SMC Corporation of America
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Table 7-1 Water Quality Standards Substance Facility water Circulating water spec. spec. pH (25C) 6.5 to 8.2 6.0 to 8.0 Electrical conductivity (25C) (s/cm) 100 to 800 0.5 to 300 Chloride ion (mgCl-/L) Max. 200 Max.50 Sulfate ion (mgSO42-/L) Max. 200 Max.50 Acid consumption (pH4.8) (mgCaCO3/L) Max. 100 Max.50 Total hardness (mgCaCO3/L) Max. 200 Max.70 Calcium hardness (mgCaCO3/L) Max. 150

IDG75 IDG100 IDG60H IDG75H IDG100H Compressed Air Fluid Range of operating conditions Inlet air pressure MPa 0.31.0 -550 -550 Inlet air temperature oC Ambient temperature oC Standard performance Outlet air atmospheric pressure dew point oC Inlet air flow rate L/min(ANR) 725 900 1190 665 830 1110 Outlet air flow rate L/min(ANR) 600 750 1000 600 750 1000 Purge air flow rate L/min(ANR) 125 150

Rc1/4 12 to 14 Rc3/8 22 to 24 Warning Rc1/2 28 to 30 Rc3/4 45 to 50 Rc1 65 to 70 Rc1 1/4 80 to 90 Rc1 1/2 100 to 110 Rc2 140 to 150 5. Connection of piping to products When connecting piping to a product, refer to its operation manual to avoid mistakes regarding the supply port, etc. 5 SGC200-OMM0002-F SGC / SGH Series Coolant Valve / Precautions 3 Be sure to read this before handling.

Input =100 Output =150 Configuration =105 (5)Size: Set as below. Input =Number of inputs connected. Output =Number of outputs connected. Configuration =0 (4) (1) (5) (2) (3) -61No.EX-OMN0032-D I/O Map Each unit of the product has its own I/O occupied byte.

Installation example Nm L 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 45 55.5 66 76.5 87 97.5 108 118.5 129 139.5 150 160.5 171 181.5 192 202.5 213 L2 89.8 110.8 131.8 152.8 173.8 194.8 215.8 236.8 257.8 278.8 299.8 (mm) : L1 shows the dimensions of the VQC1000 series solenoid valve.

Please refer to the individual catalog for dimensions when other manifolds are connected. n m L 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 45 55.5 66 76.5 87 97.5 108 118.5 129 139.5 150 160.5 171 181.5 192 202.5 213 L2 89.8 110.8 131.8 152.8 173.8 194.8 215.8 236.8 257.8 278.8 299.8 Wiring (for power supply, communication and input) and piping are installed on only one side of the product

Please refer to an individual catalog for the size when other manifolds are connected. n_m L 0 1 2 3 4 5 6 7 8 L1 45 55.5 66 76.5 87 97.5 108 118.5 129 L2 89.8 110.8 131.8 152.8 173.8 194.8 215.8 236.8 257.8 n_m L 9 10 11 12 13 14 15 16 L1 139.5 150 160.5 171 181.5 192 202.5 213 L2 278.8 299.8 Wiring (for power supply, communication and input) and piping are done on only one side.

.) -40No.EX##-OMO0019 Dimensions When only input blocks for M8 connector are connected Stations 1 2 3 4 5 6 7 8 L1 [mm]: Rail length 98 110.5 123 135.5 148 160.5 173 185.5 L2 [mm]: Mounting pitch 87.5 100 112.5 125 137.5 150 162.5 175 L3 [mm]: Manifold length 74 86 98 110 122 134 146 158 L4 [mm] 12 12 12.5 12.5 13 13 13.5 13.5 When only input blocks of 8-point-integrated type are connected

Chart Flow characteristics (Pressure loss) LFE1 LFE2 0.02 0.02 Pressure loss [MPa] Pressure loss [MPa] P r essur r e l oss[ M P a] 0.015 0.015 P r essur e l oss[ M P a] 0.01 0.01 0.005 0.005 0 0 0 5 10 15 20 0 20 40 60 80 100 Flow rate [L/min] Flow rate [L/min] Fl ow r at e[ L/ m i n] Fl ow r at e[ L/ m i n] LFE3 0.02 Pressure loss [MPa] 0.015 P r essur e l oss[ M P a] 0.01 0.005 0 0 50 100 150

Fine Control of -9.99 to 9.99 C (0.01 C) 0.00 2 External Sensor 3 PB Range Sets PB (Proportional Band) range used for PID control. 0.3 to 9.9 C (0.1 C) 0.6 (2.0) Sets integral operation range of PID control. 0.3 to 9.9 C (0.1 C) 1.0 4 ARW Range (2.2) ARW: Anti Reset Windup 150 5 I Constant Sets integral time used for PID control. 1 to 999sec (1sec) (50) Sets differential time used for PID

