Modular F.R.L. Unit

37 62.5 32 80.5 IS1000E-4004 Max. operating current IS1000E-4006 Note 1) in the model numbers indicates a thread type.

RB/RBL/RBQ

/Bumper 16 Cushion Short type Applicable model Bumper 16-RBQC1604 20-RBQC2007 25-RBQC2508 30-RBQC3009 32-RBQC3213 Nil C Basic type With bumper Option None With stopper nut Addl 1 of hex. nut (Total: 3 pcs. ) Nil S O.D. threadStroke absorption 2 mounting hexagon nuts are attached as standard. Bumper cannot be mounted for basic type.

Fieldbus system (PROFIBUS DP compliant)

No.4 No.5 No.6 Output point COM A COM B COM C COM D OFF OFF OFF 64 16 16 16 16 OFF OFF ON 0 OFF ON OFF 16 8 8 OFF ON ON 24 8 8 8 ON OFF OFF 32 8 8 8 8 ON OFF ON 48 16 16 16 ON ON OFF Reserve ON ON ON : It cannot be set to 0 simultaneously for input and output point. -23No.EX-OMI0032-G 3.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40

16 MT-S20 20 20 MT-S25 25 MT-S32 32 25 MT-S40 40 Replacement parts for rod end male thread.

3 Port Air Operated Valve Series SYJA300 1

: VPA744V(A port) Rc 3/8, 1/2 16 119.5 (PA port) Rc 1/8 16 80 67 (R port) Rc 3/8, 1/2 2(A) NO 53 66 PA 40 3(R) 1(P) NC 2-6.2 (Mounting hole) Switch mark 55.8 52 81.5 82.3 33.5 32.5 24 16 (P port) Rc 3/8, 1/2 5-5-20 9 Series VPA300/500/700 Manifold Specifications How to Order 1 04 41 02 3 VV3PA Thread type SA Nil Rc G NPT NPTF VP Air operated manifold F VA N T SA Body size A port size VV3PA7

5 Port Air Operated Valve Series SYA3000/5000/7000 1

8 (P , EA, EB port) SYA5120-01 1/8 (A, B port) 5-2-11 10 Series SYA3000/5000/7000 Series SYA5000: Body Ported SYA5220-01 2 position double SYA5220(-F2) C4, N3 C6, N7 C8, N9 1/8 (A, B port) M5 x 8 (Pilot port) 2 3.2 (For manifold mounting) One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" 6, 1/4" 8, 5/16" Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco,

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

, 40 How to Order w y e r t u i q LEKFS 32 E A 300 R1 CD17T q Size w Motor mounting position e Motor type r Lead [mm] 25 32 40 Nil In-line R Right side parallel L Left side parallel Symbol LEKFS25 LEKFS32 LEKFS40 H 20 24 30 A 12 16 20 B 6 8 10 E Battery-less absolute (Step motor 24 VDC) y Motor option t Stroke*1 u Actuator cable type/length Robotic cable [m] Nil None R8 8*2 R1 1.5 RA 10*

Electric Actuator with Integrated Guide

Dimensions 45 2-6 Driver 149 160 6 A B 130 Driver input/output signal list (CN-1/F connector ) Driver dimensions Signal description Command pulse input Command pulse input Command code input Command code input Deviation counter clear input Deviation counter clear input Brake interlock signal output Pin no. 14 15 16 17 18 32 33 34 35 36 Signal PULS PULS SIGN SIGN CLR CLR BK COIN SG P-IN Signal

VQC

") N1 (1/8") N3 (5/32") N7 (1/4") VQC101 1.0 0.65 Metal seal Rubber seal C10 (for 10) VQC200 C4 (For 4) C6 (For 6) C8 (For 8) 2.6 2.0 N11 (3/8") Series VQC2000 to 80 In case of branch type C12 (for 12) N13 (1/2") N3 (5/32") N7 (1/4") N9 (5/16") VQC201 3.2 2.2 C8 (For 8) C10 (For 10) C12 (For 12) ^{Metal seal Rubber seal VQC400 Rc 1/2 6.9 6.3 N7 (1/4") N9 (5/16") N11 (3/8") (NPT,}

Plug-in/Plug Lead: Single Unit

(Common EXH type) 32 16 3 R 1(P) 40.3 4(A) 2(B) 03: Rc 3/8 04: Rc 1/2 3(R') 5(R1) 3(R2) Circuit diagram Plug-in type Plug lead type 2-6-34 Base Mounted Series VQ5000 Throttle valve spacer 179 (Plug-in type) 133 (Plug lead type) 32 16 VVQ5000-20A-1 (Plug-in type) VVQ5000-20A-5 (Plug lead type) 3 5 1(P) 4(A) 40.3 A throttle valve spacer is mounted on a manifold block to control cylinder speed

ZSE30/ISE30

ports (M5 x 0.8) 16-2-2 3 Space-saving improvement Economical use of space Old Model ZSE4E ISE4E Each display required its own panel opening.

