PFxx-OMY0005

If using the product to detect very small flow differences, warm up the product for 10 to 15 minutes first. There will be a drift on the display of approx 2 to 3% for 10 minutes after the power supply is turned on. The product doesn't produce and output signal for 3 seconds after the power is supplied. Perform settings suitable for the operating conditions.

100

opening [Number of rotations] 2 4 6 8 10 11 1 3 5 7 9 12 0 * The flow rate is not the flow rate output from the vacuum port.

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

Type 2 3 Elbow Universal Applicable tubing O.D. Metric size Inch size 3.2 01 03 05 07 09 11 23 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Control type 4 6 8 10 0 1 Meter-out Meter-in Use 1/8" tube.

JXCx-OMU0026

1000 1000 50 40 10 100 0.0 0.0 5.0 Axis 1 Absolute 50 50.00 1000 1000 0 0 10 100 0.0 0.0 0.5 2 Axis 2 Absolute 50 50.00 1000 1000 0 0 10 100 0.0 0.0 0.5 Axis 3 Absolute 50 50.00 1000 1000 0 0 10 100 0.0 0.0 0.5 Movement (ex.)

Electric Actuator / Low profile slider type

Origin offset-10 Origin 50mm Motor side End side 0 10 20 30 40 50 Stroke[mm] Origin 50mm Motor side End side 10 20 30 40 50 60 Stroke[mm] Origin 50mm Motor side End side -50 -40 -30 -20 -10 0 Stroke[mm] Origin 50mm Motor side End side -40 -30 -20 -10 0 10 Stroke[mm] Origin 50mm Motor side End side -60 -50 -40 -30 -20 -10 Stroke[mm] -29- 4.

MTS

W (kg) 2 3 4 5 40 32 0.04 0.05 1 0.03 0.5 0.4 0.3 0.2 25 20 8 0.02 16 12 0.1 0.01 5 10 20 30 5 10 20 30 40 50 100 200 Overhang L (mm) Overhang L (mm) Graph (3) Graph (6) Maximum Speed: Up to 500 (mm/s) Maximum Speed: Up to 600 (mm/s) 0.3 20 30 40 50 0.2 10 0.1 Weight W (kg) Weight W (kg) 2 3 4 5 40 32 0.04 0.05 1 0.03 0.5 0.4 0.3 0.2 25 8 20 0.02 16 12 0.01 5 10 20 30 0.1 5 10 20 30 50 100

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

AN103-01 AN203-02 AN303-03 AN403-04 5-10-3 4 Silencer Metal Case Type Series 25 How to Order Exhaust in only one direction Prevents scattering of mist and noise. 25 10 002 Port size Thread type Body size 002 003 004 006 010 1/4 3/8 1/2 3/4 1 R NPT Nil N 04 05 06 07 08 10 11 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

E-P HYREG ® Series VY1 1

Note) A M5 01 02 02 03 04 04 06 10 10 12 14 20 Note) M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 Note) Note) 3 Body ported 5 1 1 11 4 7 1 4 11 2 1 2 2 9 Note) Only bracket or foot may be mounted. 14-10-2 3 E-P HYREG Series VY1 Standard Specifications 02 03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4

Mechanically Jointed Rodless Cylinder Series MY2

Load Mass Allowable Moment MY2H/m3 MY2H/M3 MY2H/M1 MY2H/M2 q r w e t 60 50 60 50 60 50 60 50 40 40 30 30 30 30 20 20 20 20 Load mass kg Moment Nm Moment Nm Moment Nm MY2H40 MY2H40 MY2H40 MY2H40 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 4 4 D3 3 3 3 MY2H16 -X 2 2 2 2 0.2 MY2H16 MY2H16 Individual -X MY2H16 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300

1.1 LINEAR ACTUATORS: AIR CYLINDERS SERIES NCJ2 SERIES NCJ2 BORE SIZES Ø6•10•16 Double Acting Single Rod / Double Rod Single Spring Return / Extend Compact and Lightweight Auto Switch Sensing Optional M A D E I N USA Non Rotating Piston Rod Optional High

) includes Rod Jam Nut, Clevis Pin and 2 Retaining Rings PART NO BORE SIZE A B C D PART NO BORE SIZE A B C D 0.31 0.11 0.11 5-40UNC JM-005 6 (1/4) 0.44 0.50 0.16 1/4-28UNF JM-025 6 (1/4) 0.31 0.36 0.11 6-40UNF JM-006 10 (3/8) JM-03 10 (3/8) 0.50 0.58 0.19 5/16-24UNF 0.38 0.43 0.13 10-32UNF JM-02 16 (5/8) 0.56 0.65 0.23 3/8-24UNF JM-04 16 (5/8) FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT

