Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

Air Catch Sensor

ISA11-4L-01BG ZSE2 ISE2 ISA15-1-01G ZSP ISl ZSM Accessories (Optional) PFl Bracket ISA-1-A Gauge G33-3-01 DIN rail ISA-2-1 to 7 IFl Gauge/G33-3-01 Bracket /ISA-1-A DIN rail/ISA-2-1 to 7 Material: SPC (Nickel plated) Material: Aluminum 10 hex. 100 110 q w e r t L 90 10 25 5 4-4.5 7.5 30 R1/8 34 42 28 4.5 35 27 9 16.5 13 5.6 L Applicable model Part No. 105 140 175 210 245 280 315 Description

Rotary Table Series MSU

Internal construction with auto switch Model Auto switch unit part number MDSUA1, 3 MDSUA7, 20 P211070-1 MDSUA 1 P211090-1 MDSUA 3 P211060-1 MDSUA 7 Auto switches are not included with switch units.

Series MXP Precision Air Slide Table

Allowable kinetic energy E max. : Table 1 Possible to use by E=0.0181 Load rate of moment Wa=W max. Calculate allowable load Wa(N). Wa=112=12 =1 W max.=12 1=2/12=0.167 Allowable load coefficient : Graph 1 Calcurate load rate (1) of moment.

Pneumatic Transfer System Series MF

When equipped with system 2, there are four supply ports, A through D. 32 Air supply ring 24 24 21 Air supply unit body 12 Rc(PT)1/8 Air supply port (plug) 32 IN IN 64 52 (Min. 29) 42 (Min. 29) Supply block unit OUT 342 (Min. 316) + Stroke Air supply ring Air supply unit circuit diagram Rc(PT) 1/8 Air supply port 110 12 2-Rc(PT)1/8 Stroke end air supply port (64) 34.5 32 12 65.5 9

Steam Valve

N.C. 6A 8A 10A 10A 15A 20A 25A 32A 32F 40A 40F 50A 50F 1 8 1 4 3 8 3 8 1 2 3 4 7 1 15 2 20 3 25 4 1 1 1 4 32 5 11 4 B Flange 11 2 40 6 11 2 B Flange 2 50 7 2B Flange 634 Steam Valve: 2 Port Valve For SteamVND Series Model Port size Flow rate characteristics Weight (kg) Orifice dia.

Refrigerated Air Dryer

Standard Products IDFAE Series Air flow capacity (m3/h [ANR]) Outlet air pressure dew point Rated inlet condition Page Model Refrigerant Port size 3C 7C 10C IDFA3E 12 15 17 Rc 3/8 IDFA4E 24 31 34 Rc 1/2 IDFA6E 36 46 50 P. 92 to 94 R134a (HFC) IDFA8E 65 83 91 Rc 3/4 IDFA11E 80 101 112 35C 0.7 MPa IDFA15E1 120 152 168 Rc 1 IDFA22E 182 231 254 R 1 IDFA37E R 11/2 273 347 382 P. 95 to 97 R407C

Rotary One-touch Fittings Manifold Series KM

Thread R(PT) Port B min. port size Weight (g) D2 L1 L2 L3 P A Q1 Q2 M1 M2 1 8 1 4 3 8 6 4 KM14-04-06-01S-3 13 14 17 18 13 10.4 38.2 16 9.9 17 68 71.5 73.5 19 26 39 4.5 KM14-04-06-02S-3 12.8 10.4 KM14-04-06-03S-3 64 65.5 67.5 1 8 1 4 3 8 8 4 KM14-04-08-01S-3 31 69.5 70.5 71 73.5 76.5 77.5 17 19 15.5 10.4 38.2 16 11.1 18.5 39 6 KM14-04-08-02S-3 15.2 10.4 KM14-04-08-03S-3 1 8 1 4 3 8 8 6 KM14

Rotary Table

4 13 Magnet 4 12 Bearing retainer 1 11 Table 1 10 Cushion pad 2 Size : 3, 7 9 Adjusting bolt 2 8 Hexagon nut 2 7 Pinion 1 6 Piston 2 5 End cover 2 4 Seal 1 3 Plate 1 2 Cover 2 1 Body 1 No Description Qty Note . 20 - Basic circuit Circuit structure The standard circuit for operating a rotary cylinder with an air filter, regulator, solenoid valve and speed controller is shown in Figure 1 below

VQ

Stations Stasions 3 2 1 Dside Uside 02 2 stations VVQ1000-10A-2 20 20 stations Port size and thread 01N 01T 01F M5, Rc(PT)1/8 NPT1/8 NPTF1/8 G(PF)1/8 Only thread port size 1/8 style (2U type, P/E port) has choice of thread.

