Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

ZL3-OM00801

ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 V A M W 1 1 2) 3) 4) 5) 6) 7) 8) 9) 10) 11) 12) 13) 14) 4) 2) 1) 3 300L/min(ANR) M 0.35MPa *2 P 6 600L/min(ANR) H 0.50MPa 3)P V/ *23 (V) (P) 5/ 06 Rc3/4 K1 N.C.+N.C. 8() 04 2xRc1/2 K2 N.C. *1 F06 G3/4 B1 N.0.+N.C. *1 F04 2xG1/2 B2 N.O.

VZ3000

G H (Mounting hole) Manual override (Non-locking) (Mounting hole pitch) (Mounting hole pitch) (Lead wire length) G: 300 mm H: 600 mm (Piping port) (PE port) (Lead wire length) L plug connector (L) VZ3140-L-01 M plug connector (M) VZ3140-M-01 300 (Lead wire length) 300 : With light/surge voltage suppressor DIN terminal (D) VZ3140-D-01 Built-in speed controllers VZ3150Applicable cable O.D.

3 Port Solenoid Valve Metal Seal Series VZ200 1

/surge voltage suppressor 2-3.4 mounting hole VFN Applicable cable O.D. 3.5 to 7 Pg7 With light/surge voltage suppressor 2-3.4 mounting hole 60 52.1 M plug connector: VZ4 2-M(Z)-01 1 2 30 26.7 23 4 With light/surge voltage suppressor 12 19.5 84 2-3.4 mounting hole Max.10 91 300 (Lead wire length) 4-15-13 14 Series VZ400 Dimensions: Sub-plate Mounted Grommet: VZ4 5-G H (S)1 2 01 02 2-4.5 mounting

Digital Flow Switches

MULTI COUNTER:CEU5 UP M/C COUNT PRESET FUNC. LEFT RIGHT DOWN SEL.

Title not found

a v e Meial 0 3 3 0 3 9 N4ela 0 3 1 NC Va ve Base Mounted N O V a v e N C Valve lvleta 0 59 N O V a v e 3-port Base Mounted Valve conneclor with 300mrn lead wre M lpe plug teminalwithout lead wire Also Available 50700/5070 Manifolds Manifold 7mm width compacl 3 and 5 port valves with low power consumption of 0.35W (0.1W with power saving circuit) size (A port) 3-port Body Ported ffi ' Dc

ZL3-OM00601

No.ZL3-OM00601-B 1.How to Order ZL3 M 06 1 K1 5 LO Z 1 E A M G 1 Without valve ZL3 M 06 1 K1 5 LO Z 1 E A M G 1 With valve Pressure switch ZL3 M 06 1 K1 5 LO Z 1 V A M W 1 with energy saving function 1) 2) 3) 4) 5) 6) 7) 8) 9) 10) 11) 12) 13) 14) 1) Max. suction flow 2) Standard supply pressure 4) Exhaust specifications 3 300L/min(ANR) M 0.35MPa Nil Exhaust through silencer H 0.50MPa

Digital Pressure Switch

(example: If the Pressure switch with output impedance of 1k is connected to the A/D converter to detect the analogue output of 5V, the detected voltage by the A/D converter becomes 5(V) 1(M)/(1(k) + 1(M)) 4.995(V), and there is an error of approximate 0.005 V). Output impedance Output type The operation type of the switch output.

VZ5000

Closed Center/Exhaust Center/Pressure Center VZ5320 Grommet (G), (H) VZ5 20-01 G H (Mounting hole for manifold) 3 4 5 Manual override (Non-locking) VZ5420 VK VZ VF (Lead wire length) VFR VZ5520 G: 300 mm H: 600 mm (Mounting hole) VP4 VZS VFS VS4 VQ7 (PE port) EVS VFN (Piping port) L plug connector (L) VZ5 20-L-01 M plug connector (M) VZ5 20-M-01 (Lead wire length) 3 4 5 3 4 5 300 (Lead wire

VXA31/32

Option Symbol and Composition Fluid Name and Option Option symbol and body material Brass Stainless steel Option symbol Seal material Body material Support material (Driving parts) Standard A B G H J M (Non-leak) N P V (Non-leak) Fluid (Application) V M Silicon oil A H NBR FKM EPDM NBR FKM EPDM FKM FKM EPDM FKM Note 1) Note 1) Vacuum (up to 1.3 x 101 Pa) Fuel oil (up to 60C) Brass A H V M

