residual voltage Response time Anti-chattering function 1 s (Response time selections: 0.25, 0.5, 2, 3) Blue DC () PNP open collector

AWM20 to AWM40

(+) 55 mA or less (at no load) Current consumption NPN or PNP open collector 1 output Switch output Main circuit Main circuit Load Max. load current 80 mA + 12 to 24 VDC Black OUT 30 V (with NPN output) Max. applied voltage 1 V or less (with load current of 80 mA) Residual voltage Response time Anti-chattering function 1 s (Response time selections: 0.25, 0.5, 2, 3) Blue DC () PNP open collector

Modular Type Air Filters Series AF

option ** With relief valve option mm AC-B A* 90 117 154 AA** 140 181 238 B 160 220 239 C 73 86 92 E 30 38 F 45.5 58.5 75.5 G 40 55 80 J 26 29.5 37.5 K 5 3.5 1.5 M 30 41 50 N 51 64 81 Q 24 35 40 U 5 7 7 V 33 45 50 W 34.5 41 AC21B AC31B AC41B * Without relief valve option ** With relief valve option 2 Series AC21~41 F.R.L.

ZK2-C

DC(+) 5 4 3 2 1 A DC(-) A DC(+) OUT1 OUT2 C DC(+) C DC(-) (FUNC) B DC(-) B DC(+) DC(-) NPN PNP -14NO.ZK2-OM00801-B NPN NPN 2 , 26.4 V 80 mA 2 V (NPN ) Assy (ZK2-LWA20-A) PNP PNP 2 , 80 mA2 V (PNP ) Assy (ZK2-LWB20-A) -15NO.ZK2-OM00801-B O O 2 ( :0.080.10 Nm) () -16NO.ZK2-OM00801-B 133 A 1 1 1 1 -17NO.ZK2-OM00801-B OUT1 (P_1)ON (P_1)(H_1)OFF P_1-70.0 kPa H_1:10.0 kPa OUT2

ZL3-OM00601

ZL3 ZL6 Basic type 390 470 Port exhaust +80 +25 Specification of vacuum switch (Lead wire is not included) +20 Specification of vacuum switch (Lead wire is included) +60 With Supply valve and release valve +120 A Without supply valve and release valve +80 With pressure gauge +30 With adapter assembly for bottom mounting +60 22 Doc.

ZL3-OM00801

+25 +20 +60 / +120 , +80 +30 +60 22 No.ZL3-OM00801-A 9.5 ZSE10 [kP] -1010 -100100 /[kPa] -10110 -105105 [kPa] 500 [kPa] 0.1 [DCV] 122410%(p-p)10% [mA] 40 NPN NPN PNP PNP 2 OUT1: OUT2: [mA] 80 [V] 28(NPN ) 26.4(NPN ) [V] 2 (80mA ) [ms] 2.5 (20,100,500,1000,2000ms ) 0.2F.S. 1digit 1 0 1 0 3 1/2 7 LED 1 () 2F.S. 1digit(253) ON OUT1 OUT2 IP40 [] -550/:-1060 [%RH] ,3585

PSxx-OMU0005CN

mA 1 V T15 V 1 k V420 mA 12 V 300 24 V 600 50 -V/-T () PNP 2 Max.80 mA 1 V -Y () -V/-T () PNP 2 Max.28 V80 mA 1 V -22No.PS-OMU0005CN-C [] 3 0.2 [] / OUT2 OUT2 OUT1 OUT1 [F10]30 () 13 35 1 (62 ) () () (27 ) (29 ) (3 ) (25 ) 3 () 3 -23No.PS-OMU0005CN-C ON OFF ON ON OFF ISE20B [P_1] OUT1 0.500 MPa [P_2] OUT2 0.500 MPa [H_1] OUT1 0.050 MPa [H_2] OUT2 0.050 MPa ZSE20B [P

Digital Gap Checker

OUT1 over current error The switch output (OUT1) load current has exceeded 80 mA. Turn the power OFF and remove the cause of the over current. Then turn the power ON again. OUT2 over current error The switch output (OUT2) load current has exceeded 80 mA. Zero clear was performed in non-atmospheric pressure (Pressure outside of 14 kPa was supplied present.)

