VZ5000

Round head combination screw VQ7 ( ) M3 x 8 With spring washer EVS Blanking plate VZ5000-68-1A VZ5000-68-1A VFN Manifold gasket Applicable Plug Assembly (D-sub connector cable assembly) Cable length 1.5 m 3 m 5 m 8 m Assembly part no.

Manifold Specifications

Round head combination screw VQ7 ( ) M3 x 8 With spring washer EVS Blanking plate VZ5000-68-1A VZ5000-68-1A VFN Manifold gasket Applicable Plug Assembly (D-sub connector cable assembly) Cable length 1.5 m 3 m 5 m 8 m Assembly part no.

AC Servo Motor Driver (Pulse input type/Positioning type ）

H T E d W T D L Max.

42

106 47 96.2 For U side mounting (TO) 9 71.7 For D side mounting (TD) 27 37.6 X 12 X 12 n U SIDE 4B 4A 4 B A 3B 3A 3 8 2B 2A 2 1B 1A 1 2 4 NO.

New

D-DN

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

H T E d W T D L Max.

LEC-OM07605CN

(1) LECSS2-T P+DP+CG3G4 G3G4 P+D P+D P P+ C C G3 D (3) (1) G4 5m 5 m (12) 1.

Title not found

Vahs e, Gasket, Manifold / Subphftn Base Blnnk PlateAss'g DXT192-13-1A EXH Relocation SpacerAss'y oxT192-21-1A -*t\ f i"oor*n"o,ro" s.'.. lT ll I Base oounred tYPe *-l i.,.,!t, i J ,li,l,,,'i '1 "'\" ')'t' :' t't I I ir --)2' i .. il ."'i 3sskt i D-tn6t1oi .'.'

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

Vahs e, Gasket, Manifold / Subphftn Base Blnnk PlateAss'g DXT192-13-1A EXH Relocation SpacerAss'y oxT192-21-1A -*t\ f i"oor*n"o,ro" s.'.. lT ll I Base oounred tYPe *-l i.,.,!t, i J ,li,l,,,'i '1 "'\" ')'t' :' t't I I ir --)2' i .. il ."'i 3sskt i D-tn6t1oi .'.'

5 Port Solenoid Valve Series SV

To find the stroke time (t), follow arrow from your stroke length ("L") to the solid line representing the load ratio (d%) for the application then up to the stroke time (t). To find the ending cylinder speed (u), follow arrow from your stroke length ("L") to the dotted line representing the load ratio (d%) then down to the ending cylinder speed (u).

VZ1000

Note EVS Manifold block assembly VZ1000-1A-1 q D side For D side, with D-sub connector and P/R port with One-touch fitting for 6 SUP/EXH block assembly SUP/EXH block assembly VZ1000-2A-1D w VFN For U side, with D-sub connector and P/R port with One-touch fitting for 6 DIN rail VZ1000-2A-1U e End block assembly End block assembly For D side For U side Without D-sub connector For indicated

High Vacuum Angle Valve

D-G

Manifold Specifications

Note EVS Manifold block assembly VZ1000-1A-1 q D side For D side, with D-sub connector and P/R port with One-touch fitting for 6 SUP/EXH block assembly SUP/EXH block assembly VZ1000-2A-1D w VFN For U side, with D-sub connector and P/R port with One-touch fitting for 6 DIN rail VZ1000-2A-1U e End block assembly End block assembly For D side For U side Without D-sub connector For indicated

Aluminum High Vacuum Angle Valve

AS568-016V XM XY AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A XLD160-2-9-1A Standard S valve seal assembly r XLD(V) XLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A AS568-009 XLD100-2-9-1A XLD160-2-9-1A Special DNote 3) In cases where the seal material is other than the standard (FKM: includes Compound no. 1349-80: made by Mitsubishi Cable Industries, Inc.),

VZS

from D side as the 1st one.

AC Servo Motor Driver (Network card type ）

H T E d W T D L Max.

VZ100/300/500

DXT201-19-1A Note With screw (For VZ52) Refer to pages 4-6-34 to 4-6-45 for manifold use.

Table of Contents

D. Applicable tube O. D.

o

ih* tlrb ldt vJ300-10-1A Type 42,42R,542 and S42R Applicable valves Type 42 & S42 NVJ314-O NVJ3140-O NVJ324-O NVJ3240-O Type S42 NVV3J3O42 Poollion qf A port ts | End cover side S I Solenoid side Typ 42R & S42R NVJ314R-O NVJ324R-O mli|ll!ih* phfi &Jt vJ300-10-1A Tyw 42R (External pilot lype) Station I o2T, staf,o"s lT, 20 I 20 stations A port siae Ts llcarr.romfMs) B3T lo"d !

o

ih* tlrb ldt vJ300-10-1A Type 42,42R,542 and S42R Applicable valves Type 42 & S42 NVJ314-O NVJ3140-O NVJ324-O NVJ3240-O Type S42 NVV3J3O42 Poollion qf A port ts | End cover side S I Solenoid side Typ 42R & S42R NVJ314R-O NVJ324R-O mli|ll!ih* phfi &Jt vJ300-10-1A Tyw 42R (External pilot lype) Station I o2T, staf,o"s lT, 20 I 20 stations A port siae Ts llcarr.romfMs) B3T lo"d !