(g) 1 4/2 (P A/B)4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?
Guide type C Cam follower guide Number of auto switches Bore size 16 25 40 16 mm 25 mm 40 mm 2 pcs. 1 pc. n pcs. Nil S n Auto switch Thread type Nil Without auto switch (Built-in magnet) Refer to the table below for the applicable auto switch model.
How to Order AS 2 2 0 1F G 01 06 W2D Flame resistant flat head screwdriver adjustable Body size 2 1/8, 1/4 standard 3 3/8 standard 4 1/2 standard Applicable tubing O.D.*1 Metric size 06 6 08 8 10 10 12 12 Elbow Control method 0 Meter-out 1 Meter-in *1 For selecting applicable tubing O.D., refer to the Model shown above.
Note 2) Intermediate strokes and long strokes not listed above are produced upon receipt of order.
Note 2) Intermediate strokes are available as a special order. L Data R S Piping Port Locaition Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model. Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.
The drain pipe must have a minimum pipe bore of 10 mm, and a maximum length of 5 m (when installing an optional auto-drain). coefficient (1) (2) To get correction factor of 1.35 use ambient temperature correction factor at 20C. (3) To get outlet air temperature divide 38.5C from (1) by 1.35 from (2). Outlet temperature = 38.5 1.35 = 28.5C Maintenance Caution Ambient temperature (C) 1.
Note 2) Use turbine oil No.1 (ISO VG32), if lubricated. Flow Rate Characteristics Weight (g) Flow rate characteristics 12 (PA) 23 (AR) Model Weight VFN212N-5D-02F 240 VFN212N-5D-02F-D 380 C b Cv C b Cv 2-position Single solenoid 2.68 0.40 0.72 5.41 0.31 1.38 Double solenoid 2.68 0.40 0.72 5.41 0.31 1.38 189 A
(g) 1 4/2 (P A/B)4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?
(g) 1 4/2 (P A/B)4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?
Slit Valve XGT Series RoHS How to Order XGT 22 2 46236 1 C Auto switch and the connector (Refer to the table below) High vacuum slit valve Valve size Gate O-ring material Number of axis Two axes bellows One axis bellows Applicable wafer size 200 mm 300 mm Symbol 22 31 Material FKM Kalrez 4079 Symbol 1 2 Opening window size Width Applicable wafer size Symbol 32 Note) Height x width (mm) 32
Fluid: 0 (Petroleum), Port Size Category: C (2 1/2, 3), Std. T Dimension, mm: 1 (Port 1/2-1: 310, 1 1/4-2: 385, 2 1/2-3: 560), Filtration: 105μm, Port Size: 24 (3), Pressure Indicator: 1 (Differential Pressure Indicator), Connection: 4 (S-block Companion Flange), Air Breather: C (Cap)
Fluid: 0 (Petroleum), Port Size Category: C (2 1/2, 3), Std. T Dimension, mm: 3 (Port 1/2-1: 450, 1 1/4-2: 585, 2 1/2-3: 750), Filtration: 74μm, Port Size: 24 (3), Pressure Indicator: 1 (Differential Pressure Indicator), Connection: 4 (S-block Companion Flange), Air Breather: C (Cap)
(g) 1 4/2 (P A/B)4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?
(g) 1 4/2 (P A/B)4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?
(g) 1 4/2 (P A/B)4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?
(g) 1 4/2 (P A/B)4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?
(g) 1 4/2 (P A/B)4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?
(g) 1 4/2 (P A/B)4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?
(g) 1 4/2 (P A/B)4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?
(g) 1 4/2 (P A/B)4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?