System: Vacuum Pump System, Single Unit, Valves: Supply Valve; N.C., Release Valve; N.C., Rated Voltage: 24 VDC, Vacuum Sensor: w/o Pressure Sensor, Digital Pressure Switch for Vacuum, Connector: L-type Plug Connector, Vacuum, V Port: Inch Size, ø1/4" One-touch Fitting, Bracket: B [One Bracket for Mounting Single Unit, (Mounting Screw Attached)], Pump System PE Port Female Thread: w/o Option

System: Vacuum Pump System, Single Unit, Valves: Supply Valve; N.C., Release Valve; N.C., Rated Voltage: 24 VDC, Vacuum Sensor: w/o Pressure Sensor, Digital Pressure Switch for Vacuum, Connector: L-type Plug Connector, Vacuum, V Port: Metric Size, ø8 One-touch Fitting, Bracket: B [One Bracket for Mounting Single Unit, (Mounting Screw Attached)], Pump System PE Port Female Thread: -, Individual

System: Vacuum Pump System, Single Unit, Valves: Supply Valve; N.C., Release Valve; N.C., Rated Voltage: 24 VDC, Vacuum Sensor: w/o Pressure Sensor, Digital Pressure Switch for Vacuum, Connector: L-type Plug Connector, Vacuum, V Port: Inch Size, ø5/16" One-touch Fitting, Bracket: B [One Bracket for Mounting Single Unit, (Mounting Screw Attached)], Pump System PE Port Female Thread: -, Individual

Process Pump

Symbol C[dm3/(sbar)] b Cv N.C.

Digital Flow Switches, Series PF2A, Series PF2W

MULTI COUNTER:CEU5 UP M/C COUNT PRESET FUNC. LEFT RIGHT DOWN SEL.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Circuit for DC Circuit for AC Light A A() [+] SOL SOL C(+) [] C ZNR Light Due to the use of non-polar light, the VQZ series has no polarity. Refer to p.1.12-26 for latching style. Connection of Lead Wire (Not necessary if ordering lead wire pre-connected model.)

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com.

C D E F Dimensions Part no.

HRX-OM-M090

As the circulating fluid temperature is within the set range of "AS.06", "AS.06" alarm monitoring starts. Status (2): The circulating fluid temperature becomes within the set range of "AS.04". "AS.04" alarm monitoring starts.

HRX-OM-W058

As the circulating fluid temperature is within the set range of "AS.06", "AS.06" alarm monitoring starts. Status (2): The circulating fluid temperature becomes within the set range of "AS.04". "AS.04" alarm monitoring starts.

HRX-OM-R016

As the circulating fluid temperature is within the set range of "AS.06", "AS.06" alarm monitoring starts. Status (2): The circulating fluid temperature becomes within the set range of "AS.04". "AS.04" alarm monitoring starts.

HRX-OM-O021

As the circulating fluid temperature is within the set range of "AS.06", "AS.06" alarm monitoring starts. Status (2): The circulating fluid temperature becomes within the set range of "AS.04". "AS.04" alarm monitoring starts.

HRX-OM-R005

As the circulating fluid temperature is within the set range of "AS.06", "AS.06" alarm monitoring starts. Status (2): The circulating fluid temperature becomes within the set range of "AS.04". "AS.04" alarm monitoring starts.

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

1) IF30 is available for 06.

HAW

) Q R Cooling water outlet 87 G (H) K J Cooling water inlet S T 2 x 2 x U Mounting holes D N Drain C (A) B (M) W Rc (mm) B C D E F G H J K L M N P Q R S T U V W Y Z 473 ZA HAW2-04 HAW7-06 HAW22-14 HAW37-14 HAW55-20 HAW75-20 HAW110-30 Model A 360 570 948 1354 1612 2112 1724 1 2 3 4 1 2 1 2 3 4 3 4 3 4 3 4 1 2 1 2 3 4 395 10 10 12 18 18 18 18 4.5 4.5 4.5 6.0 6.0 6.0 8.0 94 94 150 139 139 139

SL5200

Material Code Body Poppet 316L SS Hastelloy C-22 Diaphragm 316L SS Hastelloy C-22 Seat material S 316L SS secondary remelt Gauge port (Inlete, Outletr) Code Material PCTFE (Standard) Vespel 4) Pressure gauge 2) psig/bar unit MPa unit No gauge port No pressure gauge (Connections: 1/4 inch face seal male) SH Code No code No code Surface finish VS Range options 1) 4) Not available with SH material

A-HEC-OM-J004

SV OU T 1 [Tips] OU T 2 AL 2 C OM R D Y DI AL 1 Status when control is stopped Lights up when control is stopped. When control is stopped, the RDY LED lights up.

VP4

Flow Characteristics/Weight 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Weight (kg) Port size Model Type of actuation C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 4.5 5.1 5.6 4.5 5.1 5.6 4.0 4.5 5.0 4.2 (4.0) 4.8 (4.5) 5.5 (4.8) 0.33 0.28 0.28 0.33 0.28 0.28 0.29 0.23 0.23 0.29 (0.28) 0.24 (0.27) 0.23 (0.30) 16 19 21 16 19 21 15 18

25

One-touch fitting 06 08 10 6 One-touch fitting 8 One-touch fitting 10 One-touch fitting Power supply cable Refer to the table below for selection of One-touch fittings.

Ozone Resistant

5000 6000 1000 2000 3000 4000 4000-06 2550 3050 4050 4050-06 3050 4050 4050-06 2060 2560 3060 4060 4060-06 5060 6060 425 625 825 925 3000 210 1020 300 400 500 600 AWM Mist separator regulator VQZ AWD Micro mist separator regulator SQ AS Speed controller VQD SY Flow control valves SYJ SX 3-port solenoid valve (2) VQ VQ VQZ AS Speed controller SY SYJ Regulator AR Pressure control valves Filter

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

3 O-ring Retaining ring for hole type C Tool steel NBR !4 !4 Spacer Note) 10, 12, 3/8", 1/2" are made of POM, stainless steel, and brass (Electroless nickel plated). POM (2) !5 Gasket NBR, Stainless steel !6 Retaining ring for hole type C Tool steel !7 Note 1) 3/16", 5/16", 3/8", 1/2" are made of POM, stainless steel, brass (Electroless nickel plated).