Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

VDC Symbol Rated voltage Symbol Rated voltage 1 100 VAC 7 240 VAC 2 200 VAC 8 48 VAC 3 120 (110) VAC B 24 VAC 4 220 VAC J 230 VAC i Electrical entry o Coil orientation Symbol Electrical entry CE/UKCA-compliant Symbol Orientation Nil Upward U Downward G Grommet*1 12 VDC 24 VDC 100 VAC 24 VDC 12 VDC 48 VAC 24 VAC !

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

Refer to pages 6-9-12 to 6-9-18.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

4 82 88 12 14 26 12 M6 x 1 depth 9 21 100 st or more 25 25 25 350 to 500 175 80 37 46 57 100 88 13 14 31 12 M6 x 1 depth 13 21 125 st or more 32 32 32 350 to 600 201 82 37 52 65 114 90 16 14 38 12 M6 x 1 depth 13 21 150 st or more 40 40 40 350 to 800 238 92 44 62 84 138 101 20 15 47 12 M8 x 1.25 depth 16 25 200 st or more 50 50 50 350 to 1000 285 104 55 75 94 164 116 25 16 58 14 M10 x 1.5

Prevents Micro-Bubbles

Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Plug Tubing size Plug Body class Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 2 to 5 LVC 6 1/4" 6 1/4" LVA 2 2 8 8 10 3/8" 10 3/8" Base type LVH A Stacking type 10 3/8" 10 3/8" Manifold stations LVD 3 3 12 1/2" 12 1/2" 02 2 stations LVQ 12 1/2" 12 1/2" 05 5 stations 4 4 LQ 19, 3/4" 19, 3/4" 12 1/2" 12 1/2" LVN 5

High Purity Chemical Valve

LVD LVQ How to Order Manifold Base LQ1 LLC 2 A 02 11 S LVN Tubing size for P port and R side connection Body class Tubing size for P port and L side connection TL/TIL Body class Symbol Nil 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Tubing size Plug Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 L side, R side same

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

13 36 62 17 15 39 13.5 5 14 5 48 33 25 25 34 46 M10 x 1.5 depth 12 0 0.030 20 CDVRA1BS63 14.5 10 2.5 117 12 14 41 76 19.5 17 39 20.5 6 21 5 60 33 30 30 34 57 M12 x 1.75 depth 13 0 0.030 23.5 CDVRA1BS80 15.5 12 3 142 12 18 50 92 22.5 20 43 28.5 6 29 5 72 33 35 40 34 70 M12 x 1.75 depth 14 0 0.036 25 CDVRA1BS100 16 12.5 4 172 12 112 18 60 28 25 43 38.5 8 39 85 5 33 40 45 34 85 ( ) are the

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

15 39 13.5 5 62 17 13 36 25 14 25 48 33 5 34 46 M10 x 1.5 depth 12 0 0.030 20 CDVRA1BS63 14.5 117 10 2.5 12 17 39 20.5 6 76 19.5 14 41 30 21 30 60 33 5 34 57 M12 x 1.75 depth 13 0 0.030 23.5 CDVRA1BS80 15.5 142 12 3 12 20 43 28.5 6 92 22.5 18 50 35 29 40 72 33 5 34 70 M12 x 1.75 depth 14 0 0.036 25 CDVRA1BS100 16 172 12.5 4 12 25 43 38.5 8 112 28 18 60 40 39 45 85 33 5 34 85 ( ) are the

MVGQ

VDC 6 VDC 5 VDC 3 VDC There are only 24 VDC and 12 VDC types for type U.

HRX-OM-W002

20 34 21 21 12 10 15 16 17 18 19 13 15 10 16 17 24 11 14 9 8 6 3 9 3 3 7 5 2 2 5 2 5 4 4 4 1 1 1 1 1 1 21 21 11 9 8 6 3 9 3 3 22 23 25 26 27 28 23 7 5 2 2 5 2 5 35 36 20 12 10 15 16 17 18 19 13 15 10 16 17 4 4 4 24 14 34 2B 1B 1A 3A 2A 3B Main Board PCB2 2/2 1/2 23 22 25 26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4 1 1 1 5 1 21 11 3 9 8

MHF2

"Runoff" 12-3-25

MHF2

"Runoff" 12-3-25

Escapements Series MIW/MIS

M-3P (Width across flats 5) 12 to 25: Plug part no.

Cylinder with Lock Series CLS

(n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) 2 pcs. (Different surfaces, Same surface), 1 pc. 15 105 110 115 D-M9 D-M9W 15 + 40 (n2) 2 105 + 40 (n4) 2 110 + 40 (n4) 2 115 + 40 (n4) 2 n pcs. (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) 2 pcs.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

6.6 12 38 2 7 A B NN x M8 x 1.25 thread depth 16 6H9 ( ) depth 6 +0.030 0 6H9 ( ) depth 6 +0.030 0 GA HA Section AA Section BB (mm) Model ZZ 133.5 133.5 133.5 143.5 156.5 197.5 238.5 296.5 336.5 M 92 92 92 102 115 156 197 255 295 Z 90.5 90.5 90.5 100.5 113.5 154.5 195.5 253.5 293.5 K 35 45 55 65 75 100 125 150 175 J 47 47 47 57 70 90 114 155 180 I 12 12 12 12 12 33 50 67 82 NN 2 2 2 2 3

CXT

0 3.5 5.5 5 7.5 3.5 3 6.5 8.5 8 10.5 1.5 2 6 7 8 12 1.5 (4) 4.5 5 9 10 11 15 2 (4.5) Bore size (mm) 1.5 (1) 3.5 (1) 3 (0.5) 5.5 (3) Long Stroke 12 16 20 25 32 40 1 0.5 6 8 10.5 16.5 11 10.5 16 18 20.5 26.5 9 9.5 13 14 12.5 16 5 5.5 9 10 8.5 12 7 6 11.5 13.5 16.5 22.5 5 (2.5) 8 8.5 12 13 11.5 15 10 9.5 15 17 19.5 25.5 8 8.5 3.5 1 1.5 7.5 4.5 (2) Bore size (mm) 10 (7.5) 12 (9.5) 14.5 (12)

MHC2

Refer to pages 12-15-3 to 12-15-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to page 12-1-4 to 12-1-6 for Precautions on every series. Applicable Auto Switch/Refer to page 12-13-1 for further information on auto switches.

MHC2

Refer to pages 12-15-3 to 12-15-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to page 12-1-4 to 12-1-6 for Precautions on every series. Applicable Auto Switch/Refer to page 12-13-1 for further information on auto switches.

Flow Control Equipment

12 10 6 8 10 Tube O.D.

Table of Contents

Recommended torque: 12 to 14 Nm.

45

16.5 14.5 13 17.5 15.5 12 13 14 15 16 stations Stations n 11 stations 335.5 348 373 385.5 398 410.5 L1 L2 L3 L4 325 337.5 362.5 375 387.5 400 267 283 299 315 331 347 14 12 16.5 15 13 11.5 Note) Width of SI unit applicable to E: Matsushita Electric Works, Ltd. and G: Rockwell Automation, Inc. widens to 24.3 mm .