SMC Corporation of America
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Inch size 3/8" 5/16" 1/4" 5/16" 1/4" 5/32" 1/8" Flow rate l/min (ANR) 1000 680 440 480 420 210 150 INOUT Effective area mm 15.2 10.4 6.7 7.3 6.4 3.2 2.3 Note 1) Flow rate values are at a pressure of 0.5MPa and temperature of 20C.

Note 5) The DIN rail needs to be prepared by the customer.

Display unit Nil M With unit display switching function Option 1 Fixed SI unit Note) None Nil Pressure unit: psi (Initial value) With unit display switching function P Lead wire with M12 connector (5 m), straight S Note) Fixed unit: MPa L Lead wire with M12 connector (5 m), right-angled Optional Part No.

SMC VQZ1000V-85-3A connector assy, VQZ1000 VALVE, SOL 4/5-PORT*** $3.64 + Add to Quote Add To Cart Add to Cart SMC VQZ1000V-85-4A connector assy, VQZ1000 VALVE, SOL 4/5-PORT*

SMC VQZ1000V-85-3A connector assy, VQZ1000 VALVE, SOL 4/5-PORT*** $3.64 + Add to Quote Add To Cart Add to Cart SMC VQZ1000V-85-4A connector assy, VQZ1000 VALVE, SOL 4/5-PORT*

SMC VQZ1000V-85-3A connector assy, VQZ1000 VALVE, SOL 4/5-PORT*** $3.64 + Add to Quote Add To Cart Add to Cart SMC VQZ1000V-85-4A connector assy, VQZ1000 VALVE, SOL 4/5-PORT*

SMC VQZ1000V-85-3A connector assy, VQZ1000 VALVE, SOL 4/5-PORT*** $3.64 + Add to Quote Add To Cart Add to Cart SMC VQZ1000V-85-4A connector assy, VQZ1000 VALVE, SOL 4/5-PORT*

SMC VQZ1000V-85-3A connector assy, VQZ1000 VALVE, SOL 4/5-PORT*** $3.64 + Add to Quote Add To Cart Add to Cart SMC VQZ1000V-85-4A connector assy, VQZ1000 VALVE, SOL 4/5-PORT*

SMC VQZ1000V-85-3A connector assy, VQZ1000 VALVE, SOL 4/5-PORT*** $3.64 + Add to Quote Add To Cart Add to Cart SMC VQZ1000V-85-4A connector assy, VQZ1000 VALVE, SOL 4/5-PORT*

SMC VQZ1000V-85-3A connector assy, VQZ1000 VALVE, SOL 4/5-PORT*** $3.64 + Add to Quote Add To Cart Add to Cart SMC VQZ1000V-85-4A connector assy, VQZ1000 VALVE, SOL 4/5-PORT*

SMC VQZ1000V-85-3A connector assy, VQZ1000 VALVE, SOL 4/5-PORT*** $3.64 + Add to Quote Add To Cart Add to Cart SMC VQZ1000V-85-4A connector assy, VQZ1000 VALVE, SOL 4/5-PORT*

SMC VQZ1000V-85-3A connector assy, VQZ1000 VALVE, SOL 4/5-PORT*** $3.64 + Add to Quote Add To Cart Add to Cart SMC VQZ1000V-85-4A connector assy, VQZ1000 VALVE, SOL 4/5-PORT*

SMC VQZ1000V-85-3A connector assy, VQZ1000 VALVE, SOL 4/5-PORT*** $3.64 + Add to Quote Add To Cart Add to Cart SMC VQZ1000V-85-4A connector assy, VQZ1000 VALVE, SOL 4/5-PORT*

Minimum Stroke for Auto Switch Mounting [mm] Auto switch model Number of auto switches Bore size 12 (10 x 2) 16 (12 x 2) 20 (16 x 2) 25 (20 x 2) 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) D-M9V 1 5 2 5 D-M9 1 5 Note 1) 5 2 10 Note 1) 10 D-M9W 1 5 Note 2) 2 10 Note 2) 10 D-M9WV D-M9AV 1 5 Note 2) 2 10 D-M9A 1 5 Note 2) 2 10 Note 2) Note 1) Confirm that it is possible

Fan 5 to 10 years DC power supply 5 to 10 years Abnormal voltage is generated and the display goes off due to insufficient capacity of electrolytic capacitor. 167 Series HEB Specific Product Precautions 1 Be sure to read this before handling. Refer to back page 1 for Safety Instructions andback pages 2 to 5 for Temperature Control Equipment Precautions.

) 76 73 120 80 120 A 54 Finger opening port M5 x 0.8 14 Finger closing port M5 x 0.8 M5 x 0.8 M5 x 0.8 25 25 Finger closing port Finger opening port 4 x M5 x 0.8 thread depth 10 M5 x 0.8 thread depth 5 Vacuum suction port (A, B common view) +0.02 0 2 x 5 depth 10 52 Auto switch mounting groove 16h9-0.043 0 (A, B common view) 22 35.8 2 70 (76) 10 2-3 3.8 4.7 47 25.5 11.5 2 x 4.2 2 4 5-0.03

Note 3) Vacuum pilot type CE-compliant pilot solenoid valves will become VO307VD DZ-Q. 2 1 1 2 569 A VNB Series How to Order Pilot Solenoid Valves Valve size 1/2/3/4 Valve size 5/6/7 and vacuum pilot type VO307 Q 1 5 D SF4 5 D 23 Q Body option CE-compliant CE-compliant Coil rated voltage CE-compliant Nil Q Standard Vacuum pilot Nil V CE-compliant Nil Q 1 2 3 Note 1) 100 VAC 50/60 Hz 200

SET MODE SD SG RD RS-232C COM S.STOP OUT1OUT2OUT3OUT4OUT5 100 to 240 VAC 1 t 1 10 x 106 100 kHz Counting speed f = = = 10 Hz 7 10 4-4.5 33.5 104 BCD output connector 2) UP/DOWN input Input wave form conditions: At a maximum of 100 kHz, the UP/DOWN wave form should be as shown below. 1130.2 125 +12 V 10% UP pulse +12 V 10% DOWN pulse 5 sec 64 5 sec 59 5 sec 3) 15 mA when BCD is output.