5

-X 175 CG1Y Series Mounting Bracket Axial foot: CG1YL B LH 15 LT ZZ + Stroke LS + Stroke Z X W 2 x LC (Knock pin position) Y X Y M W 4 x LD LZ LX (mm) Axial Foot Bore size (mm) B LC LD LH LS LT LX LZ M W X Y Z ZZ 20 34 4 6 20 53 3 32 44 3 10 15 7 47 118 25 38.5 4 6 22 53 3 36 49 3.5 10 15 7 52 123.5 32 45 4 7 25 53 3 44 58 3.5 10 16 8 53 125.5 40 54.5 4 7 30 60 3 54 71 4 10 16.5 8.5 63.5

Air Cylinder Series CM2

-H -R -W N L Stroke Axial foot style: CBM2L Bore size LH B 4 x LD 2 x LC LT X Y Y X LS + Stroke Z ZZ + Stroke LZ LX -H -R -W N L Stroke N L Stroke Head side flange style: Rod side flange style: CBM2F Bore size -H -R -W CBM2G Bore size 4 x FD Mounting hole C2 2 x FD Mounting hole FY B FX FZ Z + Stroke FT FT Z 20 to 32 40 -H -R -W N L Stroke Single clevis style: CBM2C Bore size CD U L RR CX

5 Port Solenoid Valve

-19 (M3 x 26) 2 VF Valve + Restrictor spacer (VVQ4000-20A1 5 ) q AXT632-17-10 (M3 x 62) 3 VP4 q w w AXT632-17-19 (M3 x 26) 2 Not necessary when mounting the sub-plate.

LJ1H

Particle concentration (Particles/ft3) 10 10 Speed: 500mm/s 10 Speed: 1000mm/s 200 150 100 50 25 Vacuuming flow (l/min ANR) Test environment: Nippon Airtek: VS-1603L W x L x H = 620mm x 1550mm x 730mm Fed-st class 10 Approx. 0.3m/s Grease Application Areas Test equipment: Laser particle counter Hitachi Electric Engineering

Thermo-chiller/Rack Mount Type

Q = m x C x (T0 Tt) it = r x V x C x iT it = 1 x 20 x 4.2 x 103 x 12 900 = 1120 [J/s] 1120 [W] Q = m x C x (T0 Tt) it x 860 = c x V x 60 x C x iT it x 860 Cooling capacity = Considering a safety factor of 20%, 1120 [W] x 1.2 = 1344 [W] = 1 x 20 x 60 x 1.0 x 103 x 12 15 x 860 1120 [W] Thermo-chiller Q x t: Heat capacity [kJ] 20C Water bath Cooling capacity = Considering a safety factor

Compact 5-Port Solenoid Valve

n1 + 9 x n2 + a + b x n3 L2 = 6.5 x n1 + 9 x n2 + 43.4 M = {(L1 + c) / 12.5} + 1 Decimal fractions are truncated.

Sine Rodless Cylinder Series REA/REB

Individual -X 947 Series REAR Dimensions A K W HT HC X N 2 x P piping port H HA Y T 8 x MM thread depth M 4 x counterbore B CB L T Counterbore depth C 4 x J effective thread length E X F GW GP WS QW PW D 4 x LD HS CR Q + Stroke W K REAR10 REAR15 Switch rail HR G Plug Z + Stroke (mm) CR CB A B C D F G GP GW H HA HC HR HS HT J x E Model REAR10 2 0.5 10.5 6.5 3.2 12 6.5 6 27 25.5 26 24 25 24

Air Cylinder

D-X Technical Data 315 CG1W Series With Mounting Bracket Axial foot: CG1WLl LH B 15 LT LZ LX 2 LC (Knock pin position) W X Y Z LS + Stroke X M Y W 4 x LD (mm) Bore size Stroke range B LC LD LH LS LT LX LZ M W X Y Z 20 Up to 1500 34 4 6 20 53 3 32 44 3 10 15 7 47 25 Up to 1500 38.5 4 6 22 53 3 36 49 3.5 10 15 7 52 32 Up to 1500 45 4 7 25 53 3 44 58 3.5 10 16 8 53 40 Up to 1500 54.5 4 7 30

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

suppressor) 41.5[48.5] + M5 x 0.8 (X port) 35.6 28.5 26.1 X R P 13 5 5 10 M5 x 0.8 (P, R port) 10 8.6 7.5 17.5 23 L plug connector (L): 10-SYJ34M-L-M5 M plug connector (M): 10-SYJ34M-M-M5 M8 connector (WO): 10-SYJ34M-WO-M5 Approx. 300 (Lead wire length) 41.5[48.5] 26.1 46 M8 x 1 28.5 52.6[59.6] Approx. 300 (Lead wire length) 58.5[60.7] 48.7[50.9] 57.6 50.2 43.7 R P R P R P 10 8.6 10 8.6

5 Port Solenoid Valve

EX260 Serial transmission Calculation of dimensions L1 = 12.5 x n1 + 16 x n2 + 88.7 L2 = 12.5 x n1 + 16 x n2 + 48 M = L1/12.5 + 1 Remove all numbers after the decimal.

Electric Slide Tables

C B M A W Model LES8 LES16 LES25 B side parallelism to A side 0.4 mm B side traveling parallelism to A side Refer to Graph 1.

