Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: M [10 μin. (0.25 μm)], Range Options: Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: FV4 (1/4 Inch Face Seal, Female
Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: M [10 μin. (0.25 μm)], Range Options: A (Sub-atmospheric), Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: FV4 (1/4 Inch Face
Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: M [10 μin. (0.25 μm)], Range Options: A (Sub-atmospheric), Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: TW4 (1/4 Inch Tube Weld), Connections, Outlet: TW4 (1/4 Inch Tube Weld),
Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: V [7 μin. (0.18 μm)], Range Options: Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal, Male), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male),
Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SH (Body: 316 SS; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Range Options: Standard, Ports: 5PC [5 Ports (1-In; 2-Out; 3-Extra Bottom Port Out; 4-Gauge Port In, 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom
Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SH (Body: 316 SS; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Range Options: Standard, Ports: 5PC [5 Ports (1-In; 2-Out; 3-Extra Bottom Port Out; 4-Gauge Port In, 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom
Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: M [10 μin. (0.25 μm)], Ports: 3PW [3 Ports (1-In; 2-Out; 4-Gauge Port Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: FV4 (1/4 Inch Face Seal, Female), Gauge Port, Inlet: V3 [-30 in.Hg to 30 psig (-0.1 to 0.2 MPa
Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: M [10 μin. (0.25 μm)], Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal, Male), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male), Gauge Port, Inlet: No Gauge Port, Gauge Port, Outlet: No Gauge Port, Pressure Gauge
Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: M [10 μin. (0.25 μm)], Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: FV4 (1/4 Inch Face Seal, Female), Gauge Port, Inlet: No Gauge Port, Gauge Port, Outlet: No Gauge Port, Pressure
5 is attached. 1045 AL800/900 Series Dimensions Semi-standard AL800/900 Metal bowl Metal bowl Port size D A B B B C B Maintenance space E IN OUT Metal bowl with level gauge With drain cock Semi-standard/Dimensions B Model Metal bowl Metal bowl with level gauge AL800 AL900 Model Port size With drain cock 297 303 306 312 D A B C E AL800 AL900 286 292 125 125 1 , 1 2 100 100 286 292 59 63 1
.· Inlet air temperature: 35°C (22E, 37E) / 40°C (55E, 75E).· Outlet air pressure dew point: 10°C.
Cooling capacity: 300 W, 500 W, 750 W ; Temperature range setting: 10 to 60°C ; Temperature stability: ±0.1°C ; Power supply requirement: single phase 180 ~ 242 VAC, 50/60Hz ; Circulating fluid: Various liquid chemicals, see catalog (fluororesin compatible) ; Standards: Ce, SEMI S2-0706, F47-0706, RoHS
Cooling capacities: 2kW, 4kW, 8kW, 10kW; Circulating Fluid: tap water or DI water; Temperature range setting: 10 to 60°C; Temperature stability: ±0.1°C; Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz; Standards: CE, UL, RoHS, SEMI S2, S8, F47
Cooling capacities: 9.5 kW, 14.5 kW, 20.5 kW (60Hz); Temperature range setting: 5 to 35°C; Temperature stability: ±0.1°C (10, 15 kW); ±1.0°C (20 kW); Power supply requirement: 3ph 380~415 VAC 50/60Hz, 3ph 460~480 VAC 60Hz; Waterproof specification: IPX4; Refrigerant: R410A (HFC); Circulating fluid: Tap or deionized water, or 15% ethylene glycol solution
Cooling capacities: 9.5 kW, 14.5 kW, 20.5 kW, 38 kW; Temperature range setting: 5 to 35°C; Temperature stability: ±0.1°C (10, 15, 38 kW); ±0.1°C (20 kW); Power supply requirement: 3ph 380~415 VAC 50/60Hz, 3ph 460~480 VAC 60Hz; Waterproof specification: IPX4; Refrigerant: R410A (HFC); Circulating fluid: Tap or deionized water, or 15% ethylene glycol solution
Series IDF can accommodate an inlet temperature of 40°C. Corrosion resistance is improved by using a stainless steel, plate type heat exchanger. 50/60 Hz operation ; Max. inlet air temperature: 50°C / 122°F ; Available in flow rating up to 12.4 m³/min (ANR) 438 scfm (@10°C / 50°F PDP) ; Connections: R/Rc threads are standard; NPT adapters are available
EC Directive compliant (with CE marking) for use in Europe, Asia and Oceania ; 50 Hz operation ; Max. inlet air temperature: 50°C / 122°F ; Available in flow rating up to 822 m³/hr (ANR) / 484 scfm (@10°C / 50°F PDP) ; Connections: R/Rc threads are standard; NPT adapters are available
Series IDF can accommodate an inlet temperature of 40°C. Corrosion resistance is improved by using a stainless steel, plate type heat exchanger. 50/60 Hz operation; Max. inlet air temperature: 50°C / 122°F; Water cooled condenser ; Available in flow rating of 65 m³/min (ANR) / 2295 scfm (@10°C / 50°F PDP) ; Connections: JIS flanges
Cooling capacity: 300 W, 500 W, 750 W ; Temperature range setting: 10 to 60°C ; Temperature stability: ±0.1°C ; Power supply requirement: single phase 180 ~ 242 VAC, 50/60Hz ; Circulating fluid: Various liquid chemicals, see catalog (fluororesin compatible) ; Standards: Ce, SEMI S2-0706, F47-0706, RoHS
Cooling capacities: 9.5 kW, 14.5 kW, 20.5 kW (60Hz); Temperature range setting: 5 to 35°C; Temperature stability: ±0.1°C (10, 15 kW); ±1.0°C (20 kW); Power supply requirement: 3ph 380~415 VAC 50/60Hz, 3ph 460~480 VAC 60Hz; Waterproof specification: IPX4; Refrigerant: R410A (HFC); Circulating fluid: Tap or deionized water, or 15% ethylene glycol solution