ø6, ø8, ø12, ø16, ø20, ø25 Series MXQR Air Slide Table/Reversible Type

,12 V 12 V Reed auto switch Solid state auto switch Relay, PLC Grommet 24 V IC circuit 5 V,12 V Diagnostic indication (2-color indication) 12 V A96V A96 5 V IC circuit Relay, PLC Grommet A93V A90V A93 A90 IC circuit 100 V 2-wire 24 V 12 V 100 V or less Solid state auto switches marked with are produced upon receipt of order.

Series MY3A/3B Mechanically Jointed Rodless Cylinder/Basic Type ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

V 12 V Relay, PLC Grommet 24 V Yes IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 12 V 3-wire (NPN equiv.)

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40

24 V 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color indication) 5 V, 12 V 12 V 2-wire 3-wire (NPN equivalent) IC circuit A96V A96 5 V Grommet A93V A90V A93 A90 100 V IC circuit Relay, PLC 2-wire 12 V 24 V 100 V or less Solid state auto switches marked with are produced upon receipt of order.

Air Slide Table Series MXS

5 V, 12 V 12 V Reed switch Solid state switch Relay, PLC Yes Grommet 24 V 5 V, 12 V Diagnostic indication (2-color indication) 12 V A96V A96 5 V Yes (NPN equivalent) Relay, PLC 24 V Grommet A93V A90V A93 A90 100 V 12 V 2-wire No 100 V or less Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches

MXQ

5 V,12 V 12 V Relay, PLC Grommet 24 V IC circuit 5 V,12 V Diagnostic indication (2-color indication) 12 V 3-wire (NPN equivalent) A96V A96 5 V IC circuit Grommet Relay, PLC A93V A90V A93 A90 IC circuit 100 V 24 V 12 V 2-wire 100 V or less Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches

EXxx-OMC0002

Setup the node address and HOLD/CLEAR using the internal switches. 3 Communication power terminals (BS+, BS-) Connect the communication power supply BS+ and BS-. 4 Communication terminals (BDH, BDL) Connect the communication lines BDH and BDL. 5 FG terminal Connect the grounding cable. 6 Power supply terminals for solenoid valve (24 V, 0 V) Connect the power supply 24 V and 0 V for solenoid

VNC/VNH Series

fluid velocity (m/s) v: fluid velocity (m/s) v: fluid velocity (m/s) v: fluid velocity (m/s) Q: flow rate (l/min) Q: flow rate (l/min) Q: flow rate (l/min) Q: flow rate (l/min) d: int d: int d: int d: internal diameter of pipe (mm) ernal diameter of pipe (mm) ernal diameter of pipe (mm) ernal diameter of pipe (mm) 8 VN-OMM0001-C Troubleshooting Seek the same trouble from the following table

Large blow and

Fluid passage dia.: P R J K 2 x L H I O 4 x Sa Thread depth Sb G M N A D F Vacuum flow Dust bag When dust bag is mounted E T Suction air Suction air Discharge air B C C U Hose band V Note 1) (mm) A 158 B 70 C 50 D 20 E F 24.5 G 60.5 H 5 I 70 J 60 K 5.5 L 72 M 37 N 2 O 30 P Rc1/4 Q R 59 Sa Sb T 500 U 250 V 310 Model ZH30--X185 ZH40--X185 28.5 146.5 M4 x 0.7 10 203 90 64 25 27.2 33.5 196.8

KA

(mm) Applicable fitting size d 3.2 L Weight (g) D A M Model Urethane Soft nylon Applicable tubing KAR23-04 9.6 4 33.5 34.5 36.5 18.5 18.5 17.5 18 15.5 3.4 2.9 2.0 1.8 5 KAR04-06 KAR04-08 5.6 5.6 6 8 10.4 4 16 12.8 KAR04-10 39.5 37 39.5 10 3.3 2.5 KAR06-08 8 18.5 KAR06-10 6 12.8 KAR06-12 42 4.7 12 20 17 10 3.0 13.1 13.1 Applicable fitting size d 8 KAR08-10 41 4.0 18.0 18.0 10 20 18.5 15.2

IDX-OM-W023

-5 13 3 IDX-OM-W023 13 T IDU15E1-10-T IDU15E1-20/23-T PE 1 3 2 N L N L PE 1 2 3 TB TB MC TDR MC TDR ILS ILS MC TDR MC TDR PTC OLR MC PTC MC OLR CM CM MC C01 C02 MC CR C11 FM1 CR C11 PRS FM1 PRS P C12 FM2 P C12 TDR MC FM2 TDR MC IDU Series 13-5 13 4 IDX-OM-W023 14 V 14 V V IDU8E15E1-23 14-1 1. 1 2 2. 3.