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

1/8 9.5 4.5 (41) (67) (73) Pilot port threaded type 20 39 30 A A 32 2 x 5 MAX 14 (52.6) M5 x 0.8 Depth 5 Pilot port M5 x 0.8 Depth 5 Pilot port 44 36.5 23.5 1/8 1/8 9.5 (41) 4.5 (67) 501 Tube Extensions Series LVD How to Order Body class LVD 2 0 06 T Option Symbol 2 3 4 5 None With flow rate adjustment Nil 1 Orifice dia. 4 8 10 16 Body class 2 3 4 5 Note) Refer to Variations in the table

Cylinder with lock

How to use P.16 3-1. Usage P.16 3-2. Lock release mechanism P.17 3-3. Auto switch P.19 3-4. Wiring method and examples of auto switches P.31 4. Maintenance P.32 4-1. Consumable parts P.32 4-1-1. Seal kit P.32 4-1-2. Storage of seals P.32 4-2. Lock unit replacement P.33 4-3. Checks P.34 4-3-1. Inspection points P.34 4-3-2. Inspection interval P.34 4-4. Replacement of seals P.34 4-4-1.

modular-press-e

Straight type V Elbow type Fitting size One-touch fittings for regulator Straight V 2.5 3 6.5 Elbow W 6 6.5 6 Elbow X 11 11 11.5 Elbow Y 35.5 36 38.5 4, 5/32 6 1/4 8, 5/16 W X Y Note) The O-ring is attached.

Modular F.R.L. Pressure Control Equipment

Straight type V Elbow type Fitting size One-touch fittings for regulator Straight V 2.5 3 6.5 Elbow W 6 6.5 6 Elbow X 11 11 11.5 Elbow Y 35.5 36 38.5 4, 5/32 6 1/4 8, 5/16 W X Y Note) The O-ring is attached.

180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

180 Angular Type Air Gripper Rack & Pinion Type MHW2 Series 20, 25, 32, 40, 50 How to Order M9BW 20 MHW2 D 1 Made to Order Refer to page 712 for details. 2 fingers Number of fingers 2 Number of auto switches Bore size 20 25 32 40 50 Nil 2 pcs. 20 mm 25 mm 32 mm 40 mm 50 mm S 1 pc. n n pc.

Series KP/KPQ/KPG

1/4 3/8 1/2 3/4 Orifice size (mm) Series Body material LVC20 4 LVC30 8 PFA LVC40 10 LVC50 16 Clean Regulator Series SR Series SRH Contamination controlled stainless steel regulator Series Body Diaphragm Port size Rc Liquid-contact part materials 1/8 1/4 3/8 1/2 9/16-18UNF 7/8-14UNF Series SRH Liquid-contact surfaces PTFE + Fluoro rubber (grade A) Fluoro rubber (grade B) SUS316L (fluid-contact

Series KP/KPQ/KPG

1/4 3/8 1/2 3/4 Orifice size (mm) Series Body material LVC20 4 LVC30 8 PFA LVC40 10 LVC50 16 Clean Regulator Series SR Series SRH Contamination controlled stainless steel regulator Series Body Diaphragm Port size Rc Liquid-contact part materials 1/8 1/4 3/8 1/2 9/16-18UNF 7/8-14UNF Series SRH Liquid-contact surfaces PTFE + Fluoro rubber (grade A) Fluoro rubber (grade B) SUS316L (fluid-contact

Fluoropolymer Fittings Hyper Fittings LQ1 Series

Symbol Symbol Applicable tubing size (mm) 4 x 3 3 x 2 6 x 4 4 x 3 3 x 2 6 x 4 4 x 3 3 x 2 10 x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 4 x 3 3 x 2 10 x 8 8 x 6 12 x 10 10 x 8 12 x 10 10 x 8 8 x 6 6 x 4 3 x 2 12 x 10 19 x 16 12 x 10 19 x 16 12 x 10 10 x 8 6 x 4 19 x 16 19 x 16 25 x 22 19 x 16 25 x 22 19 x 16 12 x 10 25 x 22 Applicable tubing size (inch) 1/8" x 0.086" 1/4" x 5/32" 3/16" x 1/8" 1/8

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

A L D VT KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 D VP Color: White VG VP L DIN rail 12.5 (Pitch) 5.25 7.5 AXT100-DR-l VQ Enter suffix the number from DIN rail dimensions table below.