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2.5 kVAC Energy saving static neutralization nozzle Within 10 V Offset voltage Note 2) Within 15 V High flow rate nozzle Ozone generation Note 3) 0.03 ppm (0.05 ppm for energy saving static neutralization nozzle) Fluid Air (Clean dry air) Operating pressure Note 4) Air purge 0.05 MPa to 0.7 MPa Note 5) Connecting tube size 6, 1/4 inch 24 VDC 10% Power supply voltage Current consumption 80

Nozzle Type Ionizer Lightweight 16 mm x 100 mm x 46 mm RoHS Thickness Width Height Slim 33% reduction 120 g a 80 g 16 mm Offset voltage: 10 V (For energy saving static neutralization nozzle) 46 mm 100 mm Female threads for piping High flow rate nozzle Energy saving static neutralization nozzle Nozzle Variations Made to order Application Examples With right angles -X367 Dust removal and static

, 100, 125 140, 160, (180, 200) Basic, Foot, Flange Hydraulic cylinder 3.5 MPa or less 20, 25, 32, 40, 50, 63, 80, 100, 125 140, 160, (180, 200) JAH Series (Heavy load) Hydraulic cylinder 7 MPa or less 40, 50, 63, 80, 100 Basic, Foot, Flange Refer to the Web Catalog or Best Pneumatics.

Low Maintenance Filter Low Maintenance Filter Series FN1/FN4 Series FN1/FN4 New Series FN4 FN4 Series FN1 FN1 Series FN4 Series FN1 Series FN4 FN4 Series FN1 FN1 Flow rate max. 250 l/min max. 80 l/min max. 40 l/min Series FN4 with four elements is added!

0 20 40 60 80 100 120 140 160 180 Time (minute) Time (minute) Pressure Loss in FacilityWater Circuit The values shown on the performance chart are not guaranteed, but typical.

HRR024-A HRR030-A 61 Height 665 x Width 610 x Depth 820 HRR024-W HRR030-W 60 HRR050-A 91 Height 975 x Width 610 x Depth 820 HRR050-W 80 Height 800 x Width 610 x Depth 820 Handling Warning *1 For models with an option, the weight increases as shown below. 1. Thoroughly read the operation manual. Read the operation manual completely before operation.

yDrain Pan Set (With Water Leakage Sensor) Page 85 List of Function Page 80 uWired remote controllerPage 85-1 Alarm Page 80 PCooling Capacity Calculation Communication Function Page 81 Required Cooling Capacity Calculation Page 86 POptions Precautions on Cooling Capacity Calculation Page 87 With Earth Leakage Breaker Page 82 Circulating Fluid Typical Physical Property Values Page

0.5 MPa Load rate: 50% Stroke 60 mm Series MB, CA2 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Vertical, upward actuation Horizontal actuation 10-SYJ7143-02 Cylinder is in extending.

(mm) 15+1/2ST 20 25 30 35 40 50+ST 60 70 80 90 100 63.5+ST 73.5 83.5 93.5 103.5 113.5 Model CXS6-10 21-/2210-/11-/12CXS6-20 CXS6-30 CXS6-40 CXS6-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/12854 A Dual Rod Cylinder CXSL 1221CXS / 10-/1122Basic: CXS10, CXSL10 10-/11221221S ZZ SS 17 8 9 2 x 3.4 through 4 20 1 Z M5 x 0.8 x 5 L (Hexagon socket set screw) 2 x 6.5 counterbore

Size 60 2 1 191.2 45 93.1 30 45 70 50 70 11 20 8 60 80 Number of components Model Combination example r A N F J M Pressure Relief 3-port Valve VHS30-03-D 1 pc.

psig (0.55 MPa) of N2 How to Order (Inlet) (Outlet) AP 3 S FV4 FV4 M 571 2PW 050 Size Code Cv 0.29 0.5 Metered flow 3 4 Metered adjusted flow in slpm Code Metered adjusted flow in slpm at 80 psig (0.55 MPa) N2.

