Low Differential Pressure Sensor

or more between live parts and case (at 500 VDC Mega) Vibration resistance 10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 98 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (de-energized) Impact resistance 100 m/s2 in X, Y, Z directions, 3 times each (de-energized) 0.5% F.S. or less (based on 25C) Temperature characteristics Connection Power supply/Output connection

Electro

I Auto.manual (A/M ) selector When manual operation ot a diaphragm valve is required, turn the A/M slector in the M direction, and then the supply air pressure can directly be ted to the OUT I side, allowing the diaphragm valve to be operated by control of the pressure regulating valve in the supply pressure line.

IP80-OM00019

O 21 5. ( 3-1-2 ) 6. () ( 7-2) 22 11 11-1 OUT1OUT2 (1920) 6 90cm3 07 P36801080 P565010-18 180cm3 1 P36801081 P565010-19 O P5 19 20 (1) O (2) A (P22401123) 11-2 IP8100 IP8100 7 M P368010-24 S P368010-25 21 M 22 S M IP610 SIP610 23 11-3 IP8000 IP8000 8 1085mm P368010-20 35100mm P368010-21 50140mm P368010-22 11-4 (IP8*00-**0)2 9 (A) P368010-26 79 (B) P368010-27 911 G1/2 23 24

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

Lead wire length symbols: 0.5 m Nil (Example) M9N 1 m M (Example) M9NM 3 m L (Example) M9NL 5 m Z (Example) M9NZ Note) When using the 2-color indicator type, please make the setting so that the indicator is lit in red to ensure the detection at the proper position of the air gripper. 530 MHR3/MDHR3 Series Rotary Actuated Air Gripper 3-Finger Type Model/Specifications Nominal size 15 10 Action

10-SYJ3000

(Type 20 manifold) SYJ3 2 5 M 1 M3 3 10 Body ported Base mounted (4 port) 2 3 10 3 5 M SYJ3 (Manifold use only) Base mounted (5 port) 10 4 M 2 5 3 SYJ3 Clean series 4 port Manual override Port size Body option Nil: Non-locking push type Nil: Without sub-plate 3: Main/Pilot valve common exhaust type For type 31, S31, 32, S32 manifold 5 port R port P, E port (With gasket and screws) D: Push-turn

Series: NCA1 (Standard), Mounting: F (MF1, Front Flange), Bore Size: 500 (5" - Large Bore), Stroke: 0150 (1 1/2"), Air Cushion / Rod Boot: Both Ends (Air Cushion), Thread: F (Flanged), Adjustment Range: Not Applicable, Auto Switch: No Switch, Lead Wire or Prewired Connector: M (1m), Number: 2 pcs. (Or None in the Case of No Switch), X Option: XB5 (Oversized Rod Cylinder)

.: PNP; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)

Valve; Stop Valve: None), Return Port Size: 06 (3/4), Flow Switch Output Specifications: FT (Out 1: PNP; Out 2: Flow Rate: Analog 4 to 20 mA ⇔ Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)

Valve; w/Stop Valve), Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: FT (Out 1: PNP; Out 2: Flow Rate: Analog 4 to 20 mA ⇔ Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Return Unit Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)

Series: NCDA1 (Standard w/ Magnet), Mounting: F (MF1, Front Flange), Bore Size: 200 (2"), Stroke: 0300 (3"), Air Cushion / Rod Boot: Both Ends (Air Cushion), Thread: F (Flanged), Adjustment Range: Not Applicable, Auto Switch: No Switch, Lead Wire or Prewired Connector: M (1m), Number: 2 pcs. (Or None in the Case of No Switch), X Option: XB5 (Oversized Rod Cylinder)

Series: NCA1 (Standard), Mounting: F (MF1, Front Flange), Bore Size: 500 (5" - Large Bore), Stroke: 2400 (24"), Air Cushion / Rod Boot: Both Ends (Air Cushion), Thread: F (Flanged), Adjustment Range: Not Applicable, Auto Switch: No Switch, Lead Wire or Prewired Connector: M (1m)

.: PNP; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: F (Instantaneous Flow: gal/min, Accumulated Flow: gal, Temperature: °F), Bracket: None, Calibration Certificate: None

.: None; Temperature Sensor: None), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)

.: PNP; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)

.: PNP; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)

AS-FPQ/AS-FPG

Operating Pressure Particulate Generation Grade Classifications 1.2 104 Average particle concentration Particles/ft3 Max. operating pressure MPa Grade 4 1.0 103 0.8 Grade 3 102 0.6 101 Grade 2 100 0.4 Grade 1 10-1 0.2 0 5 0 20 40 60 1 0.1 0.2 Particle size m or less 0.3 0.5 Operating temperature C 15-17-3 4 Series AS-FPQ/FPG How to Order AS 2 1 1 2 F P Q 01 06 Body size 1 2 3 4 M5 standard

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

WQ Edition B Safety Instructions Be sure to read the Handling Precautions for SMC Products (M-E03-3) and Operation Manual before use.

Slit Valve

Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE

Valve; w/Stop Valve), Supply/Return Port Size: 06 (3/4), Return Unit Flow Switch Output Specifications: FT (Out 1: PNP; Out 2: Flow Rate: Analog 4 to 20 mA ⇔ Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)

Rated Distance Range: F (0.01 to 0.03mm), Piping Specifications: F (Supply Side: G 1/8, Detection Side: G 1/8), Output Specifications: P (PNP Output), Unit Specification: M (Fixed SI Unit), Stations: 2, Cable Option: L (Right Angle), Bracket Option: B (Bracket), Control Unit: L1 (w/Control Unit, Supply Port: Left Side, With regulator, Round type pressure gauge)