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7 CS1 !8 !

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

8 @2 @0 @3 @5 @8 @7 o u !7 t CY3R15, 20 CY3R15 Parts list No. Description No.

EXxx-OMW0014CN

SI (24V) (XD1) (24V) (XD2) M4 (SCRJ) 1 (XF1) (SCRJ) 2 (XF2) . 6-5 EX245-SPN1A 43 No.EX-OMW0014CN-A (24V) (XD1) (24V) (XD2) M4 (RJ45) 1 (XF1) (RJ45) 2 (XF2) . 6-6 EX245-SPN2A 44 No.EX-OMW0014CN-A 7/8 (5 ,) (XD1) 7/8 (5 ,) (XD2) M4 M12 (4 ,,D code) 1 (XF1) M12 (4 ,,D code) 2 (XF2) . 6-7 EX245-SPN3A 45 No.EX-OMW0014CN-A 7.

Air Slide Table Series MXS

7 q !1 !0 !6 !2 !3 !

Integrated Controller

Motor Model Selection EQFS H Series EQY H Series Auto Switch Electric Specifications Wiring Examples Operation Data Setting Options Specific Product Precautions EQFS40H (170) 6 H9 (+0.030 0 ) depth 7 106 60 4 x M8 x 1.25 thread depth 13 30 Body mounting reference plane (B dimension range)1 58 6 H9 (+0.030 0 ) depth 7 7 74 Stroke A + Stroke (Table traveling distance)2 L + Stroke (16) (90)

SMC Wireless System PROFINET compatible

Power Supply Cable with 7/8 Inch Connector/Power Supply Connector Straight connector type Angle connector type Socket connector pin arrangement 7/8 inch (Mini style) -126No.EX-OMW0006-D Field wireable connector Plug connector Socket connector pin arrangement pin arrangement 7/8 inch 7/8 inch (Mini style) (Mini style) Applicable Cable Terminal No.

Fieldbus system PROFINET compatible SI Unit

Power connectors Pin Remarks 1 24 V (US1) 2 0 V (US1) 3 24 V (US2) 4 0 V (US2) 5 FE View of Push Pull connector (XD1/XD2) Fig. 3-6 Pin allocation of Push Pull connector (24 Volt) for EX245-SPN1A/SPN2A Pin Remarks 1 0 V (US2) 2 0 V (US1) 3 FE 4 24 V (US1) 5 24 V (US2) View of 7/8 inch 5 pins plug connector (XD1) View of 7/8 inch 5 pins socket connector (XD2) Fig. 3-7 Pin allocation of 7/8

rep-modular-e

5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Modular Pressure Control Equipment F.R.L. Replacement Procedure

5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

MG

7 !8 !

CG5-S

0.040 0.076 0.040 0.076 0.040 0.076 0.050 0.093 0.050 0.093 0.065 0.117 0.065 0.117 20 8 132 141 7 9 2 14 30 27.6 21 3 56.5 42 30 153 CG-E020SUS 9 83 13 25 8 137 146 7 9 2 14 30 27.6 21 3 56.5 42 30 158 CG-E020SUS 9 83 13 32 10 141 7 11 4 22 40 38.4 29 4 70.5 56 40 170 152 CG-E032SUS 11 85 15 40 10 159 7 11 4 22 40 38.4 29 4 70.5 56 40 188 170 CG-E032SUS 11 93 15 50 14 189 12 15 5 25 50

Fieldbus system PROFIBUS DP compatible SI unit

Content 0 to 5 09h: The number of bytes of the unit diagnosis information (fixed to 9 bytes). 6 (This bit is fixed to 1) 7 (This bit is fixed to 0) Unit 0 to 7 7 6 5 4 3 2 1 0 Byte 20 Bit No.

