High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

S) (mm) Dimensions PB S Model LVD2m-Tm LVD3m-Tm LVD4m-Tm LVD5m-Tm PA 12.5 26 A B 26 29.5 Dimensions (mm) A B C D E F G H J K L M N P Q T U Model LVD2m-Tm LVD3m-Tm LVD4m-Tm LVD5m-Tm 30 30 61 56 14.5 104 35 13 4 20 44 7 30 6 31.5 17 M5 x 0.8 35 35 79.5 62 17.5 136 42.5 17.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82 62 20 137 45 17.5 6 22 50 7 39 6 36 21 M5 x 0.8 45 45 105.5 76 25 169.5 65 17.5

VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

Modular Type Air Filter Series AF

1 Drain q r e w t i u y o !0 !

Compact Guide Cylinder

Plug Part Number Bore size [mm] Part number Port thread type Quantity 12 (10 x 2) 16 (12 x 2) P-M3 M3 8 20 (16 x 2) 25 (20 x 2) 32 (25 x 2) P-M5 M5 8 P-R1 Rc1/8 8 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) P-N1 NPT1/8 8 P-G1 G1/8 8 P-R2 Rc1/4 8 80 (56 x 2) 100 (71 x 2) P-N2 NPT1/4 8 P-G2 G1/4 8 * 1 set includes 8 pieces.

Magnetically Coupled Rodless Cylinder

piping type: 15 to 40 HB HC N X W K H 2-P (Piping port) HA CB 4-J x E T 4-counter bore dia.

VCW

Grommet: G Conduit: C 2-M 2-M L L K Approx. 300 K Q F D Approx. 280 D Q F C R C G (PF) 1/2 R E B A H E 2-P Port size A H 2-P Port size B DIN connector: D Conduit terminal: T 2-M 2-M L L K Cable 6.8 to 10 K 27.5 F F Q (Q) 34 S 25 U R C R C G (PF) 1/2 (44) E B A H D (S) E G (PF) 1/2 B A H D 2-P Port size 2-P Port size N.C.

51

Symbol Foot (mm) A AL D I B B1 C H1 H W GA GB H2 J KA LC LD LH LS LT LX LZ M MM NA P S X Y Z ZZ Bore size (mm) 20 25 32 40 50 63 80 100 12 20 5 12 14 4 33 10 14.5 34 13 8 6 4 26 M4 x 0.7 6 20 (3) 32 44 3 M8 x 1.25 24 M5 x 0.8 57 15 7 32 83 Width across flats 6 length 3.5 12.5 23 6 15 16.5 4 36 10 17.5 38.5 17 10 7 4 31 M5 x 0.8 6 22 (3) 36 49 3.5 M10 x 1.25 29 M5 x 0.8 60 15 7 35 89.5 Width

Vacuum Ejector Series ZM

port (P) and individual air pressure supply port (P) can be mounted together.

VCW

Nil: NBR F: FKM E: EPDM P: PTFE OR-1717-178For VCW30, 40 t Nil: NBR F: FKM E: EPDM P: PTFE OR-3305-178Nil: NBR F: FKM E: EPDM P: PTFE After replacing coils, press the clip in the direction of t. 17-2-50 3 Series VCW Direct Operated 2 Port Solenoid Valve For Water Precautions Be sure to read before handling. Refer to page 17-6-3 for Safety Instructions and Solenoid Valve Precautions.

3 Port Solenoid Valve Rubber Seal Series SY100 1

Type S41 How to Order Applicable solenoid valve Note) SY114SY114ASY124SY124AApplicable blanking plate assembly SY100-77-1A SS3Y1 S41 05 M3 Stations A port side 02 M3 M5 M3 x 0.5 M5 x 0.8 2 stations 20 20 stations P R R port M5 x 0.8 P port M5 x 0.8 A port M3 x 0.5 M5 x 0.8 Note) SY114(A) and SY124(A) cannot be mounted on the same manifold.

3 Port Solenoid Valve Rubber Seal Series SY100

Type S41 How to Order Applicable solenoid valve Note) SY114SY114ASY124SY124AApplicable blanking plate assembly SY100-77-1A VP SS3Y1 S41 05 M3 S070 Stations A port side VQ 02 M3 M5 M3 x 0.5 M5 x 0.8 2 stations VKF 20 20 stations P R VQZ R port M5 x 0.8 P port M5 x 0.8 A port M3 x 0.5 M5 x 0.8 VZ Note) SY114(A) and SY124(A) cannot be mounted on the same manifold.

