Vacuum Pad

6 7 7 Width across flat 10 Width across flat 10 2 2 D 2 2 D M5 x 0.8 2 M5 x 0.8 M8 x 0.75 M8 x 0.75 10 22 A B 10 22 A B Square 8 Square 8 4 4 15 15 1.8 1.8 8.4 13 2 10 6 Dimensions (per stroke) Dimensions (per stroke) Weight (g) Weight (g) 11 Model Model 14 A A B D B D Rotating (K) Non-rotating (J) Rotating (K) Non-rotating (J) ZP3-Y10B:3-B5 ZP3-Y10B:6-B5 ZP3-Y10B:10-B5 ZP3-Y13B:3-B5 ZP3

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Bore size (mm) Stroke range (mm) A B C D L P Z E F G H I K1 K2 Th9 J M N Q W 12 5 to 30 37.2 30.2 10 M3 x 0.5 M5 x 0.8 6 6 3.5 25 1.5 32 5.2 5 15.5 3.5 15 15 0 0.043 16 5 to 30 38 31 10 M4 x 0.7 M5 x 0.8 8 8 1.5 6 3.5 29 38 6 20 3.5 15 20 0 0.052 20 5 to 50 43 34 9.5 M5 x 0.8 M5 x 0.8 7 10 2 8 4.5 36 47 8 25.5 5.5 17.5 13 0 0.043 25 5 to 50 47 37 11 M6 x 1.0 M5 x 0.8

NCQ2/CQ2

Series Copper/Fluorine free series B A Spring return B A Port size M5 x 0.8 Spring extend A-A section (Port on rod end) B-B section (Port on head end) Rod end male thread Replacement Parts/Seal Kit Component Parts Note Description Cylinder tube Piston Material Aluminum alloy Aluminum alloy Stainless steel No. 1 2 Kit no.

Air Cylinder

MM GA NDh8 D MM NN GA Piping port 2 x M5 x 0.8 NN C D B 0 0.3 Z + 2 x Stroke S + Stroke H NA F A NA F H + Stroke A B 0 0.3 Stroke With air cushion: CJ2WB 10 16 AZ Mounting nut WA WA Rod end nut 45 GA Piping port 2 x M5 x 0.8 GA C B 0 0.3 NA NA B 0 0.3 Z + 2 x Stroke S + Stroke For details of the mounting nut, refer to page 63.

Vacuum Pad

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

Vacuum Pad

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

Vacuum Pad

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

Vacuum Pad

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

Base Mounted Metal Seal/Rubber Seal Series VQ

5.5 9 (4(A), 2(B) port) 9 9 9 SMC 5 3-C4, M5(1(P), 4(A), 2(B) port) M5(5(R1) , 3(R2) port) 8.7 8.7 C4: One-touch fitting for 4 M5: M5 thread < >: AC 2 position double: VQ025 0 1 15.2 15.8 12.3 5 5 Manual override A B A B (For C4) 31.5 10.5 25 18 A A B B ~ = ~ = EB P EA EB EB P EA EA 23.4 mounting holes 38 31 Lead wire length = 300 121<131> M plug connector 108<118.5> L plug connector 51 (

CQ2

A RR1 Part No.

Metal Seal/Rubber Seal Series VQ Body Ported

A A A A A A A 44.5 R P 34.5 26.5 28 25 B B B B B B B B 18.5 19 11 2n-C3, C4, M5 6 7.5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting 18.4 P = 10.5 M5: M5 thread Note 1) Built-in silencer types are equipped with a 1 (P) SUP port on both D and U sides. 3 position needs two stations.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Bore size (mm) Stroke range (mm) A B C D E G H K1 K2 L P Th9 Z F I J M N Q W 12 5 to 30 37.2 30.2 10 M3 x 0.5 M5 x 0.8 6 6 25 1.5 5.2 5 3.5 32 15.5 3.5 15 15 0 0.043 16 5 to 30 38 31 10 M4 x 0.7 M5 x 0.8 8 8 3.5 29 1.5 6 6 38 20 3.5 15 20 0 0.052 20 5 to 50 43 34 9.5 M5 x 0.8 M5 x 0.8 7 10 4.5 36 2 47 8 8 25.5 5.5 17.5 13 0 0.043 25 5 to 50 47 37 11 M6 x 1.0 M5 x 0.8

Micro Mechanical Valve Series VM1000

Twist selector (3 position) VM133-M5-35 (R, B, G, Y) A VM153-M5-35 (R, B, G, Y) A Panel mounting hole ON 45 T.T.

