HRL

Maximum load current 800 mA AC/DC or less1 Contact output signal 1, 2, 3, 4, 5, 6 Minimum load current 5 VDC 10 mA Output voltage range 0 to +10 V Analog output signal 1, 2 Maximum output current 10 mA Output accuracy 0.4% F.S. or less Output voltage 24 VDC 10% 200 mA MAX1 (No inductive load) When using this products power supply, connect pin 1 to pin 2 and the COM side of each contact input

IZx-OMP0064

IZS40 IZS41 IZS42 0 1 Remote Remote controller *1 controller *1 1 3 1 0.1 2 5 3 0.5 3 8 5 1 4 10 10 3 5 15 15 5 6 20 20 10 7 30 30 15 8 DC + DC + 20 9 DC DC 30 *1: Set when remote controller is used. 5-3-2.

E-P HYREG ® Series VY1

) 0.6 0.6 0.6 0.4 0.4 0.4 0.2 0.2 0.2 VY130-5 VY140-5 VY150-5 0 1 2 3 4 5 0 1 2 3 4 5 0 1 2 3 4 5 V V V VY130-6 VY140-6 VY150-6 1 1 1 0 2.5 5 7.5 10 0 2.5 5 7.5 10 0 2.5 5 7.5 10 V V V VY130-7 VY140-7 VY150-7 2 2 2 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA VY130-8 0 5 10 15 20 VY140-8 0 5 10 15 20 VY150-8 0 5 10 15 20 3 3 3 mA mA mA Command signal Command signal Command signal

Energy saving has also been considered as individual valves can be ordered with a power saving circuit as each valve can be manually turned off, safe maintenance is guaranteed.Individual wiring manifold, Direct mounting & Bracket Mounting, 10 STA. V100 SPECIAL, 3 PORT SOLENOID VALVE, VVD, 267 lb

Built-in one-touch fittings save piping time and labor., MANIFOLD, 10-STA VQ100, VALVE, VV3Q* MANIFOLD VQ 3-PORT, 2L, VV3Q*, .16534 lb

HEC_W-E

-8-8 8.6.3 SETTING MODE, LEVEL 3 -8-10 9 ALARM -9-1 9.1 HOW TO IDENTIFY ALARM -9-1 9.2 ALARM INDICATION -9-2 9.3 HOW TO RESET ALARM -9-3 9.4 ALARM CODE LIST-9-3 9.5 TROUBLESHOOTING -9-5 10 APPENDIX -10-1 10.1 SIGNAL AND STYLE OF CONNECTORS -10-1 10.2 POWER SUPPLY CABLE -10-2 10.3 CALCULATION OF DEW POINT (FROM PSYCHOMETRIC CHART) -10-3 v Contents Figure List Page No.

Fieldbus system EtherNet/IP TM compatible SI Unit

method. 10 HDX 11 BUS OUT port setting Unit 10 FDX 100 HDX 1: This function is valid only when "Hold/Clear priority" of the system parameter is set to "Via software". 2: Some PLC does not support an idle mode. 3: The count is memorized every hour.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-4-17

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-4-17

JA/JAH/JB/JS

050 JB16-4-070 JB20-5-080 JB25-6-100 JB40-8-125 JB63-10-150 JB80-16-200 JB100-20-250 JB140-22-250 JB160-24-300 12 16 20 25 32, 40 50, 63 80 100 125, 140 160 3 4 5 6 8 10 16 20 22 24 24.5 26.5 33 38 51 62.5 80.5 101 129 149 13 15 19.5 22.5 29 35.5 47.5 59 71.5 83 7 7 8 9 13 15 18 24 38 42 3 4.5 5 6 8.5 10 16 21 18 20 0.5 0.7 0.8 1 1.25 1.5 2 2.5 2.5 3 4 6 6.5 8 11 13 20 26 22 26 16 16 21 24

JA/JAH/JB/JS

63 80 100 140 160 3-050 4-070 5-080 6-100 8-125 10-150 16-200 20-250 22-250 24-300 Precautions 2.

