Air Cylinder: Standard Type Double Acting, Single Rod Series CM2 ø20, ø25, ø32, ø40 How to Order Mounting style Cylinder stroke (mm) T B Basic style (Refer to “Standard Stroke” on page 129.) Head side trunnion style Clevis integrated style Axial foot styl T E BZ B L F G C D U Basic style Head side trunnion style Clevis integrated style Axial foot style Bore size Cushion Boss-cut basic style Rod side flange style Nil A 20 25 32 40 Rubber bumper 20 mm Head side flange style Boss-cut rod side flange style Air cushion 25 mm FZ Single clevis style Air-hydro cylinder: Rubber bumber only 32 mm Double clevis style Boss-cut rod side trunnion style
Operating Pressure Range Tank and line pressure ALF 40 02 0 Tank pressure (MPa) (2) (1) Option Operating allowable range Operating allowable range Auto Feed Lube Port size Description Applicable model Symbol Nil 02 03 04 06 10 12 14 20 4 1 With bracket ALF400 to 600 B 8 3 Body size 2 1 F.R.L. 40 50 60 80 90 2 1 4 3 4 3 1 AV 1 1 1 4 1 2 1 1 2 2 1 Line pressure (MPa) AU 2 Thread type AF Nil N F
(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel
I + (mm) Port Size ai F wnn Brrc|{n . f t l . K L, :!
For Water Digital Flow Switch Series PFW How to order PFW7 20 03 27 Integrated display type Flow rate range 0.5 to 4l/min 2 to 16l/min 5 to 40l/min 04 20 40 Unit specification Thread type Nil M With unit switching function Fixed SI unit Note) Rc NPT G Nil N F Wiring specification Note) Fixed units: Real-time flow rate: l/min Accumulated flow: l 3m lead wire with connector Without lead wire
F (E) L H G F E B M L 28.5 34.5 47.5 52.5 64 78 11 16 21 24 32 41 9.5 12 18 20 28 36 4.8 6 9 10 14 18 10 17 22.5 24.5 27 30 3.5 4 5 6 7 8 14 20 25 29 37 49 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQ3T1A LQ3T2A LQ3T3A LQ3T4A LQ3T5A LQ3T6A M 1/4 (E) (E) G H L L Panel Union : LQ3P J Panel Thickness (Max. t) (mm) Inch Size H W2 W1 Model Tubing O.D.
2 w u !0 !5 !4 Component Parts Replacement Parts No. Description Material Note No. Description Material Part no. Qty.
4 , and pushes valve (main valve) u open, thus guiding the pressure to the OUT side. At the same time, the pressure passes through feedback hole !5 , and enters diaphragm chamber !6 , thus establishing the OUT side pressure (outlet pressure). Relief port Be sure to read this before handling the products.
AU200/300 Effective thread depth 6.5 4-M5 x 0.8 AU200, 300 Float type auto-drain Port size H G F E D C B A Model Port size 1 4 / 3 8 AU200 / 50 70 61 30 40.5 31.5 164 165 AU300 50 70 61 30 40.5 31.5 188.5 165 14-3-12
Basic (Through-hole/Both ends tapped common): CQUB F Q 2 x M5 x 0.8 Y 4 x M6 x 1 depth 10 4 x 5.4 through 15 KA H H1 Rod end nut Width across flats B1 NY EY D X C1 K NX A + Stroke B + Stroke L EX L1 Rod end male thread Basic (mm) Size Stroke range (mm) A B D EX EY F H K KA L NX NY Q Y 20 25 32 40 5 to 50 49 42.5 10 22 47 11.5 M5 x 0.8 depth 8 5 8 6.5 5.5 36 15 3 5 to 50 49 42.5 10 24 53 11
3 Stainless steel y POM u POM 5-6-42 5 Port Mechanical Valve Series VZM500 Series VZM500 Basic VZM550-01-00 Accessory mounting hole (Pilot exhaust port) SA JIS Symbol VA SA VA 0.5 MPa supply VM 1.0 mm P.T. 16 N F.O.F. VR 2-3.2 mounting hole 2.0 mm O.T. 3.0 mm T.T.
The product should be operated after thoroughly reading the manual and understanding its contents. 530 Slit Valve XGT Series Construction i u w q !2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
Stations: 02 (2 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: F (G), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: Flow Adj.
Stations: 04 (4 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: F (G), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: Flow Adj.
Valve; w/Stop Valve), Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: BT (Out 1: PNP; Out 2: Flow Rate: PNP; Temp.: PNP; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Return Unit Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)
Valve; w/Stop Valve), Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: BT (Out 1: PNP; Out 2: Flow Rate: PNP; Temp.: PNP; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Return Unit Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)
Valve; w/Stop Valve), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: BT (Out 1: PNP; Out 2: Flow Rate: PNP; Temp.: PNP; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Return Unit Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)
Valve; w/Stop Valve), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: BT (Out 1: PNP; Out 2: Flow Rate: PNP; Temp.: PNP; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Return Unit Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)
Valve; w/Stop Valve), Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: DT (Out 1: NPN; Out 2: Flow Rate: Analog 4 to 20 mA ⇔ Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)