SMC Corporation of America
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NPN() MJ CC-Link -8No.EX-OMP0004CN-I 1 (BUS OUT) CC-Link () 1 (M12 5 A code) 2 (BUS IN) CC-Link (IN ) 1 (M12 4 A code) 3 SI 1 (M12 5 B code) 4 (M3 ) 5 6 LED SI 2 7 SI (M330) SI 2 (BUS OUT)(1 ) 128 2LED 16 -9No.EX-OMP0004CN-I SI n L 1 2 3 4 5 6 7 8 L1 120.7 136.7 152.7 168.7 184.7 200.7 216.7 L2 80 96 112 128 144 160 176 L 9 10 11 12 13

If they do not match, turn off the power, then change the set version. 13 CC-Link version does not match. If the polarity (PNP, NPN) of the output unit and the output device are different, replace one of them to make the combination match. Polarity of output does not match. Check if the green PWR(V) LED of the SI unit is ON.

Pressure Control Equipment Industrial Filters For 13 hole (Round/Without Shim) For 20 hole (Diamond/Without Shim) CKQG-R128 CKQG-D198 CKQG-D199 CKQG-R129 CKQG-R130 CKQG-D200 CKQG-D195S CKQG-R125S CKQG-D197S CKQG-R127S For 13 hole (Round/With Shim) For 20 hole (Diamond/With Shim) CKQG-R128S CKQG-D198S CKQG-D199S CKQG-R129S CKQG-D200S CKQG-R130S CKQG-R145 CKQG-R245 CKQG-R147 CKQG-R247 For 15

Size 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" Symbol Accessory TW 01 03 05 07 09 11 13 Name Nipple Reducer nipple Tube cap Plug U KQ2N KQ2C KQ2P 34

For Deionized Water and Chemicals Digital Flow Switch Series PF2D How to Order Remote Type Sensor Unit C PF2D5 13 20 1 Option (Refer to page 55.) Flow rate range None e-con connector x 1 pc. Nil C 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min 04 20 40 The cable and connector are shipped unassembled.

M L1 L2 1 4 8 6 DEF06-02 48 20 11 16 16 50.5 46.5 17 15 13 11 19 17 14 12 14 12 6max. 4max. 3 8 DEF08-03 66 3 8 3 8 DEF10-03 10 12 53.5 89 DEF12-03 54.5 34 51 17 17 17 17 15 17 19 19 104 17 19 17 19 7max. 7max. 105 Series H, DL, L, LL Self-align Fittings Plug: DP Applicable tube O.D. Weight (g) Part No.

UJ I 2-Forled \bBion DIMENSIONS A B c o E F G H J K M P R s T 1.57 (40) 2.52 (64) 2.20 (56) 1.77 (45) 4.80 (1221 1.97 {50} 0.98 (25) 1 . 1 0 (28) 0.51 (13) 4.45 (113) ?

1 q t i Series PF2D For Deionized Water and Chemicals Digital Flow Switch Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuits and wiring examples 60 70 176 z to , are terminal numbers.

Pressure Control Equipment Industrial Filters For 13 hole (Round/Without Shim) For 20 hole (Diamond/Without Shim) CKQG-R128 CKQG-D198 CKQG-D199 CKQG-R129 CKQG-R130 CKQG-D200 CKQG-D195S CKQG-R125S CKQG-D197S CKQG-R127S For 13 hole (Round/With Shim) For 20 hole (Diamond/With Shim) CKQG-R128S CKQG-D198S CKQG-D199S CKQG-R129S CKQG-D200S CKQG-R130S CKQG-R145 CKQG-R245 CKQG-R147 CKQG-R247 For 15

Process Data Diagnosis items Bit offset Item Note Internal product malfunction Outside of zero-clear range Outside of rated pressure range Upper temperature limit exceeded inside the product 0 OUT1 output 0: OFF 1: ON 1 OUT2 output 0: OFF 1: ON 2 Diagnosis 0: Normal 1: Abnormal 3 to 15 Measured pressure value Unsigned 13 bit Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Item Measured

release time D Release button (Blue) Release button (Blue) AS-T 0.6 Pressure in the cylinder MPa D L1 Q Condition: Cylinder I.D. 100 Stroke 200 mm ASP 0.5 B A D 0.4 8 4.2 ASN Applicable tubing W (mm) 0.3 M M L2 L2 Applicable tubing Weight (g) Model Applicable tubing O.D. 6 8 10 12 D L1 L2 Q W M AQ 0.2 KEA06 KEA08 KEA10 KEA12 12.8 15.2 18.5 20.9 24 27 29 31 21 23 26.5 28.5 5.3 6 6.8 7.5 13

