Regulator Unit Combination: Air Filter + Regulator, Port Size: NPT1/2, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: Presence, Exhaust Structure: Relief type, Flow Direction: [Reverse Flow (Right to Left)] Right to left, Drain Cock: [Not Provided] No, Pressure Gauge: No (No Pressure Port

Regulator Unit Combination: Air Filter + Regulator, Port Size: NPT1/2, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Metal] Metal, Case Guard: No, Exhaust Structure: Non-relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Auto/Manual] N.C. (Normally Closed) at non-pressurized without drain

Regulator Unit Combination: Air Filter + Regulator, Port Size: NPT1/2, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Metal] Metal, Case Guard: No, Exhaust Structure: Non-relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Auto/Manual] N.C. (Normally Closed) at non-pressurized without drain

Regulator Unit Combination: Air Filter + Regulator, Port Size: NPT1/2, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: Presence, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Auto/Manual] N.O. (Normally Open) at non-pressurized

Regulator Unit Combination: Air Filter + Regulator, Port Size: NPT1/2, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: Presence, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Auto/Manual] N.O. (Normally Open) at non-pressurized

Regulator Unit Combination: Air Filter + Regulator, Port Size: NPT1/2, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: Presence, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: [With Standard Pressure

Regulator Unit Combination: Air Filter + Regulator, Port Size: NPT1/2, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Nylon Case, Case Guard: Presence, Exhaust Structure: Relief type, Flow Direction: [Reverse Flow (Right to Left)] Right to left, Drain Cock: [Not Provided] No, Pressure Gauge: [With Standard Pressure Gauge

Regulator Unit Combination: Air Filter + Regulator, Port Size: NPT1/2, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: Presence, Exhaust Structure: Relief type, Flow Direction: [Reverse Flow (Right to Left)] Right to left, Drain Cock: [Not Provided] No, Pressure Gauge: [With Standard Pressure

SMC Wireless System PROFINET compatible

Signal name 1 24 V (Output) 1 24 V (Output) 2 0 V (Output) 2 0 V (Output) 3 24 V (Control and input) 3 24 V (Control and input) 4 0 V (Control and input) 4 0 V (Control and input) 5 Not used -100No.EX-OMW0006-D Regarding the 2 types of power supply The power supply consists of two power supply systems as follows: Power supply for control and input: Supplying power for control of each units

reduces flow setting time

1/4 V V V V V V V AS3ll1FSl-l03 3/8 V V V V V V V AS-FP AS4ll1FSl-l04 1/2 V V VNote 4) V V 10 AS2ll1FSl-G01 1/8 V V V V VNote 4) AS-FM AS2ll1FSl-G02 1/4 VNote 4) V V V V AS-D AS3ll1FSl-G02 1/4 V V V V G Face seal AS3ll1FSl-G03 3/8 V V V V AS-T AS4ll1FSl-G04 1/2 V V VNote 4) Note 1) Without sealant type can be selected as a standard option.

Membrane Air Dryer

D-DN

Base Mounted Metal Seal/Rubber Seal Series VQ

G T L S M kit (Flat ribbon cable with terminal block) kit (Terminal box) kit (Lead wire) kit (Serial transmission unit) kit (Multi-connector kit) Number of pins: 20 (VQ2000 only) 2-4-113 Valve Specifications Sonic conductance Type of actuation Voltage Electrical entry Manual override C [dm3/(sbar)] 4/2 5/3 (A/B R1/R2) 12 V 24 V DC 100 V 110 V AC 200 V 220 V AC 50/60 Hz 50/60 Hz Push type

EXxx-OMV0017-D

EXW1 EXW1 Up to 100 m V.1.0 / V.2.0 Available *1 EXW1 EXW1+EX600 *2 V.1.0 Not available EXW1 EX600 Up to 10 m V.1.0 Not available EX600 EXW1 Up to 10 m V.1.0 Not available Available *3 EX600 EXW1+EX600 Up to 10 m V.1.0 Not available Available *3 EX600 EX600 Up to 10 m V.1.0 Not available Available *1 Available in protocol V.2.0. *2 Up to 100 m between an EXW1-series Base and Remote, and up

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMA Symbol Nil D C Type KF (NW) K (DN) CF Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) XMA V V V V V V XYA V V V V V Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 3.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

AS3ll1FSGl-l02 1/4 V V V V V V V AS3ll1FSGl-l03 3/8 V V V V V V V AS-FP AS4ll1FSGl-l04 1/2 V V VNote 4) V V 10 AS2ll1FSGl-G01 1/8 V V V V VNote 4) AS-FM AS2ll1FSGl-G02 1/4 VNote 4) V V V V AS-D AS3ll1FSGl-G02 1/4 V V V V G Face seal AS3ll1FSGl-G03 3/8 V V V V AS-T AS4ll1FSGl-G04 1/2 V V VNote 4) Note 1) Without sealant type can be selected as a standard option.

Vacuum Pad

V A12 M12 x 1.75 V V AG1 G1/8 V V AG2 G1/4 V V AG3 G3/8 V V Male thread Pad material Symbol Material B5 M5 x 0.8 V V B8 M8 x 1.25 V V Female thread SF Silicone rubber Complies with the FDA (USA Food and Drug Administration) 21CFR177.2600 elution test.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

(Inch) M5 1/8 1/4 M5x0.8 VQZ1000 V V V V V Cylinder port VQZ2000 V V V V V VQZ3000 V V V V V Note 1) Mixing One-touch fittings and thread types is impossible.

Fieldbus system Digital unit

2 Output 4 2 3 0 V (Output) 24 V (Output) 4 Output 5 1 0 V (Output) 24 V (Output) 2 Output 6 3 3 0 V (Output) 24 V (Output) 4 Output 7 1 0 V (Output) 24 V (Output) 2 Output 8 4 3 0 V (Output) 24 V (Output) 4 Output 9 1 0 V (Output) 24 V (Output) 2 Output 10 5 3 0 V (Output) 24 V (Output) 4 Output 11 1 0 V (Output) 24 V (Output) 2 Output 12 6 3 0 V (Output) 24 V (Output) 4 Output 13 1 0 V

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

U side D side D D D D D D 3 2 1 Stations How to Order Solenoid Valve 10 SV 1 1 0 0 F 5 Note) Clean series Note) Available with manifold block for station additions. Refer to the WEB catalog.

42

) V V CC-LINK V D side U side 1 2 3 Stations SI Unit Part No.