(between FE and all accessible terminals) Insulation resistance 10 M or more (500 VDC is given between FE and all accessible terminals) Ambient temperature Operation: -10 C to 50 C Storage: -20 C to 60 C Ambient humidity 35% to 85% RH (non-condensing) 10 Hz to 57 Hz (constant amplitude) 0.75 mm 57 Hz to 150 Hz (constant acceleration) 49 m/s2 2 hours for each direction X, Y and Z Vibration

Tap Water) Substance Facility water Circulating water spec. spec. pH (25C) 6.5 to 8.2 6.0 to 8.0 Electrical conductivity (25C) (s/cm) *Circulating fluid 1 to 500 100 to 800 0.5 to 300 Chloride ion (mgCl-/L) Max. 200 Max.50 2-/L) Max.200 Max.50 Sulfate ion (mgSO4 Acid consumption (pH4.8) (mgCaCO3/L) Max.100 Max.50 Total hardness (mgCaCO3/L) Max.200 Max.70 Calcium hardness (mgCaCO3/L) Max.150

1800 1200 600 1800 1200 600 501 to 600 1580 1050 520 1800 1200 600 601 to 700 1170 780 390 1800 1200 600 701 to 800 910 600 300 1390 930 460 801 to 900 720 480 240 1110 740 370 Speed [mm/s] Note3) Stroke range 901 to 1000 580 390 190 900 600 300 Actuator specification 1001 to 1100 480 320 160 750 500 250 1101 to 1200 410 270 130 630 420 210 1201 to 1300 540 360 180 1301 to 1400 470 310 150

Ph (25C) 6.5 to 8.2 6.0 to 8.0 Electrical conductivity (25C) (s/cm) * 100 to 800 0.5 to 300 Chloride ion (mgCl-/L) Max. 200 Max. 50 2-/L) Max.200 Max.50 Sulfate ion (mgSO4 Acid consumption (Ph4.8) (mgCaCO3/L) Max.100 Max.50 Total hardness (mgCaCO3/L) Max.200 Max.70 Calcium hardness (mgCaCO3/L) Max.150 Max.50 Standards Ionic silica (mgSiO2/L) Max.50 Max.30 Iron (mgFe/L) Max.1.0 Max.0.3 Copper

size 1/16 1/8 Fluid Air Ambient and fluid -5 to 60 (Should be no freezing) temperature Proof pressure 1.5 MPa 1.0 MPa Max. operating pressure Set pressure range 0.05 to 0.7 MPa Filtration / Air filter 5 m 0.3 m Filtration efficiency 99.9 Filtration / Mist separator Oil mist density Note2Note3 Max 1.0mg/m3 (ANR) (0.8ppm on the secondary side Note1 Rated flow 1100 1100 200 450 450 AC**C-A 150

. + = 4 . 1 = a V V 2 V m M E k 2 Ek: Kinetic energy (J) M : Mass of object being transported (kg) m : Mass of moving parts of cylinder (kg) V: Maximum speed (m/s) Va: Average speed (m/s) Mass of moving parts of cylinder (kg) Bore size Standard stroke (mm) (mm) model 20 25 30 40 50 75 100 125 150 175 200 250 300 350 MLGPM20 0.40 0.42 0.45 0.47 0.59 0.65 0.71 0.77 0.83 0.89 1.08 1.20 1.31

(Page 11) Allowable lateral load at the rod end 10.0 fR: Lateral load applied to rod end Ft: Maximum force of cylinder Lateral load applied to rod (N) Bushing (bearing) CJ2*16 1.0 CJ2*10 CJ2*6 0.1 0 50 100 150 200 Cylinder stroke (mm) Fig. 1 Allowable lateral load applied to rod end 2) Make sure to connect the piston rod and the load so that their axial centers and movement directions match

Heat resistant Suitable for the ambient temperature of 50 to 150 . Low speed The speed between 15 and 50mm/s is required. Long stroke The stroke between 2001 and 3000 is required. Low speed The speed between 7 and 50mm/s is required. Intermediate stop accuracy higher than one obtained by pneumatic circuit is required.

Specifications Model Note 1 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-80 XYA-25 XYA-40 XYA-50 XYA-63 XYA-80 Flange (valve) size 16,CF034 25 40,CF070 50 63,CF114 80 Actuating type Normally closed (Pressurize to open , spring seal) Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (High temperature type:5 to 150) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance

Perform the various settings. (1) Name: Input a unit name of your choice. (2) Comm Format: Select the data format of the Connection Parameters. (3) IP Address: Input the IP Address of the SI unit. (4) Assembly Instance: Set as follows: Input = 100 Output = 150 Configuration = 105 (5) Size: Set as follows: Input = 2 bytes (for Data-SINT) = 1 word (for Data-INT) Output = 4 bytes (for Data-SINT