Table of Contents

NH NC DTT UU TT UU Auto switch magnet holder M5 x 0.8 (Port) -X GA GA 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) Cushion needle G G 20GB M5 x 0.8 (Hexagon socket head plug) N A M5 x 0.8 (Port) Data Z + Stroke M5 x 0.8 (WW) (WW) (Hexagon socket head plug) 2 x 2-J depth K M5 x 0.8 (Hexagon socket head plug) XX XX M5 x 0.8 (Port) VV VV 2-M5 x 0.8 (Hexagon socket

SYJ3000/5000/7000

S 20 20 stations P, R port thread type + + + + + + + A, B port size R R P P port 1/8 R port 1/8 A B M5 Nil Rc M5 x 0.8 B A A, B port M5 x 0.8, C4 A, B port M5 x 0.8, C4 C4 F G One-touch fitting for 4 N3 N NPT One-touch fitting for 5/32" T NPTF Common SUP/Individual EXH type Note) For more than 10 stations, supply air to both sides of P port.

SYJ300/500/700

P, R port thread type S 20 20 stations A A X port (External pilot type) M5 x 0.8 A port size Nil Rc X P R A port M5 x 0.8, C4 R port M5 M5 x 0.8 + + + + F G 1/8 C4 4 One-touch fitting A A P port X P R N NPT P port 1/8 N3 5/32" One-touch fitting 1/8 T NPTF X port (External pilot type) M5 x 0.8 R port A port M5 x 0.8, C4 Note) For more than 8 stations, supply/exhaust air to/from both sides

15

70 50 4 34 NX M5 x 0.8 9 63 40* 4.5* 37.2 NW M5 x 0.8 9 70 50 5 35 NV M4 x 0.7 8 63 40* 4.5* 37.2 NU M5 x 0.8 9 70 50 5 35 NT M5 x 0.8 9 70 50 4 34 NM1 M4 x 0.7 8 47.14 38.1* 4.5* 21 NM2 M4 x 0.7 8 50 36* 4.5* 28 * Dimensions after mounting a ring spacer (Refer to page 818.) 817 LEFB Series Motorless Type When mounting a hub, remove the oil content, dust, or dirt sticking to the shaft and

CRBU

B C D R Model CDRBU2WU10-S 22 45.5 14 M5 x 0.8 CDRBU2WU15-S 25 47 18 M5 x 0.8 CDRBU2WU20-S 34.5 51 20 M5 x 0.8 CDRBU2WU30-S 47.5 55.5 22 M5 x 0.8 CDRBU2WU10/15-D Double vane type CDRBU2WU20/30-D A port B port A port B port A port B port Free mounting rotary actuator Free mounting rotary actuator Free mounting rotary actuator Cover Angle adjuster Angle adjuster Angle adjuster Switch unit Switch

CJ2

Stroke A Port location on head cover: Axial location (R) Mounting nut Rod end nut Piping port Cover surface M5 x 0.8 Piping port 2-M5 x 0.8 S + Stroke Z + Stroke Rod End Nut Material: Iron Part no.

3 Port Air Operated Valve Series SYJA300

P, R port thread type S 20 20 stations A A X port (External pilot type) M5 x 0.8 A port size Nil Rc X P R A port M5 x 0.8, C4 R port M5 M5 x 0.8 + + + + F G 1/8 C4 4 One-touch fitting A A P port X P R N NPT P port 1/8 N3 5/32" One-touch fitting 1/8 T NPTF X port (External pilot type) M5 x 0.8 R port A port M5 x 0.8, C4 Note) For more than 8 stations, supply/exhaust air to/from both sides