LEF-OM002xx

10 to 300 701800 Note2) Stroke 30 to 930 20 to 620 10 to 300 801900 Speed range [mm/s] 30 to 780 20 to 520 10 to 250 9011000 30 to 660 20 to 440 10 to 220 10011100 Actuator specification 30 to 570 20 to 380 10 to 190 11011200 20 to 500 30 to 500 10 to 250 1000 Driver type LECPA Note2) Stroke 30 to 500 20 to 440 10 to 220 Speed 10011100 range [mm/s] 30 to 500 20 to 380 10 to 190 11011200

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Port size Body size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF 1 2 0 M5 06 AS 1F S G Body size 1 S Body size 2/3/4 AS 2 2 0 1F S G 01 06 With indicator Body size Made to Order Refer to page 698 for details. 2 1/8, 1/4 3 3/8 4 1/2 Type 2 Elbow 3 Universal Seal method Nil Without sealant S With sealant Control type Note) 0 Meter-out 1 Meter-in Note) Face seal type is used for the G thread

CXWM/CXWL

A73C A72H A73H E76A E73A F79 F7P J79 F79W 200 V Relay, PLC 2-wire 100 V 12 V Yes 24 V Connector 3-wire (NPN equivalent) IC circuit 10 5 V Grommet 2-wire 24 V Relay, PLC 100 V 12 V F7NV F7PV F7BV J79C F7NWV F7BWV F7BAV 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 10 16 20 25 32 3-wire (NPN) 3-wire (PNP) 24 V IC circuit 16 20 25 32 5 V, 12 V Diagnostic

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

Size 1 Size 2 Size 3 Location of P, EA, EB port Number of stations D U Bottom Top 1 1 station 10 10 stations Size of P, EA, EB port Note) SU and TBU require one station. 02 03 04 06 10 1/4 3/8 1/2 3/4 1 Location and size of A, B port 02 03 04 06 10 02B 03B 04B Side 1/4 Side 3/8 Side 1/2 Side 3/4 SIde 1 Bottom 1/4 Bottom 3/8 Bottom 1/2 Option Nil TBU SU W None With terminal box With SI unit

ZR

Supply pressure (MPa) Suction flow (l /min (ANR)) 13-3-10 10 Series ZR Large Size Vacuum Module: Ejector System Ejector Unit/Large Flow Type (L): Max.

Vacuum Unit Ejector / Vacuum Pump System

3 -20 3 1 4 Not specified Not specified 10,000 4 +3 4 5 5 Not specified Not specified 100,000 5 +7 6 +10 -19No.

15

Selection Graph [Graph 2] Allowable load mass by stroke 10 [Graph 1] Allowable load mass by stroke 6 10 10 Load mass [kg] Load mass [kg] y, z + A 200 y, z + A 300 y, z + A 100 1 1 0 100 200 300 400 500 600 0 100 200 300 400 Stroke [mm] Stroke [mm] [Graph 4] Allowable load mass by stroke 20 [Graph 3] Allowable load mass by stroke 15 100 10 y, z + A = 0 Load mass [kg] Load mass [kg] y, z

CHKD/CHKG

11 depth 6.5 63 1/4 19.5 10 40 65 55 10 22.4 19 M16 x 2 20 7 52 9 14 depth 8.6 71 1/4 20.5 10 50 71 60 11 28 24 M20 x 2.5 24 8 58 11 17.5 depth 10.8 81 1/4 22 10 63 80 67 13 35.5 30 M27 x 3 33 9 69 13 20 depth 13 97 1/4 25.5 10 80 95 78 17 45 41 M30 x 3.5 36 14 86 15 23 depth 15.2 117 3/8 30 15 100 122 96 26 56 50 M39 x 4 45 21 106 17 26 depth 17.5 142 3/8 36 15 Note 1) Body dimensions are

HRX-OM-O021

and wiring of power supply cable . 3-10 3.3.4 Wiring of remote operation signal input . 3-12 3.3.5 Wiring of operation signal output and alarm signal output . 3-14 3.3.6 RS-485 Communication wiring . 3-15 3.3.7 RS-232C Communication wiring . 3-16 HRS Series HRX-OM-O021 Contents 3.4 Piping . 3-17 3.5 Fill of circulating fluid . 3-19 3.6 Option J Piping ofAutomatic fluid filling . 3-20 3.7