CEx-OMQ0010

No.CE-OMQ0010-C CE2 CE2 SMC 1 2 2 2-1. 89 2-2 10 2-2-1. 10 2-2-2. 11 3 1213 4 4-1. 14 4-2. 14 4-3. () 15 5 5-1. 16 5-2. 16 5-3 17 5-4 1718 6 6-1. 18 6-2 19 6-3. 19 7 7-1. 20 7-2. 2021 8 8-1 21 8-2. 2122 8-3. 22 8-4. 23 8-5. 2324 1 1) (ISO/IEC)(JIS) 2) *1) ISO 4414:Pneumatic fluid power General rules relating to systems.

IP80-OM00019

(1) (1) (2) (3) A O B (4) (5) /() 0.2 AB (6) 31 (7) 9. (1)(1.) (2) (3) (4) (5) 18 (1) (2) (3) IP65IP65 2.83.0Nm (4) (5) (6) (7) (8) 0 (1) (1) (2) (3) (4) (1) (2) (3) (4) 19 (1) (2) (3) 10 1. OUT1OUT2 OUT1OUT2 OUT2 OUT2 / +/ ( 8. ) ( 5. ) ( 7-3) 2.ON-OFF OUT1OUT2 ( 3-2-3 ( 4. ) ) 20 3. ( ) ( 8. ( 11-1 ) ) (A) (A): P2240112 4.

PSxx-OMS0006CN

-100.0100.0 kPa T 2 N NPN1 P PNP1 A1 A M SI*2 () P (psi)*1 1 2kPaMPa A2 B () M5 M5 M5 B 01 R1/8 N01 NPT1/8 D + 1 L 2m -8No.PS-OMS0006CN-G / A ZS-46-A1 3X8L (2 ) B ZS-46-A2 3X8L (2 ) ZS-46-B + ZS-46-D ZS-46-3L 3 2m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4H 6mm ZS-46-C6H 1/4 inch ZS-46-N7H 4mm ZS-46-C4L 6mm ZS-46-C6L 1/4 inch ZS-46-N7L -9No.PS-OMS0006CN-G LCD LCD

LC6D/LC6C

connector Model LC5-1-C1-02-X252 Cable length 0.2m LC6C LC6C Cable length: 1 to 5m 2 1 4 3 6 5 8 7 10 9 12 11 14 13 16 15 18 17 20 19 1 Communication connector 2 c Cable length: 0.2m 20 View c 315

Miniature Regulator Series ARJ310

One-touch fitting ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 Note) M5 x 0.8 female thread is cut inside the pipe.

Compact Cylinder with Air Cushion Series RQ

50 6.6 mm OB P Q RB S U Z Bore size (mm) 32 40 50 9 Rc 1/8 23 7 58.5 31.5 14 9 Rc 1/8 28 7 66 35 14 11 Rc 1/4 31.5 8 80 41 19 Refer to page 9 for details on rod end nut and accessories.

PSxx-OMG0005CN

2030 10 1% * -7No.PS-OMG0005CN-E 0 01 28 C2 PSE56 0 (01MPa) (1) C2 1 (0-101kPa) 3 (-100100kPa) *PSE200 4 (0500KPa) (15V) 01 R1/8(M5) 28 (420mA) 02 R1/4(M5) C01 Rc1/8 N01 NPT1/8(M5) N02 NPT1/4(M5) A2 URJ1/4 B2 TSJ1/4 ZS-28-C 1 Rc1/4 ZS-31-X175 1 NPT1/4 ZS-31-X186 1 Rc1/8 ZS-31-X188 1 NPT1/8 ZS-31-X189 1 15[V]F.S.=514[V] (1F.S.40.010.04[V]) F.S. ( 25[]ON-OFF (1K 1M A/D 5V A/D

PF2D

3 x 7.2 (= 21.6) 8-M3 OUT2 NC Sensor 36 +0.5 0 8 Load 6.4 4 OUT1 Black 7 3 Load 1 2 3 4 Brown + 6 2 +0.5 0 Blue 19.4 5 1 12 to 24 VDC Series PF2D5 5 6 7 8 PF2D301-A(-M) Do not connect the white wire of the sensor to c of the display unit.

Manifold Regulator Modular Type ARM2500/3000 Series

5 to 60C (No freezing) Ambient and fluid temperature Fluid Air Construction Relieving type Symbol Port Size/Weight Common IN Individual IN Port size Weight (kg) IN Pressure gauge port size 1 Model Piping IN side OUT side Body Regulator End plate End plate OUT IN 2 1 2 OUT Common IN 1 4 3 8 1 8 ARM2500 0.26 0.06 Individual IN 1 4 1 4 1 8 Common IN 3 8 1 2 1 8 IN 1 OUT 2 2 OUT ARM3000 0.47

LECA6_C

I/O ()1 I/O (8 ) 64 / I/O 12 6 - 2.2.