VCW

36.5 13.5 15 32 25 23 M5 24 59 46 57 60 54.5 48.5 101 57 68 1/2 22 45 89 41 11 17 36 22.5 23 M5 26 64.5 48 62.5 62 60 50.5 103 62.5 70 1/4, 3/8 VCW41 30 50 93.5 41 13.5 17 36 25 23 M5 26 66.5 48 64.5 62 62 50.5 103 64.5 70 1/2 35 60 101 41 17.5 17 36 30 28.2 M5 26 70 48 68 62 65.5 50.5 103 68 70 3/4 4 Direct Operated 2Port for Water Series VCW Dimensions (N.O.)

Multistage Ejector Series ZL112/212 1

60 50 50 ZP 40 40 30 30 ZCU 20 20 10 10 AMJ 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate (/min(ANR)) Suction flow rate (/min(ANR)) Misc.

Ejector Valve Unit Series ZYY/ZYX 1

60 60 60 60 60 Air consumption Air consumption 40 40 40 40 40 40 Suction flow rate Suction flow rate 20 20 20 20 20 20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 0 0 0 10 20 30 40 50 5 10 15 20 25 Supply pressure (MPa) Suction flow rate (l/min(ANR)) Supply pressure (MPa) Suction flow rate (l/min(ANR)) How to Read Flow Characteristics Graph The flow rate characteristics

Compact

: LXF: LXFH5BD 30 Screw LXFH5SA 30 Slide LXFH5SB 20 I LXP82BC 60 50 220 Linear ball bearing LXP82BD 60 50 90 Ball Screw 60 50 160 6 0 ' .

pa

D (for PA3000 automatically operated type) Discharge rate 5 0.040 125 (cycles/min) = = Cycles per minute Discharge per cycle Reference life cycles 1 1 = x x Service life Cycles per minute 8 (Daily operating time) 60 100,000,000 1 1 = x x 125 60 8 1666 days = 17-5-145 Series PA/PAX/PB Precautions 5 Be sure to read before handling.

4/5 Port Air Operated Valve Series SYJA3000

] 0.15 [0.10] 0.57 [0.41] 0.37 0.10 0.41 77 3 position 52 67 0.36 0.19 0.70 0.40 0.12 0.47 2 position A, B port: C6 (One-touch fitting for 6) P, R port: M5 x 0.8 0.37 0.19 0.72 0.34 0.12 0.44 Closed center SYJA520-C6 Exhaust center Pressure center Single Double 0.54 0.19 0.67 0.38 [0.38] 0.11 [0.11] 0.41 [0.41] 0.41 [0.39] 0.23 [0.12] 0.82 [0.44] 0.36 0.11 0.41 77 3 position 79 (45) 94 (60

VCW

36.5 13.5 15 32 25 23 M5 24 59 46 57 60 54.5 48.5 101 57 68 1/2 22 45 89 41 11 17 36 22.5 23 M5 26 64.5 48 62.5 62 60 50.5 103 62.5 70 1/4, 3/8 VCW41 30 50 93.5 41 13.5 17 36 25 23 M5 26 66.5 48 64.5 62 62 50.5 103 64.5 70 1/2 35 60 101 41 17.5 17 36 30 28.2 M5 26 70 48 68 62 65.5 50.5 103 68 70 3/4 4.5-6 Direct Operated 2Port for Water Series VCW Dimensions (N.O.)

(Only 400 VAC type) Thermo-chiller Air-cooled 200 V/400 V Type Standard Type HRS090 Series

5 to 45 Circulating uid2 Tap water, 15% ethylene glycol aqueous solution, Deionized water Set temperature range1 C 5 to 35 Cooling capacity 50/60 Hz3 kW 8.0/9.0 Heating capacity 50/60 Hz4 kW 1.7/2.2 Temperature stability5 C 0.5 Circulating uid system Rated ow 50/60 Hz (Outlet)6 L/min 29/45 Maximum ow rate 50/60 Hz L/min 55/68 Maximum pump head m 50 Minimum operating ow rate 50/60 Hz7 L/min

Thermo-chiller

Hz) [W] 1700/1900 2500/2900 Heating capacity3 (50/60 Hz) [W] 430/540 430/540 Temperature stability5 [C] 0.1 Circulating fluid system Rated flow6, 7 (50/60 Hz) [L/min] 7 (0.13 MPa)/7 (0.18 MPa) Maximum flow rate (50/60 Hz) [L/min] 27/29 Maximum pump head (50/60 Hz) [m] 14/19 Output [W] 200 Tank capacity [L] Approx. 5 Port size Rc1/2 Pump Fluid contact material Stainless steel, Copper (Heat

5 Port Pilot Operated Solenoid Valve Series VFR2000 Rubber Seal, Plug-in/Non Plug-in How to Order Option Port size (P, A, B port) Thread type Electrical entry Rc Nil Nil Nil None Without sub-plate F: Plug-in type 01 1 8 F Z G With light/surge voltage supp