PSxx-OMT0001CN

kPa 220 kPa () OUT1 (OUT1) 80 mA OFF, OUT2 (OUT2) 80 mA OFF, (14 kPa ) OFF 220 kPa () -20 kPa220 kPa (-20 kPa) -66No.PS-OMT0001CN-E 5 [ON/OFF] [] () [kPa] -67No.PS-OMT0001CN-E Revision history A [2018 3 ] B [2018 6 ] C [2019 9 ] D [2021 10 ] E [2022 6 ] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note

Air Slide Table Series MXP ø 6, ø 8, ø 10, ø 12, ø 16

Max. energy absorption (J) Stroke absorption (mm) Symbol Specifications 50 to 500 Max. collision speed (mm/s) X7 PTFE grease 80 245 80 245 Max. operating frequency (cycle/min) X9 Grease for food Max. allowable thrust (N) X16 Heat treated metal stopper bolt specification D10 to 60 Ambient temperature range (C) X23 Axial piping port set screw specification 1.96 4.22 15 1.96 3.83 15 Extended

Standard Combinations

.: Black B 1/8 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 M5 x 0.8 Width across flats 17 Width across flats 17 Standard specifications Bracket mount Model Port size A B C D P E F G H1 H2 J K L L M (1) (1) (1) (1) ACG20 ACG30 ACG40 1/8, 1/4 126 87 36 60 28.5 41.5 43 30 24 5.5 3.2 1/4, 3/8 167 115 41 80 30 55 57 41 35 35 14 7 7 4 1/4, 3/8, 1/2 220 147 48 110 38 72.5 75

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

Use formula (2) for vane type sizes 50, 80, 100 and the rack-and-pinion type. P + 0.1013 0.1013 P + 0.1013 0.1013 QCR = 2V x x 10-3.

e-Rodless Actuator

TB Motor position TA Slot for auto switch 5.8 3.5 2 Power supply cable (2 wires) 80 160 + Stroke 20 3.4 (500) 60 2 x 4-square nut M3 x 0.5 Motor position DA Motor position DB T-slot section for mounting details Nominal size: 25 (A clearance of 40 or more is required.)

Series MXP Precision Air Slide Table

20 40 60 80 Load (N) 20 40 60 80 Load (N) 20 40 60 100 Load (N) 12 12 12 L=100mm L=100mm L=100mm MXP12-15 MXP12-25 MXP12-15 MXP12-25 0.05 0.04 0.08 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 0.04 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.03 0.06 0.03 0.04 0.02 0.02 0.01 0.02 0.01 0 50 100 150 Load (N) 0 50 100 150 Load (N) 0 50 100 150

Air Cylinder NCA1 Series

Bore Piston Area Forces (lbs); Push Stroke (in) (in) Operating medium Pressure (PSI) 50 60 80 100 200 250 1.5 1.767 88 106 141 177 353 442 HOW TO USE THIS TABLE 1 Locate column with desired operating pressure. 2 Move down that column and locate the thrust value which is equal (or the next larger to the force to be delivered by the cylinder.) 3 On that same line, locate in the first (left)

Compact Electro-pneumatic Regulator Series ITV0000

Repetition Pressure characteristics Flow characteristics 0 1 10kPa 20kPa -20 Output deviation factor % F.S. 0.5 40kPa -40 Set pressure kPa Out 60kPa -60 0 Return 80kPa -80 -0.5 100kPa -100 -120 -100 -80 -60 -40 -1 0 1 1.5 0.5 2 2.5 3 3.5 -120 -20 4 Flow rate l/min (ANR) Supply pressure MPa 5 Compact Electro-pneumatic Regulator Series ITV0 Dimensions Single unit 4-6 2-6 PWR L bracket (optional

Short Stroke Electric Actuator Series LX

80 1.3 0.7 0.2 0.1 1.3 0.7 0.2 0.1 For transfer load of 1kg For transfer load of 3kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 10 1 50 10 1 10 10 10 10.1 5.1 1.1 0.2 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 2.6 40 40 2.6 1.3 0.3 0.1 1.3 0.3 0.1 1.3 80 80 1.3 0.7 0.2 0.1 0.7 0.2 0.1 Refer to page 303 for acceleration time. 213