Air Slide Table

M6 x 0.75 28.5 4 8 9 19 12 6 MXQR-BS6 1.4 MXQR-BS8 MXQR 8 M3 x 12 14.6 12 12 M3 x 12 16.6 8 M8 x 1 40.8 5 12.5 14 24.5 20 7 7 MXQR-JS8 1.4 6 MXQR-BS12 MXQR12 M4 x 12 18.5 13 12 M4 x 12 20.5 11 M8 x 1 40.8 11 14 29 18 9.5 7 5 MXQR-JS12 1.4 7 46.7 MXQR-BS16 MXQR16 M5 x 16 21 16 13.5 14 M10 x 1 M5 x 16 23 13.5 17 36 11 22 9 6 45.3 MXQR-JS16 11 67.3 MXQR-BS20 MXQR20 M6 x 20 25 22 17 19 M14 x

SMC Pneumatic Clean Series

7 6 6 LD 4 4 4 4 LC 3 3 3 3 LT 30 25 22 20 LH 51 53 53 53 LS Z 135 125.5 123.5 118 ZZ 16.5 16 15 15 X 8.5 8 7 7 Y 4 3.5 3.5 3 M B 54 44 36 32 LX 10 10 10 10 W 71 58 49 44 LZ Bore size 63.5 53 52 47 54.5 45 38.5 34 40 32 25 20 50 63 80 100 4.5 4.5 4.5 6 17.5 17.5 20 20 75.5 75.5 95 95 157.5 157.5 188.5 192 55 55 60 60 10 12 11 14 5 5 6 6 40 45 55 65 22 22 28.5 30 11 13 14 16 5 5 5 7 66 82

HEC_W-E

PREPARATION FOR OPERATION -7-1 7.1 PIPING -7-1 7.1.1 PREPARATION FOR RADIATING WATER -7-1 7.1.2 PREPARATION FOR RECIRCULATING FLUID -7-2 7.2 WIRING -7-3 7.2.1 POWER SUPPLY -7-3 7.2.2 CIRCUIT BREAKER -7-3 7.2.3 GROUNDING -7-3 7.2.4 AVOIDANCE OF PARALLEL WIRING -7-3 7.2.5 CONNECTION OF VARIOUS CONNECTORS AND POWER SUPPLU CABLE -7-3 7.3 SUPPLY OF RECIRCULATING FLUID -7-4 7.4 CHECK REPAIR -7-

10

7 !9 !1 !4 !0 !3!8 !6 !5 12-2 12-1 7-2 7-1 1-2 1-1 1-1 Width across flats Rod view 32 (2:1) Component Parts No.

MNB

4 @3 #3 #5 t @7 $5 !5 @4 !8 @0 !7 !9 i @2 q r y #0 $0 $2 w A C B A section $1 !2 !2 $6 !0 u @5 !6 @1 !1 $7 o $8 #4 @6 #9 @8 #6 #7 e $4 B section C section #1 #2 !2 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Component Parts No. Description Material Note No.

MGP

7 7 7 8 8 6 7 8.5 9 11 11 14 16 MGPL (ball bushing)/Dimensions A, E, HT (mm) A E HT Bore size (mm) Over 100st to 200st 114 114.5 Over 100st to 200st 51 51 Over 30st to 100st 90 95.5 Over 30st to 100st 27 32 Over 200st 132 132 30st or less 73 79.5 30st or less 10 16 Over 200st 69 68.5 80 93 20 25 By-pass port size for guide rod with bottom mount A E HT MGPM (slide bearing)/Dimensions A, E

Pin Clamp Cylinder Series CKQ/CLKQ

7 @5 #8 #6 #4 @6 @7 @8 @4 Auto switch $1 #5 #9 #8 #2 @3 !9 $0 $2 !1 !8 !6 #7 !0 @9 A @0 !5 A !

MNB

4 @3 #3 #5 t @7 $5 !5 @4 !8 @0 !7 !9 i @2 q r y #0 $0 $2 w A C B A section $1 !2 !2 $6 !0 u @5 !6 @1 !1 $7 o $8 #4 @6 #9 @8 #6 #7 e $4 B section C section #1 #2 !