Power Valve Precision Regulator

B 2 Valve body size VEXB-2P VEX1-9-1 P Port size Port size M5 1/8 Thread type Port size Thread type Rc G Note) Thread type Symbol A B Symbol Nil F N T Symbol Nil F N T Symbol A B Thread type Rc G Note) Sub-plate Port size 1/8 1/4 NPT NPTF NPT NPTF VEXB-4 Seal material VEX1-11-2 Base gasket Symbol Nil B Seal material NBR seals FKM seals Note) Not conforming to ISO1179-1. 844 VEX13 Series 0

Integrated Controller

p. 44 Construction p. 46 Dimensions p. 47 Auto Switch Mounting p. 29, 53 Solid State Auto Switch, Normally Closed Solid State Auto Switch, 2-Color Indicator Solid State Auto Switch p. 30, 54 e-Actuator Electric Specifications p. 59 Wiring Examples p. 60 Operation Data Setting p. 61 Options p. 62 Slider Type Specific Product Precautions p. 33 Rod Type Specific Product Precautions

Rotary Clamp Cylinders

Example) M5 x 75 L (MK2B) 6 Moment of inertia (kgm2) 4 MK220/25 2 Mounting bolt 103 6 4 Operating range Flat washer 2 104 Note) Be sure to use a flat washer to mount cylinders via through-holes. 50 100 200 66 120 D 75 85 80 90 90 100 80 90 105 135 105 135 Cylinder model C Mounting bolt size M5 x 75 L M5 x 85 L M5 x 80 L M5 x 90 L M5 x 90 L M5 x 100 L M5 x 80 L M5 x 90 L M6 x 105 L M6 x 135

CXWM/CXWL

CX D2-M5 x 0.8 Hexagon socket head cap plug 6H7 +0.012 0 2 x 2-5.2 through 2 x 2-9.5 counterbore depth 5 End lock mechanism -X (6H7 hole pitch) 4-M5 x 1.0 thread depth 9 20Data 4 positions for set screws for 6H7 depth 4 +0.012 0 6H7 thread depth 8 +0.012 0 fixing shock absorbers 2-RB1006-X552 Shock absorber (mm) F L P Q S SS Z ZZ Model CXWL20-25R CXWL20-50R CXWL20-75R CXWL20-100R CXWL20-

AS

D3 Applicable tubing O.D. d D1 A L4 L3 M T L1 L2 H (Width across flats) Metric size (mm) T D1 H D3 L1 L2 L3 M L4 Note 1) A Note 2) Model Weight d (g) Lock Unlock Lock Unlock AS12;1F-M5-02A 2 5.8 15.8 20.6 11.9 AS12;1F-U10/32-02A AS12;1F-M5-23A 16.9 3.2 7.2 5 M5 x 0.8 AS12;1F-U10/32-23A 9 9 26.5 25.4 23.5 22.4 17.2 22 10-32 UNF AS12;1F-M5-04A 4 8.2 13.3 AS12;1F-U10/32-04A AS12;1F-M5-06A 16.5

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

Type 41R How to Order SS3YJ7-41R-05 --01 R port 1/4 Applicable solenoid valve SYJ714RSYJ724RX port (External pilot type) M5 x 0.8 Stations R P Applicable blanking plate assembly SYJ700-10-2A P, R port thread type X 02 : 20 2 stations : 20 stations P port 1/4 Nil 01 1/8 A port size Rc G NPT NPTF A A F N T A port 1/8 Note) For more than 9 stations, supply/exhaust air to/from both sides of P



External pilot port Without M5 x 0.8 thread: Internal pilot VVEXB-1 With M5 x 0.8 thread: Common external pilot VVEXB-2 P = 31 P(1) port: Rc 1/8, For 6 manifold stations or n-Rc 1 8 more, exhaust from the both sides.

SZ3000

0 5 (EA) 1 (P) 3 (EB) 4(A) JIS symbol 3 position closed center (A) 4 (B) 2 2(B) 5 (EA) 1 (P) 3 (EB) 5(EA) 1(P) 3(EB) i 3 position exhaust center (A) 4 (B) 2 3 position closed center/exhaust center/pressure center 5 (EA) 1 (P) 3 (EB) w e q r t y u o !0 3 position pressure center (A) 4 (B) 2 4(A) 5 (EA) 1 (P) 3 (EB) 2(B) 5(EA) 1(P) 3(EB) i Parts list Material Description No.

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

KK130 P.198 Universal nipple M-5ALU-6 Body rotates at 360 around the stud axis P.197 P.196 DM M5 male x M5 male PAT.