Applicable Auto Switch Model

Note 2) Refer to p.5.3-5 for lead wire length.

New

1 (IN), 2 (OUT) port 2 x M5 Thread depth N B 2 x P 1 (IN), 2 (OUT) port 2 x M5 Thread depth N K K J H J H Conduit terminal DIN terminal F Cable 6 to 12 Q D D S G1/2 Qp2 F 34 (44) 31.5 32 R 25 T C K C R E E Sp2 A A B1 2 x P 1 (IN), 2 (OUT) port B1 2 x P 1 (IN), 2 (OUT) port B B 2 x M5 Thread depth N 2 x M5 Thread depth N K J H J H G1/2 (mm) Grommet Grommet (with surge Dimensions Size Port

VQ

Consult SMC for other voltages. 2.9-12 Series VQ100 Plug Lead Unit Manifold (VV3Q12) L1 10.8 3.5 5 L2 3 P E 8.9 P E 11 Round head screw M1.7 X 14 W (L type) 28.7 26.5 W (M type) 300 33.8 300 2-3.5 Mounting hole 4-M5 SY P, E port Manual override SYJ 11.5 P=10 300 Latching, 100V AC or more VK H (M type) U side D side n 5 4 3 2 1 300 H (L type) VZ VT VT 42.2 L type M type 36.3 VP W

VZ1000

(Non-locking) 2-2.6 (Mounting hole for manifold) (Mounting screw) 4-M5 x 0.8 (Piping port) 2-M3 x 0.5 depth 8 (Mounting screw) L plug connector (L) VZ1120-L-M5 M plug connector (M) VZ1120-M-M5 DIN terminal (D) VZ1120-D-M5 (Lead wire length) Applicable cable O.D. 3.5 to 7 300 300 (Lead wire length) : With light/surge voltage suppressor 3-3-12 Series VZ1000 Manifold Specifications Manifold

Membrane Air Dryer

(A) L (B) P C D M Q Purge air for H dew point indicator J F K 37 N IN OUT (G) (E) (Maintenance space 100 mm or more) M5 female thread Drain P (A) IDG30AM2, 50AM2 IDG30HAM2, 50HAM2 IDG30LAM2, 50LAM2 (B) P D C Purge air for L Q H dew point indicator M J 37 F Drain Discharge N With float type auto-drain IN OUT OUT (R) K (E) N.O.: Black N.C.: Gray (G) Applicable tubing O.D.: 10 (NPT threads:

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

L plug connector: VQD1151l-lL-M5 M plug connector: VQD1151l-lM-M5 5 5 5.5 SY 4(A) 2(B) SYJ SX VK VZ Lead wire length: 300mm Direct manual override Light 27 VF VFR SMC 17.6 11.2 3(R) VP7 9 3 2-3.5 Mounting hole 10.9 9.1 VP4 5.5 VQ VQ4 33.5 38 37 12 28.5 VQZ 1(P) 1(P) VQD 4-M5 X 0.8 5.5 (P, A, B, R port) 13 VZS L plug connector (L) 49 50.5 VFS M plug connector (M) VS VS7 1.13-7 Series VQD1000

Compact Vacuum Unit

n 1 2 L1 L2 1.14 0.85 1.54 1.25 3 1.94 1.65 4 2.35 2.06 5 2.75 2.46 6 3.15 2.86 7 3.55 3.26 8 3.95 3.66 9 4.35 4.06 10 4.76 4.46 11 5.16 4.87 12 5.56 5.27 Refer to page 14 for the dimensions for the various vacuum (V) ports. 01 M5 ZB3 L(O)-P 0 1 1 3 K1 Q1 ZZB-S M5 Air pressure SUP Vacuum pressure SUP (PV) port 2 x 1/8, M5 thread depth 0.197 2 x 0.126 mounting hole L2 L1 (118: Lead wire length

Electric Slide Tables

LES8R/L LESH8R/L LES8D LES16R/L LES16D LESH16R/L LESH16D LES25R/L LES25D LESH25R/L LESH25D M3 x 0.5 0.63 M4 x 0.7 1.5 When a cable duct or flexible moving tube is attached to the actuator, the sliding resistance of the table increases and may lead to operational failure of the product. L M5 x 0.8 3 16.

