m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.76

m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.76

m (99.9% filtered particle size)800Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)PolycarbonateStandardRelieving type1.38

m (99.9% filtered particle size)800Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)PolycarbonateStandardRelieving type1.38

m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateOption80.18

m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateOption80.18

m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard250.22

m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard250.22

m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard450.44

m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)450PolycarbonateStandardRelieving type0.95

m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)450PolycarbonateStandardRelieving type0.95

KR

Note) D1: Max. diameter 18.5 26.5 31 28.5 31.5 36.5 35.5 36.5 38.5 41.5 9.8 13.4 23.5 24 12 15 14.5 22.5 18.5 25 8 1 8 12.8 15.3 23.5 17 6 Applicable tubing 7.5 5.9 1 4 10 M3 x 0.5 1 8 1 4 3 8 1 4 3 8 3 8 1 2 15.5 18.5 24.5 25.5 20.5 30 11.2 16 12 15.2 17.6 28.5 8 18.5 20.5 14.3 14 20.6 27.5 19.5 20.5 29.5 30 10 27 20.3 14 18.5 20.6 31 21 22 25 32 33.5 12 20.9 25.2 34 22 17 30.8 39 Applicable

I

ON THIS PRODUCT REQUEST CATALOG REFERENCE E811 7.14 INSTRUMENTATION SERIES ZSE5/ISE5 D I M E N S I O N S S E R I E S ZSE5/ISE5 W I T H B R A C K E T F L U I D O P T I O N S Dry Air Drain-Containing Air Hydraulic Fluid (JIS-K2213) Silicon Oil (JIS-K2213) Lubricating Oil (JIS-K6301) Freon Carbon Dioxide Ammonia Argon Nitrogen Gas Chlorine Gas ACCESSORIES BRACKET Bracket ZS-22-D With Four M3

Title not found

For vacuum/compound pressure : kPa For positive pressure : MPa Setting range Set pressure range Lead wire length 100.0 to 100.0kPa 101.3 to 101.3kPa 100.0 to 100.0kPa Nil 0.6m 3m 10.0 to 101.3kPa 0.1 to 1.000MPa L 1.000 to 1.000MPa 2 High Precision Digital Pressure Switch Dimensions ZSE40(F)/ISE40 01 T1 20 30 M5 x 0.8 thread depth 5 MPa 30 20 OUT2 OUT1 SET Width across flats 2-M3 x 0.5 thread

IS3000

Thread using for the terminal is M3. Only for gasket mounting style Mounting/Piping Dimensions Caution 1. Allow the space required for maintenance. Otherwise, maintenance or pressure adjustment cannot be made, since the adjusting screw is on the top of the body. 2. Mounting is possible in either horizontal or vertical orientations. SMC Pressure Setting Indicator light Caution 1.

ZSE40/ISE40

The function then returns to the measurement mode. 16-2-22 9 Series ZSE40/ISE40 High Precision, Digital Pressure Switch Dimensions ZSE40(F)/ISE40-01 T1 20 30 M5 x 0.8 thread depth 5 MPa ZSE ISE 30 20 OUT2 OUT1 SET PSE Width across flats 12 2-M3 x 0.5 thread depth 4 6.4 Z I SE3 18.35 Atmospheric release port PS Lead wire length 600 (3000) 3.5 Z I SE1 2 Courtesy of Steven Engineering, Inc.-

VCA

Material Description M3 x 57 VCA23-VVCA20-3-1 VV2CA2-Steel Cross-recessed head machine screw (1) Valve for manifold HNBR Gasket r Aluminum Manifold base Note 1) Gasket e is included with manifold valve w. Series VCA30/40 y t r e q w Series VCA30 Series VCA40 Description No. Description No. Part no.

VXA21/22

OUT Standard specification Option Note) Water (Standard, up to 40C) Air (Standard, Dry) Turbine oil Vacuum (up to 1.3 x102 Pa) Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x101 Pa) (V, M) Non-leak (106 Pa m3/s or less) (V, M) IN N.O.

Series DXT474

Tightening torque Thread Appropriate tightening torque Nm (kgfcm) M3 M5 0.3 to 0.5 (3 to 5) 1.5 to 2 (15 to 20) Wiring 1Polarity When DC power is to be connected to a solenoid valve equipped with light and/or surge voltage suppressor, check for polarity indications.

Series VQ Metal Seal/Rubber Seal Body Ported

(With M3 thead) The quanitity of terminal blocks used depends on the number of manifold stations; Irrespective of the valves or options, the internal wiring is made double (connected to SOL. A and SOL. B) for respective stations of the manifold. The optional specification permits mixture of single and double wiring. See p.1.10-67 for details.