IDX-OM-W035

IDFB22E-11-V IDFB22E/37E-23-V IDFB55E/75E-23-V IDF-S0199 IDF-S0198 IDF-S0302 240psi (1.6MPa) AC115V10% (60Hz) AC230V10% (60Hz) AC230V10% (60Hz) ON 0.5sec OFF 0.5min 12-3 ON OFF 4 6 2 3 2 8 1 4 10 0.5 5 0.5 ON:SEC OFF:MIN 12-4 V 6-4 6-3 T 11-6 11-4 12-2 IDFB Series 12-2 IDX-OM-W035 13 13 13-1 / IDFB Series 13-1 13-1 A2019/11 B2021/5 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

IDX-OM-W038

TC M C PLC THS M C OLR PTC CM PLC PTC C01 CM IDH6-10 TC IDH6 / IDHA6 TS M C F H SSR FM PRS P FM 1 IDH6/IDHA6 IDH6 / IDHA6 IDH6/IDHA6 IDH6 / IDHA6 CM FM OLR PRS ILS PTC PTC() MC THS TB TC TS SSR H F GFCI PLC 64 IDH Series IDX-OM-W038 . 6.4 6.3 IDH6 / IDHA6 1 65 IDH Series 6.4 IDX-OM-W038 7 7 7-1 / IDH Series 7-17-1 7-1 D2022/7 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

Air preparation filter

June 2019 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved -23-

VBA-OM-S001

VBA2: Tightening torque: 24 Nm (M10) VBA1: Mounting holes (Inside) (1) (4) (1) (4) URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3 5207 8249 Fax: +81 3 5298 5362 Specifications are subject to change without prior notice and any obligation the part of the manufacturer. (3) (2) (3) (2) Mounting base VBA1 VBA2 VBAT05A1VBAT10A12008

VBA-OM-P018

R1/4) VBA2 22~24Nm(R3/8) OUT O Rc1/4 O A B C D E F G H I J K L M O VBAT05A1 VBA10A VBA11A 150 374 370 307 163 160 100 200 Rc3/8 257 60 Rc1/4 20 VBA10A VBA11A 391 328 VBAT10A1 VBA20A VBA22A 170 522 454 417 367 170 180 120 312 Rc1/2 278 130 VBAT10A1-VBA2 IN OUT Rc3/8 39 VBA1 IN OUT IN IN OUT OUT VBAT10A 1 VBA2 VBA1 3NmM5 VBA1 VBA2 24NmM10 4-14-1 , Sotokanda, Chiyoda-ku, Tokyo 101

VBA-OM-P019

VBA4 28~30Nm(R1/2) OUT O Rc1/4 O A B C D E F G H I J K L M O VBA20A VBA22A 481 444 394 Rc3/8 59 VBAT20A1 VBAT20A1 216 700 520 477 429.8 180 200 100 400 Rc1/2 305 236 Rc1/2 85 VBA42A VBA20A VBA22A 531 494 444 Rc3/8 59 IN OUT VBAT38A1 VBAT20A1 252 873 570 527 479.8 205 250 150 500 Rc3/4 355 250 Rc1/2 85 VBA42A IN IN OUT OUT VBA2,4 24NmM10 1 VBA4 4-14-1 , Sotokanda, Chiyoda-ku, Tokyo 101

VBA-OM-S006

TSG R0003-2007 1.5MPa SUS304 0~75 oC 1/4 IN 3/8 O VBA1 1 SMC VBAT-V1 1 VBA11A 150 337 370 307 163 160 100 200 Rc3/8 257 60 A B C D E F G H I J K L M 278 130 39 Rc1/4 20 IN Rc3/8 Rc1/2 Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer Rc3/8 OUT (J) 170 180 120 312 411 IN (I) 4-14-1 , Sotokanda, Chiyoda-ku, Tokyo 101

VBA-OM-S007

2007 VBA2/VBA4 1.0MPa SUS304 0~75 oC 1/4 IN 1/2 1 SMC VBAT-V1 1 305 236 355 250 A B C D E F G H I J K L M 444 394 Rc3/8 59 494 444 Rc3/8 59 85 85 IN Rc1/2 Rc1/2 Rc3/4 Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer Rc1/2 Rc1/2 180 200 100 400 205 250 150 500 Rc3/4 413 OUT (J) 4-14-1 , Sotokanda, Chiyoda-ku, Tokyo 101

ZISE20C.eng

Operation light (OUT2) URL http://www.smcworld.com Brown Black White Gray Blue 5 4 3 2 1 Lever Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 OUT1 OUT2 FUNC DC(-) Lead wire (Brown) button button Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2017 SMC Corporation

ZISE20C-L.eng

Operation light (OUT2) URL https://www.smcworld.com Brown Black White Gray Blue 5 4 3 2 1 Lever Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 OUT1 NC NC DC(-) Lead wire (Brown) button button Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020 SMC Corporation

ZISE30A.eng

[F 0] Unit conversion function URL http://www.smcworld.com Unit specification Model Default setting Unit specification Model Default setting Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Nil or M ISE30A P ISE30A MPa psi ZSE30A(F) kPa ZSE30A(F) Note: Specifications are subject to change without prior notice and any obligation

ZISE10.eng

[F 6] Setting of fine adjustment of display value 0% 1000-split [F11] Setting of display resolution OFF [F80] Setting of power saving mode OFF [F81] Setting of security code URL http://www.smcworld.com OFF [F90] Setting of all functions OFF [F97] Selection of copy function Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Ver.A

ISE70_75.eng

Normally closed URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved

ZISE80.eng

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 ISE80(H) ISE80(H) MPa Nil or M P psi ZSE80(F) kPa ZSE80(F) : Insert the tube into the air-relieving port until it bottoms out. : SMC TU0425 (polyurethane, O.D 4, I.D 2.5) is a suitable tubing.

ZISE3.eng

URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved

PSxx-OMP0001E

Lead wire length Output specification CE-compliant 10 For positive pressure 3 m L Wetted part material Sensor part: Silicon, Body part: PBT, O-ring: HNBR Nil No For vacuum and residual puressure 11 Q CE-compliant Piping specification For vacuum 12 R06 6 reducer URL http://www.smcworld.com R07 1/4 reducer Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3

PSxx-OMQ0004E

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2013-2018 SMC Corporation All Rights Reserved PS-OMQ0004-B

ISA3-IOLink.eng

URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 SET 2 secs. Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All Rights Reserved PS-OMW0010

ISA2.eng

Green 1 URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 6 9 5. Apply a thickness gauge again and check that the Green turns on.

PSE5xx.eng

Sumitomo 3M OMRON Series Tyco Electronics SMC corporation PSE53# 3-1473562-4 Connector for sensor lead wire Lever PSE54# 37104-3101-000FL ZS-28-C 1-1473562-4 PSE550 XN2A-1430 For low differential pressure For low pressure For positive pressure For compound pressure For vacuum URL https://www.smcworld.com Pressure range PSE56# 1473562-4 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101