Vacuum Ejector Series ZM

port (P) and individual air pressure supply port (P) can be mounted together.

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

Auto-shift function reduces influence of fluctuations in the supply pressure. 828 Pressure Sensor Series PSE530 How to Order PSE53 0 M5 Sensor range Option None 0 1 2 3 Nil Positive pressure [0 to 1 MPa] Vacuum [0 to 101 kPa] Low pressure [0 to 101 kPa] Compound pressure [101 to 101 kPa] Port size Sensor cable (3 m) M5 R06 R07 M5 x 0.8 6 reducer 1/4 inch reducer L ZSE ISE Option ZSP Connector

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

Sensors (R) (P) 7.4 3 (13) M plug connector (M) L plug connector: 10-VQD1151-L-M5 M plug connector: 10-VQD1151-M-M5 5 5 5.5 2(B) 4(A) Direct manual override Lead wire length 300 mm 27 Indicator light 17.6 11.2 3 3(R) 9 0.3 3.8 10.9 3.5 5.5 9.1 2 x mounting hole 33.5 28.5 37 38 1(P) 1(P) 5.5 12 4-M5 x 0.8 13 L plug connector (L) (P, A, B, R port) 49 50.5 M plug connector (M) 598 4 Port Direct

ITV

-600 (Option) 36 4 x M5 x 0.8 thread depth 6 mm L-bracket L-bracket assembly P398020-601 (Option) 15 25 7 2.3 45 10 33 (8.5) 50 828 B Electro-Pneumatic Regulator Series ITV1000/2000/3000 Dimensions (16 points preset input, 10 bit digital input, CC-Link, DeviceNet, PROFIBUS DP and RS-232C) 16 points preset input 10 bit digital input M12 x 1 Signal cable connection thread (Plug type) M12 x

Rotary Gripper Series MRHQ

x 0.8 Port A M5 x 0.8 Port B 4-M6 x 1 Depth 10 I N J E A D P A A M N 16.5 27 6.5 8 17.5 26 SMC R R 16 8 E O P T P A I R R Y G A R I 36 Side A Side B Scale: 40% 11 Series MRHQ Rotary Gripper 1in = 25.4mm Dimensions (mm) Scale: 50% MRHQ25 A B 58 70 93 4-M5 x 0.8 Depth 8.5 47 66h9 0 0.074 33.3 opened +2.5 0.2 10 0 0.1 12 0 0.06 M5 x 0.8 Finger closing port 19.3 closed 0 0.8 4-M5 x 0.8 (mounting

Slide Tables MX Series

Contact P/A if the actuator is used in above condition. Decrease in life or malfunction may result. Bolt used Max. tightening torque Nm(kgf/cm) Max. screw-in depth l (mm) Type MXS 6 MXS 8 MXS12 MXS16 MXS20 MXS25 0.9{9.2} 0.9{9.2} 2.1{21.4} 4.4{44.9} 4.4{44.9} 7.4{75.5} 4 5 5.5 6 10 13 M3 x 0.5 M3 x 0.5 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 Bottom screw Do not rotate.

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: P [Units Selection Function (Initial Value psi)], Under New Measurement Act Selection Function not Permitted for use in Japan, Piping Specification: N01 (NPT1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover), Bracket: A1 [Bracket A, Vertical Mounting (ZS-46-A1)]

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: P [Units Selection Function (Initial Value psi)], Under New Measurement Act Selection Function not Permitted for use in Japan, Piping Specification: 01 (R1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover), Bracket: A1 [Bracket A, Vertical Mounting (ZS-46-A1)]

Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: P [Units Selection Function (Initial Value psi)], Under New Measurement Act Selection Function not Permitted for use in Japan, Piping Specification: 01 (R1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover), Bracket: A1 [Bracket A (ZS-46-A1)]

Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: P [Units Selection Function (Initial Value psi)], Under New Measurement Act Selection Function not Permitted for use in Japan, Piping Specification: N01 (NPT1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover), Bracket: A1 [Bracket A (ZS-46-A1)]

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: IO-Link/Switch: 1 Output (PNP or NPN), Switching Type for Switch Output, Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A1 (Bracket A)

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: IO-Link/Switch: 1 Output (PNP or NPN), Switching Type for Switch Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Bracket A, Operation Manual