Series MXQ Air Slide Table

Type 94 Air Slide Table Series MXQ Dimensions MXQ 6L/Symmetric Type 95 Series MXQ Air Slide Table Dimensions MXQ 8 96 Air Slide Table Series MXQ Dimensions MXQ 8 97 Series MXQ Air Slide Table Dimensions MXQ 8L/Symmetric Type 98 Air Slide Table Series MXQ Dimensions MXQ 8L/Symmetric Type 99 Series MXQ Air Slide Table Dimensions MXQ 12 100 Air Slide Table Series MXQ Dimensions MXQ 12 101

Air Cylinder NCY2 Series Magnetically Coupled Rodless Cylinder

Series NCY2S Model Specifications l MPa=10.1972k9flc Prool pressure 152 psi 101 psi Ambient and fluid 14-140'F {-10-+60'C 2-1 6 irvsec {50-400mm/s} Cushion Urethane cushion at both sides Lubrication Nonlube Stroke tolerance 0-9.9st:rb**, 1 0-39.4st:1b*, 39.sst-:l Horizontal r Whon senjng an aulo swiich (in case ol NCDY2S) ailhe intsrmodials poilion, th6 d6lctable max. pislon sPeed is subjct

Sine Rodless Cylinder Series REBR Direct Mount Type

C D 15 (mm) Auto switch model A D-F9 B C D D-A9 D-F9 D-A9 D-F9 D-A9 D-F9 Bore size (mm) 17.5 15 D-A9 21.5 76.5 72.5 56.5 60.5 Note) Auto switches cannot be installed in Area C in the case of 15. 25, 32 (mm) A D-Y5 D-Y7 D-Y7W B C D Auto switch model D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 Bore size (mm) 25 22 101 103 47 47 78 78 22 32 30.5

Multistage Ejector Series ZL

(full span) Class 3 Port exhaust 0 to 50C Housing: Polycarbonate/ABS resin Symbol Standard P V 2 Multistage Ejector Series ZL Option Specifications Digital vacuum pressure switch specifications With digital vacuum pressure switch (ZSE4) ZSE4-00--X105 ZSE4B-00--X105 ZSE4E-00--X105 Part number Display Pressure setting range Maximum operating pressure LCD LED LCD with back light 101 to 10KPa

AC Servo Motor Driver (Pulse input type)

./2017 6th printing 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2017 SMC Corporation All Rights Reserved 69 -

AC Servo Motor Driver (MECHATROLINK-II type)

./2017 4th printing 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2014-2018 SMC Corporation All Rights Reserved 43 -

AC Servo Motor Driver (MECHATROLINK-III type)

./2017 4th printing 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2014-2017 SMC Corporation All Rights Reserved 42 -

JXCx-OMU0022

. -6- Revision history First edition: February 2017 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2017 SMC Corporation All Rights Reserved

SFOD-OMT0012

SFOD-OMT0012 First edition: September 2015 A: Contents revised in several places: March 2016 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015-2016 SMC Corporation All Rights Reserved No.SFOD-OMT0012

SFOD-OMT0011CN

SFOD-OMT0011 2015 7 2016 3 A 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015-2016 SMC Corporation All Rights Reserved No.SFOD-OMT0011CN-A

Controller setting Software (ACT Controller)

. -29JXC-OMU0010-A Revision history : First edition [Oct 2016] A : Contets revised in sevrral places [Mar 2020] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2016-2020 SMC Corporation All Rights Reserved

AC Servo Motor Driver (Parameter Configuration using Setup software (MR Configurator2 TM ))

./2015 2nd printing 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015 SMC Corporation All Rights Reserved 13 -

AC Servo Motor Driver (Parameter Configuration using Setup software (SigmaWin+ TM ))

For the saving parameters from SigmaWin+ to file destination, refer to Section 4.4. 4 6 5 7 19 - Revision history No.LEC-OM09601 Sep/2015 1st printing 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

LA-OMT0056

Otherwise, it may lead to a Return to Origin error. 20 - Revision history 1st printing: Revised in November 2015 A: Revised in November 2019 B: Revised in June 2020 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL: https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the

OMR0031

connected to the Select the COM port to which the communication COM port which has been communication cable is connected using the configuration software. cable is connected selected in the configuration is wrong. software. 95 - Revision history A: Revised in November 2015 B: Revised in November 2019 C: Revised in June 2020 D: Revised in January 2022 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

Card Motor Controller Controller Setting Software for LATCA （ For Windows®7 ）

Refer to SMC website for version update information. https://www.smcworld.com/ 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL: https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

Card Motor Controller Controller Setting Software for LATCA (For Windows®8.1)

Refer to SMC website for version update information. https://www.smcworld.com/ 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL: https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

Card Motor Controller Controller Setting Software for LATCA （ For Window ®10 ）

Refer to SMC website for version update information. https://www.smcworld.com/ 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL: https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

ZK2-C

500 kPa 0.1 kPa DC24 V 10(p-p)10() 40 mA NPN PNP OUT1OUT2 80 mA DC26.4 V 2 V (80 mA ) 2.5 ms (20,100,500,1000,2000 ms ) 0.2F.S. 1 digit 1 0 3 1/2 7 LED 2% F.S.1 digit(253 ) ON OUT1 OUT2 IP40 550 AC1000 V 1 50M (DC500 V ) 2F.S.550 25 5 3.52 m 0.15 mm2(AWG26) 1.0 mm CE RoHS 1 -52NO.ZK2-OM00801-B Revision history A: OUT2 B: 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

Digital pressure switch for energy-saving control ejector

3.5, 2 m Lead wire Sectional area of conductor: 0.15 mm2 (AWG26) Outside diameter of insulator: 1.0 mm Standard CE/UKCA marking, RoHS A 1: If the applied pressure fluctuates around the set value, the hysteresis must be set to a value more than the amount of fluctuation or chattering will occur -54NO.ZL3-OM00701-A Revision history A UKCA marking added 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101