Table of Contents

Lead wire: 0.6 m) C W/suction filter (Mounting on ZX unit) M5 x 0.8 0X Connector type (Lead wire: 3 m) CL W/suction filter (Mounting on ZX unit) M6 x 1 (Option) 0XY Without connector Base mounting (Mounting on ZR unit) 0R CN Note) Single mounting type: M5 x 0.8 (female) threaded.

Modular Design with Uniform Body Style

OUT q (Port size) OUT q (Port size) Port size IN OUT OUT q e OUT w 1/8 Port size IN OUT OUT q e OUT w e Standard Specifications Fluid Air Ambient and fluid temperatures 5 to 60C (No freezing) Proof pressure 1.5 MPa Max. operating pressure 1.0 MPa Dimensions Body type: Standard Body type: Front and back port selectable 2 x P1 2 x P2 2 x P1 2 x P2 B B Center of F.R.L. body C Center of F.R.L

Possible to transfer a workpiece at low-speed.

L1 L1 = L1 = L1 L1 = Q1 = M Q1 = M Q1 = M Q1 = M L1= L1 L1= Q1 = M Q1 K axis Q1 T axis (mm) Q1 Q1 L1 L1 Size Thread M 3 x 0.5 M 4 x 0.7 M 5 x 0.8 M 6 x 1 M 8 x 1.25 M10 x 1.5 Rc 1/8 Q1 J axis Z axis (mm) 15 20 30 40 10 (mm) Size Thread M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 4.2 5 6.8 8.5 8.2 2.5 2.5 3.3 2.5 3.3 4.2 5 20 10 15 40 30 Size Thread M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 3.3

ZP

7 4 x 10 4 x 20 4 x 30 5 x 10 5 x 20 5 x 30 6 x 10 6 x 20 6 x 30 8 x 20 8 x 30 W P. 17 Oval pad 3.5 x 7 2 x 4 4 x 10 U H P. 33 HT P. 33 Heavy-duty pad HB P. 35 HW P. 36 U P. 27 Mark-free pad H P. 28 Related pad S Sponge pad P. 30 Resin attachment K P. 29 Pad with ball spline buffer U P. 24 H P. 37 Heavy-duty ball joint pad HB P. 43 Cyclone pad (Non-contact pad) Made to Order Note) The

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Driver Driver Servo amplifier Servo motor Servo amplifier Servo motor U U U U CAUTION V V M V M V W W W W Connecting a servo motor of the wrong axis to U, V, W, or CN2 of the driver may cause a malfunction. 3 3 3.

Compact Rotary Actuator Series CRQ2

MRQ L1 = L1 = L1 L1 = Q1 = M Q1 = M Q1 = M Q1 = M L1 = L1 Q1 = M L1 = K axis T axis L1 Q1 Q1 (mm) Q1 Q1 L1 L1 Size Thread M 3 x 0.5 M 4 x 0.7 M 5 x 0.8 M 6 x 1 M 8 x 1.25 M10 x 1.5 Rc 1/8 Q1 (mm) 20 30 15 10 40 J axis Z axis (mm) Size Thread M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 4.2 5 6.8 8.5 8.2 2.5 2.5 3.3 2.5 3.3 4.2 5 20 10 15 30 40 Size Thread M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x

Rotary Actuator

Applicable shaft types: S, W, Y X = Q1 = M L1 = L2 = L1 Q2 = M Q1 [mm] [mm] Size Thread 30 50 63 80 100 M3 x 0.5 2.5 M5 x 0.8 4 4 M6 x 1 5 5 M8 x 1.25 6.8 6.8 6.8 M10 x 1.5 8.5 8.5 M12 x 1.75 10.3 10.3 Rc1/8 8 8 Rc1/4 11 Size Thread 30 50 63 80 100 M3 x 0.5 2.5 M5 x 0.8 4 4 M6 x 1 5 5 M8 x 1.25 6.8 6.8 6.8 M10 x 1.5 8.5 8.5 M12 x 1.75 10.3 10.3 Rc1/8 8 8 Rc1/4 11 [

0.4

Load factor: ((Load mass x 9.8)/Theoretical force) x 100% Conditions Series CJ2 Series CM2 Series MB, CA2 Series Conditions Tube bore x Length T0604 (O.D. 6/I.D. 4) x 1 m VQ1101 Speed controller AS3001F-06 Silencer AN200-KM8 Tube bore x Length T0806 (O.D. 8/I.D. 6) x 1 m VQ2101 Speed controller AS3001F-08 Silencer AN200-KM10 5 I N D E X F kit P kit J kit G kit T kit L kit S kit M kit Construction

CRBU

Applicable shaft type: W (mm) (mm) Q1 = M Size M M3 x 0.5 Size M M3 x 0.5 40 30 20 15 40 30 20 15 2.5 2.5 2.5 2.5 2.5 2.5 2.5 2.5 L1 = M4 x 0.7 M4 x 0.7 L2 = 3.3 3.3 3.3 3.3 M5 x 0.8 M5 x 0.8 Q2 = M 4.2 4.2 Symbol: A17 Shorten the long shaft. Symbol: A18 Shorten the short shaft. Applicable shaft type: W A parallel keyway is used on the long shaft for size 40.