Description 36.65 1 0 V (for output) 30.2 5 1 2 0 V (for control/input) 13.2 3 FE 4 2 4 24 V (for control/input) 3 5 24 V (for output) 13 Wireless System EX600-W Series Dimensions End plate (D side) 26 5.5 (4.4) EX600-ED4/5 20.5 Power supply connector PWR IN 8 90 106 Power supply connector PWR OUT FE terminal Power supply connector PWR IN: M12 4-pin plug, A-coded Configuration EX600-ED4 (

m 20 m 7 0.8 0.4 0.2 2 m 7 13 m m 13 0.4 0.2 0.1 1 0 m 2 20 m 0 0.02 0.04 0.06 0.08 0.1 0 0.02 0.04 0.06 0.08 0.1 0 0.02 0.04 0.06 0.08 0.1 0 0.02 0.04 0.06 0.08 0.1 Operating pressure MPa Operating pressure MPa Operating pressure MPa Operating pressure MPa Conditions: 1.

pressure 0.3 MPa 5.0 Inlet pressure 0.3 MPa 3.0 Pressure drop [kPa] Pressure drop [kPa] Pressure drop [kPa] 2.5 4.0 2.5 Inlet pressure 0.5 MPa Inlet pressure 0.5 MPa 2.0 Inlet pressure 0.5 MPa 2.0 3.0 1.5 1.5 2.0 1.0 1.0 1.0 0.5 0.5 Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa 0.0 Inlet pressure 0.7 MPa 0.0 0.0 0 5 6 7 8 1 2 3 4 2 1 3 4 5 6 7 8 9 10 11 12 0 2 4 6 8 1 3 5 7 9 10 12 14 11 13

1779 Series VPA450 Dimensions VPA4150-Bottom ported 18 4 x pilot port (5 x , ) 12 38 4 x 9 mounting hole ( ) 34 (11) 5 x , 12 38 ( , 1) 34 ( ): Value for Rc 1 VPA4250--, VPA4350--, VPA4450-18 8 x pilot port 220 (For 3 position) 96 (For 3 position) 88 (For 3 position) 1780 Series VPA470 5 Port Air Operated Valve Dimensions VPA4170Bottom ported 12 14 3 x pilot port 14 (5 x 1 , 1 ) 1 2 14 4 x 13

M8 ZHPmmmB-mmS 27.1 21.2 6 17 M10 ZHPmmmC-mmS 13 36.7 M8 depth 10 ZHPmmmD-mmS 17 39.1 M10 depth 10 ZHPmmmE-mmS 27.45 21.8 6.75 12.7 5/16-18UNC ZHPmmmF-mmS 29.43 26.82 8.33 14.28 3/8-16UNC ZHPmmmG-mmS 12.7 41.7 5/16-18UNC depth 11 ZHPmmmH-mmS 14.28 44.1 3/8-16UNC depth 11 EXH.

Do not use in an atmosphere having corrosive gases, chemicals, sea water, water steam, or where there is direct contact with any of these. 13 21.6 30 42 ZH -X185 ZH -X185 Air 0 to 0.7 MPa 5 to 80 (with no freezing or condensation) Refer to back page 50 for Safety Instructions and pages 49 to 51 for Vacuum Equipment Precautions.

Supply pressure Reliable adsorption Set pressure Unstable adsorption High vacuum High pressure No adsorption Atmospheric pressure 0 Set pressure ON Hysteresis OFF Atmospheric pressure 0 1087 Series ZYY/ZYX Construction ZYY3000 B B A A 10 11 4 5 3 12 Section A-A' (Ejector) 13 8 2 7 9 6 1 Section B-B' (Solenoid valve) Component Parts Replacement Parts Description Material Note Description Part

10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 AMD150 1 8 1 4 3 8 159 172 178 204 210 225 232 259 311 13

space HA AT ID AMG AFF M Dimensions with mounting bracket Model Port size (Nominal size B) A H B C D E F G I 221 J 25 K 10 L 14 N 90 O 55 P 110 Q 50 R 88 S 3.2 AM 1 2 3 4 , 9 36 205 19 100 106 3 106 10 AMF450 212 22 107 106 3 106 10 36 221 21 10 14 9 90 55 110 50 88 3.2 1 Misc. , , , 1 1 4.5 4.5 6 3 4 257 314 406 30 40 30 10 15 15 16 20 24 9 11 13 100 150 180 65 85 120 130 180 220 60 76