SI unit for EtherCAT

Designation Description 1 SV24 V +24 V for solenoid valve 2 SV0 V 0 V for solenoid valve 3 SI24 V +24 V for SI unit operation 4 SI0 V 0 V for SI unit operation 5 Unused The M12 connector cable has two types, SPEEDCON compatible and non-compatible.

PSxx-OMG0005CN

2030 10 1% * -7No.PS-OMG0005CN-E 0 01 28 C2 PSE56 0 (01MPa) (1) C2 1 (0-101kPa) 3 (-100100kPa) *PSE200 4 (0500KPa) (15V) 01 R1/8(M5) 28 (420mA) 02 R1/4(M5) C01 Rc1/8 N01 NPT1/8(M5) N02 NPT1/4(M5) A2 URJ1/4 B2 TSJ1/4 ZS-28-C 1 Rc1/4 ZS-31-X175 1 NPT1/4 ZS-31-X186 1 Rc1/8 ZS-31-X188 1 NPT1/8 ZS-31-X189 1 15[V]F.S.=514[V] (1F.S.40.010.04[V]) F.S. ( 25[]ON-OFF (1K 1M A/D 5V A/D

Air cylinder (Series compatible with secondary batteries)

.) < Applicable Auto switches > Solid state auto switch D-M9N(V)-900M9P(V)-900M9B(V)-900 D-M9NW(V)-900M9PW(V)-900M9BW(V)-900 Reed auto switch D-A90-900 Fig 4. How to Mount and Move the Auto Switch Fig 4.

PF2D

1 Digital Flow Switch For Deionized Water and Chemicals Series PF2D ZSE ISE PSE Body and sensor Body and sensor New PFA New PFA Z I SE3 PS Tube Tube Super PFA Super PFA Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP Three types of flow range 0.4 to

Actuator Position Sensor

IODD file 1 D-MP025A/B/C SMC-D-MP025-ymmdd-IODD1.1 2 D-MP050A/B/C SMC-D-MP050-ymmdd-IODD1.1 3 D-MP100A/B/C SMC-D-MP100-ymmdd-IODD1.1 4 D-MP200A/B/C SMC-D-MP200-ymmdd-IODD1.1 : "ymmdd" indicates the file preparation date. y is the year, mm is the month and dd is the date.

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Metric sizes Inch sizes Body class 3 1/8 3/16 4 1/4 8 3/8 10 12 19 1/2 3/4 6 1 2 3 4 5 v v v V V V V v v V V v v V V V v v V v V v Note) Refer to page 505 for information on changing tubing sizes. Specific Product Precautions Be sure to read before handling.

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

v Deionized water v Sodium hydroxide Ultra deionized water v Toluene v Hydrofluoric acid Concentration 50% or less v Sulfuric acid (except fuming sulfuric acid) Concentration 20% or less v Phosphoric acid Concentration 30% or less v Note 1) The material and fluid compatibility check list provides reference values as a guide only.

to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Z [Product: psi, °C; Pressure Gauge: psi (and MPa)]

to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Z [Product: psi, °C; Pressure Gauge: psi (and MPa)]

to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Z [Product: psi, °C; Pressure Gauge: psi (and MPa)]

, Pressure Unit: Z [Product: psi, °C; Pressure Gauge: psi (and MPa)]

, Pressure Unit: Z [Product: psi, °C; Pressure Gauge: psi (and MPa)]

, Pressure Unit: Z [Product: psi, °C; Pressure Gauge: psi (and MPa)]

to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Z [Product: psi, °C; Pressure Gauge: psi (and MPa)]

Body Size: 30, Model Type: Air Filter + Regulator + Lubricator, Thread: N (NPT), Port Size: 03 (3/8), Float Type Auto Drain: w/o Auto Drain, Pressure Gauge/Digital Pressure Switch: w/o Pressure Gauge, Attachment: V (Mounting Position: AF + AFM + AR + V), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: Standard (Polycarbonate Bowl + Lubricator), Bowl Guard: None, Air Filter

to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Z [Product: psi, °C; Pressure Gauge: psi (and MPa)]

Body Size: 40, Model Type: A (Filter Regulator + Lubricator), Thread: N (NPT), Port Size: 04 (1/2), Float Type Auto Drain: w/o Auto Drain, Pressure Gauge/Digital Pressure Switch: w/o Pressure Gauge, Attachment: V (Mounting Position: AF + AFM + AR + V), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: Standard (Polycarbonate Bowl + Lubricator), Bowl Guard: None, Air Filter Drain

Body Size: 40, Model Type: B (Air Filter + Regulator), Thread: N (NPT), Port Size: 04 (1/2), Float Type Auto Drain: w/o Auto Drain, Pressure Gauge/Digital Pressure Switch: w/o Pressure Gauge, Attachment: V (Mounting Position: AF + AFM + AR + V), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: Standard (Polycarbonate Bowl + Lubricator), Bowl Guard: None, Air Filter Drain Port

, Pressure Unit: Z [Product: psi, °C; Pressure Gauge: psi (and MPa)]

Body Size: 20, Model Type: B (Air Filter + Regulator), Thread: N (NPT), Port Size: 02 (1/4), Float Type Auto Drain: w/o Auto Drain, Pressure Gauge/Digital Pressure Switch: w/o Pressure Gauge, Attachment: V (Mounting Position: AF + AFM + AR + V), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: Standard (Polycarbonate Bowl + Lubricator), Bowl Guard: None, Air Filter Drain Port