Ejector Vacuum regulator Outside of clean room Outside of clean room Vacuum pump Duct piping Front matter 10 System Circuit in Clean Room Clean blow system Example of equipment to suit each clean blow grade 100 Line A Particle diameter: 0.1 m or more Valve operating frequency: 0.5Hz Particle generation Particles/min 80 Line A: For oil-free air blow Line B: For clean blow Line C: For clean

CVS1K 40, 50 63, 80 100 J Standard 10-15-67 Double acting DNonrotating rod 40, 50 63 10-15-78 -X Series MVGQ 2012, 16 20, 25 32, 40 50, 63 80, 100 Data 10-16-1 Double acting 10-15-1 Series CV Valve Mounted Cylinder Precautions Be sure to read before handling.

D (mm) (mm) Cylinder model C D Mounting bolt size Cylinder model C D Mounting bolt size CVQM5010 CVQM325 45 M5 x 45L M6 x 60L 60 15 10 45 x 45L x 60L 60 20 15 50 x 50L x 65L 65 25 20 55 x 55L x 70L 70 30 25 60 x 60L x 75L 75 35 30 65 x 65L 12.5 x 80L 80 9 40 35 70 x 70L x 85L 85 45 40 75 x 75L x 90L 90 50 45 80 x 80L x 95L 95 75 50 85 x 85L x 120L 120 -100 75 110 x 110L x 145L 145 CVQM6310

Conduit terminal: VP3145-T A B DIN terminal: VP3145-D A B [105] 76 Light (For TL, TZ) 30 31.3 Max.12 G1/2 Applicable cable 6 to 12 Light position (For DL, DZ) G1/2 [196] NO NO 190.6 194 181.5 166 PE PE 26 26 83 83 32 32 36 36 80 80 [ ]: With indicator light (TL, TZ) 1310 Large Size 3 Port Solenoid Valve VP3165 Series Dimensions: VP3165 Grommet: VP3165-G A B 113 87.4 54 30 71 101 G1/2 1

Bore Piston Area Forces (lbs); Push Stroke (in) (in) Operating medium Pressure (PSI) 50 60 80 100 200 250 1.5 1.767 88 106 141 177 353 442 HOW TO USE THIS TABLE 1 Locate column with desired operating pressure. 2 Move down that column and locate the thrust value which is equal (or the next larger to the force to be delivered by the cylinder.) 3 On that same line, locate in the first (left)

REC Symbol Absorbed Energy/Cushioning Stroke RHC Bore size (mm) Max. absorbed energy (J) Effective cushioning stroke (mm) MTS REF 7 80 20 CC 12 80 25 21 80 32 33 80 40 OUT IN Theoretical Force (Unit: N) Piston area (mm2) Operating pressure (MPa) Operating direction Bore size (mm) Rod size (mm) 0.7 0.8 0.9 0.3 0.4 0.5 0.6 0.2 1.0 220 251 283 94.2 126 157 188 62.8 314 314 OUT 10 20 165 189

Body sizes: 80 (400W), 100 (750W); Max. horizontal workload, kg: 75 (size 80); 240 (size 100); Max. vertical workload, kg: 40 (size 80); 70 (size 100); Max. speed, mm/s: 2160 (size 80); 4000 (size 100); Stroke range, mm: 300 to 3000 (see catalog for increments); Positioning repeatability, mm: ±0.08; Encoder resolution: 17-bit (S motor), 20-bit (V motors), 18 or 22-bit (T motors)

Please contact us for the latest version.sales@ocaire.com, LSA-80 W/MICARTA INS G PORTS, ACTUATOR, LSA CYL, LOCATING PIN, RC, 80MM LSA CYL, LOCATING PIN, .00000 lb

Please contact us for the latest version.sales@ocaire.com, LSA-80 W/MICARTA INS G PORTS, ACTUATOR, LSA CYL, LOCATING PIN, RC, 80MM LSA CYL, LOCATING PIN, .00000 lb