CV/MVGQ

3, 4 Same side 10 35 55 100 100 110 90 100 110 90 100 110 1 Different sides 2 Same side 35 + 30 (n 2) n = 2, 3, 4 90 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 110 + 30 (n 2) n = 2, 4, 6, 8 110 + 50 (n 2) n = 2, 4, 6, 8 55 + 50 (n2) n = 2, 3, 4 90 + 50 (n 2) n = 2, 4, 6, 8, 100 + 50 (n 2) n = 2, 4, 6, 8 Different sides D-A44 n Same side 10 20 100 90 100 110 100 100 110

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) Stroke (mm) 20 40 50 30 +10.5 +12.5 +22.5 +24 10 to 16 +37.5 +40 +66.5 20 to 50 13-11-114 19 Series ZPR Vacuum Pad: Ball Joint Type Lateral Vacuum Entry with Buffer 20 25 32 ZPR F 10-0-A10 (With buffer) 10 13 16 J K J K ZPR F 10-0-A14 (With buffer) S S M10 x 1 M14 x 1 Hexagon width across flats 14 3 I Hexagon width across flats 19 3 5 Hexagon width across flats 10 J ZX Applicable tubing

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

X axis Y axis Z axis Z 5 W 5 mm 10 mm 20 mm 0.8 kg 20 Y 10 3.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Seal material and its changed part Seal material Part numbers indicating changed seal material and leakage Compound No. 1349-80 Symbol Nil N1 Leakage Pa m3/s or less Note 1) Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 2101-80 2, 3 2 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10

HRX-OM-W032

3-1 3.1.1 Transportation using forklift and hanging . 3-2 3.1.2 Transportation using casters . 3-3 3.2 Installation . 3-4 3.2.1 Environment . 3-4 3.2.2 Operation at low ambient temperature or low circulating fluid temperature . 3-6 3.2.3 Location . 3-7 3.2.4 Installation and maintenance space . 3-8 3.3 Installation . 3-9 3.3.1 Installation . 3-9 3.3.2 Electrical wiring . 3-11 3.3.3 Preparation

CEx-OMI0064

38 10 . 40 10-1 . 40 10-2 . 42 1 , 1. 2. 3.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Note) Metric size Inch size With One-touch fitting 01 03 05 07 09 11 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 4 6 8 10 For low speed control Note) For applicable tubing O.D. selection, refer to the Model on page 727. Thread type Port size M5 U10/32 01 02 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT M5 x 0.8 10-32 UNF 1/8 1/4 N Made to Order Lubricant: Vaseline X12 Ex.)

MU

NX NL R1 NO NX NZ R1 Allowable Rotating Torque (Nm) 25 +0.058 0 +0.058 0 +0.058 0 +0.070 0 CD-MU02 CD-MU03 CD-MU04 CD-MU05 8 10 10 14 8.5 10 11 16 11 14 15 20 3 4 5 6 13 14 17 23 8.5 10 11 16 19.5 24 26 36 9 11 13 16 8 10 10 16 21 24 27 39 9 11 13 16 18 22 26 32 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 32 40 50 63 Size Allowable rotating torque Work mounting allowable torque

Refrigerated Air Dryer

Model Applicable transformer Model Dimension Total weight (kg) A Weight (kg) B C D 171 217 30 40 43 50 31 35 44 51 35 39 48 55 IDF-TR500-1 IDF-TR500-2 IDF-TR500-3 IDF-TR500-4 IDF-TR500-1 IDF-TR500-2 IDF-TR500-3 IDF-TR500-4 IDF-TR500-1 IDF-TR500-2 IDF-TR500-3 IDF-TR500-4 IDF4E-10 284 573 345 315 171 217 IDF6E-10 IDU3E-10 IDF-TB403 6 284 171 217 IDF8E-10 IDU4E-10 643 370 340 284 Note) Weight

Compact Vacuum Unit

Nominal filtration rating: 30 m, 10 pcs. in 1 set 10 pcs. in 1 set Vacuum pressure switch assembly Manifold base assembly Refer to Manifold in How to Order the Product on page 3 for change in the number of stations.