Cooling capacities: 2kW, 4kW, 8kW, 10kW; Circulating Fluid: tap water or DI water; Temperature range setting: 10 to 60°C; Temperature stability: ±0.1°C; Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz; Standards: CE, UL, RoHS, SEMI S2, S8, F47

Cooling capacities: 9.5 kW, 14.5 kW, 20.5 kW, 38 kW; Temperature range setting: 5 to 35°C; Temperature stability: ±0.1°C (10, 15, 38 kW); ±0.1°C (20 kW); Power supply requirement: 3ph 380~415 VAC 50/60Hz, 3ph 460~480 VAC 60Hz; Waterproof specification: IPX4; Refrigerant: R410A (HFC); Circulating fluid: Tap or deionized water, or 15% ethylene glycol solution

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: 15 μin. (0.4 μm), Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal, Male), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male), Gauge Port, Inlet:

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: 15 μin. (0.4 μm), Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: FV4 (1/4 Inch Face Seal, Female), Gauge Port, Inlet

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: 15 μin. (0.4 μm), Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal, Male), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male), Gauge Port, Inlet:

Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: M [10 μin. (0.25 μm)], Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: TW4 (1/4 Inch Tube Weld), Connections, Outlet: TW4 (1/4 Inch Tube Weld), Gauge Port, Inlet: No Gauge Port, Gauge

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: X [5 μin. (0.13 μm)], Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male), Gauge Port, Inlet: No

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: X [5 μin. (0.13 μm)], Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal, Male), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male), Gauge Port, Inlet: No Gauge

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: 15 μin. (0.4 μm), Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV8 (1/2 Inch Face Seal, Female), Connections, Outlet: MV8 (1/2 Inch Face Seal, Male), Gauge Port, Inlet

Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: M [10 μin. (0.25 μm)], Ports: 4PW [4 Ports (1-In; 2-Out; 3-Gauge Port In; 4-Gauge Port Out)], Connections, Inlet: FV8 (1/2 Inch Face Seal, Female), Connections, Outlet: FV8 (1/2 Inch Face

D(mm): 9.53, Tube I.D. d(mm): 6.33, Maximum operating pressure(MPa): 1.5 (at 20°C), Operating Temperature(°C): Maximum operating temperature: 260°C, Length(m): 20

D(mm): 9.53, Tube I.D. d(mm): 6.33, Maximum operating pressure(MPa): 1.5 (at 20°C), Operating Temperature(°C): Maximum operating temperature: 260°C, Length(m): 20

D(mm): 9.53, Tube I.D. d(mm): 6.33, Maximum operating pressure(MPa): 1.5 (at 20°C), Operating Temperature(°C): Maximum operating temperature: 260°C, Length(m): 2

D(mm): 9.53, Tube I.D. d(mm): 6.33, Maximum operating pressure(MPa): 1.5 (at 20°C), Operating Temperature(°C): Maximum operating temperature: 260°C, Length(m): 16

D(mm): 9.53, Tube I.D. d(mm): 6.33, Maximum operating pressure(MPa): 1.5 (at 20°C), Operating Temperature(°C): Maximum operating temperature: 260°C, Length(m): 20

D(mm): 9.53, Tube I.D. d(mm): 6.33, Maximum operating pressure(MPa): 1.5 (at 20°C), Operating Temperature(°C): Maximum operating temperature: 260°C, Length(m): 33

D(mm): 9.53, Tube I.D. d(mm): 6.33, Maximum operating pressure(MPa): 1.5 (at 20°C), Operating Temperature(°C): Maximum operating temperature: 260°C, Length(m): 50

D(mm): 9.53, Tube I.D. d(mm): 6.33, Maximum operating pressure(MPa): 1.5 (at 20°C), Operating Temperature(°C): Maximum operating temperature: 260°C, Length(m): 100

D(mm): 9.53, Tube I.D. d(mm): 6.33, Maximum operating pressure(MPa): 1.5 (at 20°C), Operating Temperature(°C): Maximum operating temperature: 260°C, Length(m): 20

D(mm): 12.7, Tube I.D. d(mm): 9.5, Maximum operating pressure(MPa): 1 (at 20°C), Operating Temperature(°C): Maximum operating temperature: 260°C, Length(m): 20