ITV

x 0.8 SRF M5 x 0.8 Air introduction port Air introduction port VCHR 19 34 19 34 ITV ITV VAC.

Integrated Controller

Calculate the load factor for each direction. x = Xc/Lx, y = Yc/Ly, z = Zc/Lz 5. Confirm the total of x, y, and z is 1 or less. x + y + z 1 When 1 is exceeded, please consider a reduction of acceleration and work load, or a change of the work load center position and series. Acceleration [mm/s2]: a Work load [kg]: m Work load center position [mm]: Xc/Yc/Zc z y 1. Horizontal 3.

Table of Contents

Description Body Material Note Baking finish q Aluminum alloy w w Baking finish Aluminum alloy Housing e Baking finish Aluminum alloy Drain guard y r Foam rubber Float IN t Pilot valve Stainless steel + Rubber y Lever Resin u Flushing button Brass t i Orifice r o Diaphragm Rubber Replacement Parts 10-1 e No. Description Part no. ADH-D400 Note 10-2 !

VQ5000

How to order applicable valves Stations VQ 5 1 0 0 Y 5 7 B W D side 3 2 4 6 1 5 Note) Stations are counted starting from station 1 on the D side. Body type 4.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken lines indicate DIN rail mount type [-D] and connector top entry [-JU].

MU

E1 NDH10 Size A1 E1 MM Size L1 L1 MM A1 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 10.5 12 14 18 16 18 20 28 27 31 36 46 M10 X 1.25 M12 X 1.25 M14 X 1.5 M18 X 1.5 10.5 12 14 18 14 18 20 28 27 31 36 46 M10 X 1.25 25 32 40 50, 63 25 32 40 50, 63 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 M12 X 1.25 M14 X 1.5 M18 X 1.5 Applicable pin NDH10 NL U1 U1 Part No. NO Part No.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

8 9 9 26 30 30 1.5 3 3 40 50 63 8 8 12 13 18 18 21 25 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.5 M10 x 1.5 M14 x 1.5 M16 x 1.5 119 121 123 117 134 134 160 166 135 158 158 20 25 32 40 50 63 80 100 13 14 14 15 16 16 19 22 Up to 300 301 to 1500 730 A Air Cylinder CG1W-Z 1011Axial Foot (L): CG1WL 1011With rubber bumper 15 LH B LT LT 4 x LD LZ LX 2 x LC (Knock pin position) M X W Y Y X

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

Material PBT PBT Brass Brass Note White Black (1) Body A Handle Body B Needle q w e r Electroless nickel plated Electroless nickel plated Electroless nickel plated, M5 type only y Needle guide Brass t M5 type U10/32 type M5 type U10/32 type Seat ring Lock nut U seal Electroless nickel plated Electroless nickel plated (3) Brass Brass (2) y u i HNBR o !

High Vacuum Angle Valve

Rc1/8 XLFV M5: Port 1(P), 3(R) Rc1/8: Port 1(P), M5: Port 3(R) Weight [kg] XLF 0.29 0.49 1.2 1.9 3.3 5.7 XLFV 0.34 0.54 1.3 2.0 3.4 5.8 1 Conductance is the value for the elbow with the same dimensions. *2 A coating of vacuum grease [Y-VAC2] is applied to the seal-material sliding portion of the vacuum part.

3 Port Solenoid Valve Metal Seal Series VZ200 1

x 0.8, Rc 1/8 C4, C6 C4, C6 Rc 1/8 VZ215VZ225Base mounted (Without sub-plate) VVZ200-31A-2 VVZ200-32A-2 M5 x 0.8 Rc 1/8 VZ212--M5 VZ222--M5 Body ported VP Port size Applicable valve model VG VV3Z2-20-061 VP Blanking plate VVZ200-32A-1 VVZ200-31A-1 S070 Screws and Gasket Assembly Part No.

EX510

y t Shown with cover removed.