VXZ

Note 2) Please contact SMC for details. 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) AC Operating Fluid and Ambient Temperature DC Operating fluid temperature (C) Ambient temperature (C ) Temperature conditions Power source Water (Standard) Air (Standard) Oil (Standard) (D.E.N.P) (D.N) (3) (3) High temperature water High temperature oil 99 100 60 40 40 60

VZ3000

G H (Mounting hole) Manual override (Non-locking) (Mounting hole pitch) (Mounting hole pitch) (Lead wire length) G: 300 mm H: 600 mm (Piping port) (PE port) (Lead wire length) L plug connector (L) VZ3140-L-01 M plug connector (M) VZ3140-M-01 300 (Lead wire length) 300 : With light/surge voltage suppressor DIN terminal (D) VZ3140-D-01 Built-in speed controllers VZ3150Applicable cable O.D.

JXCx-OMT0005CN

DRV C RESET <> 66 - <>12 1 [] A [a ] (01-103) [] C RESET 2 [SW] A [a ] <> <> (01-144) D RESET SVON <> <> <>(M24V) (01-145) D RESET SVON <> <> <> (01-146) D RESET SVON <> 67 - <> <>(DC24V) D RESET SVON (01-147) <> <> <> (01-148) D RESET SVON <> <> (01-149) D RESET SVON <> <> Communicati on error. (01-150) D RESET SVON <> (01-192) E <> <> <> ON(SVON ON)

OMS0020

1 0 to Note1) 11 AREA A Position 1 [m] Note1) 1 0 to Note1) 12 AREA A Position 2 [m] Note1) 1 0 to Note1) 13 AREA B Position 1 [m] Note1) 1 0 to Note1) 14 AREA B Position 2 [m] Note1) 1 0 to Note1) 15 Unused 4 Step Data No. 2 (Step Data No. 1Note6) 0-15 Same as above.

KRM

K M H 2-4.5 mounting hole D N-FA Applicable tubing O.D. MS T VMG Applicable tubing O.D.

High performance type Step Motor Controller (Servo/24 VDC)

Product Outline 5 2.1 Product features 6 2.2 Product configuration 7 2.3 How to Order 8 2.4 Option 9 (1) Actuator cable [5 m or less] 9 (2) Actuator cable [8 to 20 m] 9 (3) Actuator cable for actuator with lock (for sensor and lock) [5 m or less] 10 (4) Actuator cable for actuator with lock (for sensor and lock) [8 to 20 m] 11 (5) I/O Cable 11 (6) Communication cable for controller setting

IDX-OM-W023

TDR TDR For Option M TDR V CM MC For Option V OLR MC TDR MC 01 OLR MC 01 OLR MC 01 PTC CM MC OLR PTC CM PTC MC TDR PTC CM CM FM1 PRS C11 PRS MC FM1 FM1 PRS FM1 PRS P TDR MC P FM2 TDR P C12 P FM2 FM2 TDR FM2 TDR PRS C11 FM1 MOV MOV MOV M For Option M P C12 FM2 MOV M For Option M M For Option M M For Option M M For Option M CM PTC PTC C01 FM1 PRS C11 FM2 TB C12 ILS MC GFCI OLR

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

Target position (01-149) Posn failed D SVON Input The connection with the higher-level devices is disconnected. A Communication error occurred (01-150) RESET Communi Do not interrupt the connection between the PC and teaching box when the electric actuator is being operated by upperlevel devices.

4-channel Flow Monitor ( compatible)

For example, when analogue output is 1 to 5 V, F.S. = 5[V] 1[V] = 4[V], (ref. 1%F.S. = 4[V] x 1% = 0.04[V]) F.S. (Full span, Full scale) H Hysteresis The difference between ON and OFF points used to prevent chattering. Hysteresis can be effective in avoiding the effects of pulsation.

Multi-channel Digital Sensor Monitor ( compatible)

PSE202A-(M)# IO-Link/NPN open collector 1 output + NPN open collector 4 output specification When used as an IO-Link device Max. 30 V, 80 mA Residual voltage 1.5 V or less When used as a switch output device Max. 80 mA Residual voltage 1.5 V or less -18No.PS-OMW0012-C PSE203A-(M)# IO-Link/PNP open collector 1 output + PNP open collector 4 output specification Used as IO-Link device Max. 30