High Vacuum L Type Valve

As this product has pressure balanced construction, the exhausting direction is free. 8 XL*-OMI0013-B 5.Dimensions 26 41 K J 72 53010 OPERATION INPUT K J V L C B 39 C B 69 XLS-**-P*G (with control power supply) XLS-**-P*G () L G1/2 D XLS-**-** (without control power supply) DIN terminal (D) DIN( D ) XLS-**-** () E D F K2 J L 27010 J M 29010 J K 33 25 G1/2 G1/2 C G C C B B B A A Terminal (

I/O Configurator (NFC version)

Unit No. : Refer to the "Unit address order" of (A) Master unit setting (page 22) or (A) Slave unit setting (page 38) for IO mapping position. -51No.EX-OMV0017-B (d).

I/O Configurator (NFC version)

Unit No. : Refer to the "Unit address order" of (A) Master unit setting (page 22) or (A) Slave unit setting (page 38) for IO mapping position. -51No.EX-OMV0017-A (d).

IDX-OM-W014

14 V V IDU3E/4E/6E-23 14-1 1.1 2 2. 3.

ZSE40/ISE40

Switching of the mode and set value Z I SE3 SET button Switches to each mode and fixes the set value.

Compact Pressure Switch Series ZSE1 (For Vacuum)/ISE1 (For Positive Pressure)

I Z Hysteresis setting trimmer Pressure setting trimmer Hysteresis setting trimmer Pressure setting trimmer SET HYS SET HYS L L H H L L H H 15 15 Indicator light (Red) Indicator light (Red) 23 23 SE1-01-16C/-17C SE1-01-16/-17 I Z I Z Pressure setting trimmer 2 Pressure setting trimmer 1 Pressure setting trimmer 2 Pressure setting trimmer 1 SET1 SET2 L L H H 15 SET1 SET2 L L H H 15 Indicator

Compact Cylinder with Linear Guide MXZ Series ø 12, ø 16, ø 20, ø 25

Indicator light Load voltage Auto switch model Lead wire length [m] Pre-wired connector Applicable load DC AC Perpendicular In-line 0.5 (Nil) 1 (M) 3 (L) 5 (Z) Type Special function Electrical entry Wiring (Output) M9NV M9N IC circuit 3-wire (NPN) 5 V, 12 V Solid state auto switch 3-wire (PNP) M9PV M9P 2-wire 12 V M9BV M9B 3-wire (NPN) 5 V, 12 V M9NWV M9NW IC circuit 3-wire (PNP) M9PWV M9PW

IDX-OM-W013

IDX-OM-W013-C PRODUCT NAME Refrigerated Air Dryer MODEL / Series IDU3E-10(-C,K,L,M,R,S,T) IDU3E-20(-C,K,L,M,R,T) IDU4E-10(-C,K,L,M,R,S,T) IDU4E-20(-C,K,L,M,R,T) IDU6E-10(-C,K,L,M,R,S,T) IDU6E-20(-C,K,L,M,R,T) IDU3E-23(-C,K,L,R,T,V) IDU4E-23(-C,K,L,R,T,V) IDU6E-23(-C,K,L,R,T,V) This manual is intended to explain the installation and operation of the product.

XL-OMY0002

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114

Lock unit

Chamfer Chamfer (1) For male thread (2) For female thread 30 30 D-2 D-2 D D Fig. 2 Rod end style Do not apply excessive lateral load or external force to the lock unit. They may break the lock unit. Do not use the product in applications where the rod rotates. Do not apply loads with impact, strong vibration or rotational forces while the lock mechanism is activated.