Compact Cylinder/Guide Rod Type Series CQM

Standard without auto switch: 12 and 16; 5 stroke, 20; 5 to 15 stroke, 25; 5 and 10 stroke, Built-in magnet with auto switch: 20; 5 stroke 798 Compact Cylinder: Guide Rod Type Series CQM Dimensions 32 to 50 2 x HA through 2 x HB through Auto switch 2 x P V KA F Q 2 xN through 2 x 2 x OB counterbore with depth RB IB IA EC EB EA M Z (KB) KA M B + Stroke W L J EA EB EC A + Stroke CUJ CU 2 x

Digital Flow Switch (Integrated display type)

J: Contents are added. K: Contents are added. L: Contents revised in several places. M: Contents revised in several places.[March 2017] N: Contents revised in several places.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

L G ZA F H K J ZX I B C E D A ZR ZM 2 x M3 countersunk head screw mounting hole ZMA ZQ ZH ZU ZFC10, 20 ZL Applicable tubing O.D.

Free Mount Cylinder for Vacuum Series ZCUK

Port size A Stroke range (mm) 5 to 30 A' B C d D E F FK FL FY 16.5 Note 1) GA GC Model Air port Vacuum port M5 x 0.8 M5 x 0.8 M5 x 0.8 ZC(D)UKC16 ZC(D)UKC20 ZC(D)UKC25 1/8 19.5 5 to 50 22 40 62 5 12 11 12 24 29 51.5 23 34.5 ZC(D)UKC32 1/8 1/8 M5 x 0.8 1/8 11 12.5 20 32 2 6 7 8 13 17 28 31 12 5 to 50 14 18 26 32 40 50 3 4 8 10 9 10 8 10 16 20 20 22 33 43.5 19 21.5 33.5 34 15.5 5 to 50 H J

Compact Vacuum Unit

. + 41 g = 266 g ) 4 Series ZB Ejector Exhaust Characteristics/Flow-rate Characteristics K J Nozzle Size 0.3 mm Supply Valve, Large Flow Type (N.C.)

Compact Cylinder with Lock Series CLQ

Type A mounting bracket part numberYA-03 JointYU-03 2 x O depth of counterbore Material: Stainless steel (mm) Bore size (mm) B D E J M O Part no.

Compact Guide Cylinder Series MGQ

(Refer to page 338.) 348 Compact Guide Cylinder Series MGQ Bore Size 32 to 100: MGQM, MGQL 4 x YY depth YL X W + Stroke Z 4 x MM depth ML 4 x NN through 2 x P DB DA R H V T PW GB GA 2 L F C + Stroke G TB TA S Q K J B + Stroke E MGJ A + Stroke MGP MGQM, MGQL Common Dimensions (mm) P PW Bore size (mm) 32 40 50 63 80 100 Standard stroke (mm) B MGQ C DA F G GA GB H J K L MM ML NN Q R S TN TF

AF800/900

(Ex.) 68 Note 4) Symbols 9, D, J can not be specified at the same time. (Ex.) 9-D-J Note 5) For products with auto-drain, either symbol D or J cannot be specified at the same time because of female threads (3/8 or 1/8), for connection to drain piping.

ARM10/11

AV SMC K P C U O S L H AU 5 3 AF A-A A 2 6 AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IR A 4 VEX 8 F AMR E D ITV H 10 B IC 11 VBA 7 1 SMC VE C J VY1 A G 9 PPA G AL Component Parts Replacement Parts No. Material Part no. No.

Booster Regulator Series VBA1110 to 4200 1

K J H G F E D C B A 475 432 512 472 525 482 562 522 L Booster part no. Tank model VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 394 Rc 3/8 VBAT20 VBAT20S 305 206 674 180 200 100 400 Rc 1/2 430 Rc 1/2 444 Rc 3/8 VBAT38 VBAT38S 355 256 824 205 250 150 500 Rc 3/4 480 Rc 1/2 14-9-9

Model Selection 1

Fluid Name and Option Option symbol and body material Fluid (Application) Brass B Stainless steel J J H H Q P M H M M P Ethyl alcohol Caustic soda (25% ) Gas oil Silicon oil Steam system (Steam) (Max. 183C) Steam system (Condensation) (Max. 99C) Medium vacuum (up to 0.1 Pa.abs) Parachloroethylene Helium Non-leak (10 6Pam 3/s) Heated water (Max. 99C) A A S E V A V V E Note 1) The leakage

VCL

(mm) A B C D E F G H J L Port size Bracket part no.

VCS

Stainless Steel (mm) A B C D E F G H J L Bracket part no.

70pvvna

170 28.3 33.3 LVH Port size 32A, 40A, 50A LVD LVQ Applicable cable O.D. 6 to 8 (D, DL) LQ LVN K (Terminal with indicator light: DL) TI/ TIL Manual override (Non-locking) Pilot port L (Conduit terminal: T) PA J (DIN terminal: D) I (Conduit: C) H (Grommet: G) PAX G (Air operated) PB Main port Main port Rc Pilot port Rc A B C D E F G H I J K L M Model VNA5-32A VNA6-40A VNA7-50A 1 8 1 4 1 4 1

SZ3000

D Side U Side C Switch specifications w How to Order Valves Nil J Without switch With switch Enter the symbols for the required specifications in the blanks below.

Series VCL

J L Bracket part no.

Series VCS

Standard 1 2 3 4 5 6 7 Stainless steel Clip Stainless steel, Cu Tube assembly Class H Coil assembly Stainless steel, PTFE (FKM) Armature assembly PTFE (FKM) Seal Stainless steel Return spring Brass Body Dimensions (mm)/Bracket 1in = 25.4mm A J 4-G C 1.5 B D E L 4-H Valve mounting hole F Bracket mounting dimensions (mm) B C D E F G H J L A Bracket part no.

ZPT/ZPX

How to Order B01 H N 40 25 ZPT A18 J Pad diameter (mm) Mounting thread 40 50 40 50 A18 A22 M18 x 1.5 (40 to 80) M22 x 1.5 (100, 125) 63 63 Vacuum entry 80 80 100 100 B01 Rc 1 8 125 125 Buffer stroke (Rotating) Pad type H Heavy duty Stroke 40 50 63 80 100 125 50 25 Material 75 100 N S NBR Silicon rubber Spring Force U Urethane rubber 40 to 80 Pad diameter 100, 125 F Fluoro rubber E EPR 6.9

-- NCM seies

-r I tt""d lii9;--1@_*_1aru" l . 6 l y ' | t Fiif_ilri v *r T f l l T r I L---+---J-J--fo O Series NCM Auto Switeh Mounting Position aAuto $vidr Placemer* dr|lsidrs D-85, 86 Type Front Nose Mounting type Auto switch Auta Swifuh Pkrcement Dfinensions 0.97 1.03 1 . 1 2 1.22 1.35 '( ) are for Front Nos Mounting type cylinders.

NCRBIBwserbs

E :Kinetic energy(in-lbs) J : Moment ot inertia (inibs.d) 0r: Rotation speed (radls) I 2 ,A 0 :Rotation (rad) I 180'=3.14 rad t: Rotation time(s) ll a rotaiion sped is used slor/er than o.3sec/S', stickang may occur.