CE

x 0.8 16 5.2 25 15.5 25, 50, 75, 100, 125, 150, 175, 200 106 78 15.5 10 36 53.5 M8 x 1.25 10 8 28 25.5 Q R T V Y N O P Bore size (mm) 12 20 M4 x 0.7 M5 x 0.8 47 7 53.5 22 7 5.5 M6 x 1 M5 x 0.8 50 15 62.5 36 5 For rod nut and accessory bracket, refer to page 10-12-20.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

With brake: 150 Without brake: 115 Housing 36.5 32 Thread size M4 x 0.7 6 4 70 M5 x 0.8 6 4 70 Effective thread length (mm) Quantity P.C.D. B 89 A A B Section BB Coupling P.C.D.

CE

x 0.8 16 5.2 25 15.5 25, 50, 75, 100, 125, 150, 175, 200 106 78 15.5 10 36 53.5 M8 x 1.25 10 8 28 25.5 Q R T V Y N O P Bore size (mm) 12 20 M4 x 0.7 M5 x 0.8 47 7 53.5 22 7 5.5 M6 x 1 M5 x 0.8 50 15 62.5 36 5 For rod nut and accessory bracket, refer to page 10-12-20.

CE

x 0.8 16 5.2 25 15.5 69 15 6 25 42.5 25, 50, 75, 100, 125, 150, 175, 200 106 M8 x 1.25 10 8 28 25.5 78 15.5 10 36 53.5 Q R T V Y N O P Bore size (mm) 12 20 47 7 53.5 22 7 M4 x 0.7 M5 x 0.8 50 15 62.5 36 5 5.5 M6 x 1 M5 x 0.8 For rod nut and accessory bracket, refer to page 10-12-20.

MGP

X 0.8 6 8 10 12 58 64 83 93 8 8 9.5 9.5 13 M4 M4 M5 M5 4.5 4.5 5.5 5.5 8 8 8 10 10 13 15 18 21 18 13 15 18 21 5 5 6 6 18 22 24 30 12 16 20 25 26 30 36 42 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 11 M5 X 0.8 M5 X 0.8 M5 X 0.8 15 10 19 MGC 53 37 10.5 M5 X 0.8 M5 X 0.8 Rc1/8 12.5 10.5 25 53.5 37.5 11.5 M6 X 1.0 M6

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

M5 x 0.8 3 position 4 position 65 Note) Please contact SMC for the weight of elbow fittings.

21

Double Knuckle Joint (mm) Y-020B, Y-032B Material: Iron Y-040B Material: Cast iron R1 R1 ND hole H10 Axis d9 MM MM ND hole H10 Axis d9 E1 E1 NX NZ L NX NZ L A1 U1 L1 A A1 U1 L1 A Retaining ring Split pin Included pin part no.

Stainless Steel 316

(mm) Connection thread Model R3/8 KQGS04-M5 KQGS04-01S KQGS06-M5 KQGS06-01S KQGS06-02S KQGS08-01S KQGS08-02S KQGS08-03S KQGS10-02S KQGS10-03S KQGS12-03S KQGS12-04S M5 R1/4 4 10 R1/8 R3/8 M5 R3/8 12 6 R1/8 R1/2 R1/4 R1/8 Union Tee Union Tee 8 R1/4 Applicable tubing O.D.

Title not found

(800) 526-7661 M5 x 0.8 Series Fibre Gasket Supplied 1/4 Hex Typ 35/64 35/64 29/64 29/64 .085 29/64 83 M5-B2 1/2 M5-B1 M5-B2 M5-B3 M5-B4 15/32 1/2 11 32 11 32 11 32 9/32 13/64 9/32 13/64 13/64 3 5/16 Hex Typ 84 M5-LB4 M5-LB1 M5-LB2 M5-LB3 M5-LB2 1/2 1 15/16 11/16 11/16 11/16 3 3 1/4 Hex Typ 5/16 Hex Typ 85 M5-T1 M5-T2 M5-T3 M5-T4 M5-T2 1/2 See complete selection of adapters on pages