VQC 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 3 Electrical entry VQZ 110 to 120 VAC, 50/60 Hz G: Grommet E: Grommet terminal T: Conduit terminal D, Y: DIN terminal 4 3 position exhaust center 220 VAC, 50/60 Hz 5 6 24 VDC 12 VDC SQ 4 7 240 VAC, 50/60 Hz Note) VFS 9 Other 3 position pressure center Option Note) L and M plug connectors: Max. 220 VAC VFR 5 L: L plug connector M: M plug

Compact Manifold Regulator Series ARM5

Pressure gauge indication range Indication unit GC3-4A-X2101 0 to 0.4 MPa MPa GC3-10A-X2101 0 to 1.0 MPa Fitting type One-touch fittings for regulator Symbol Nil L1 ARJ GC3-P4A-X2101 0 to 60 psi Type Straight Elbow psi GC3-P10A-X2101 0 to 150 psi AR425 to 935 Specifications Fitting size AMR 3% F .S.

AC Servo Motor Driver (CC-Link Type)

Example using a 20[mm] Lead Actuator with target travel speed of 500[mm/sec] Rotations per second Travel distance per second Travel distance per rotation Rotation Speed (rpm) = {Speed (mm/s) Lead (mm) }60 (S) = {500 (mm/s) 20 (mm) }60 (s) =1500 (rpm) The rotation speed must be a value between 0 and the allowable actuator speed. The actuator will not operate if set to 0.

Digital Pressure Switch

(Refer to page 60.)) (3) Change the set value with or button, and press the button to set the value. Then, the setting moves to the delay time of the switch output. (The snap shot function can be used. (Refer to page 60.)) (4) Press the or button, the delay time of the switch output can be selected. Delay time setting can prevent the output from chattering.

Digital Pressure Switch ( compatible)

(Refer to page 60.)) (3) Change the set value with or button, and press the button to set the value. Then, the setting moves to the delay time of the switch output. (The snap shot function can be used. (Refer to page 60.)) (4) The delay time of the switch output can be selected by pressing the or button at the ON and OFF point of the switch output.

Compact Cylinder with Lock Series CLQ

105l M5 x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 140l x 165l M5 x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 150l x 175l M6 x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 120l x 155l x 180l M8 x 90l x 95l x 100l x 105l x 110l x 115l x 120l x 125l x 130l x 165l x 190l M10 x 100l x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 140l x 175l x 200l 55 60

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

60 Gripping point L mm Gripping point L mm MHS2-63D MHS2-63D Note: 1N = 0.2248lbf 1in = 25.4mm 1MPa = 145psi Pressure 0.6MPa Pressure 0.6MPa 600 600 Gripping force N 0.5MPa 0.5MPa Gripping force N 0.4MPa 0.4MPa 400 400 0.3MPa 0.3MPa 0.2MPa 0.2MPa 200 200 0.1MPa 0.1MPa 0 0 20 20 40 40 60 60 Gripping point L mm Gripping point L mm 4 Series MHS2 2 Finger Air Gripper Dimensions (mm) 1in = 25.4mm

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

Different sides Same side Different sides Same side 50 + 45 (n 2) (n = 2, 3, 4, 5 ) D-C7 D-C8 15 50 10 15 + 45 n 2 2 D-H7 D-H7W D-H7BAL D-H7NF (n = 2, 4, 6 ) 60 + 45 (n 2) (n = 2, 3, 4, 5 ) 15 60 10 Caution D-C73C D-C80C D-H7C 15 + 50 n 2 2 When operating a cylinder for the first time, make sure to release the air at low pressure.

Stainless Steel Heat Exchanger Type Air Dryer Series IDUS/IDFS

x 3 x 60 = 2736g/h. 6 7 8 3 1 2 3 4 5 Dew point conversion chart 60 50 40 30 Pressure dew point C 20 10 1.5MPa 1.3MPa 1.1MPa 0.9MPa 0.7MPa 0.5MPa 0.3MPa 0.1MPa Atmospheric pressure 0 -40 -30 -20 -10 -60 -50 -60 -50 -40 -30 -20 -10 0 10 20 30 Atmospheric pressure dew point C 8

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Since a large quantity of liquid will be pumped out, use a suitable throttle in the discharge port if problems occur. 16 Series PB1000 Process Pump Built-in Solenoid Valve Type/Air Operated Type Performance Curves/Built-in Solenoid Type/Air Operated Type 1l/min = 0.035SCFM 1MPa = 145psi Cycle 1Hz Cycle 5Hz Cycle 10Hz 70 70 70 60 60 60 50 50 50 40 40 40 Total lifting range m Total lifting

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Since a large quantity of liquid will be pumped out, use a suitable throttle in the discharge port if problems occur. 16 Series PB1000 Performance Curves/Built-in Solenoid Type/Air Operated Type Cycle 1Hz Cycle 5Hz Cycle 10Hz 70 70 70 60 60 60 50 50 50 40 40 40 Total lifting range m Total lifting range m Total lifting range m SUP=0.7MPa SUP=0.7MPa SUP=0.7MPa SUP=0.5MPa SUP=0.5MPa SUP=0.5MPa